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January 23­26, Semiconductor Process Analysis and Control (Semipac); Lake Las Vegas, NV. Contact: 847/548-1800.

February 14­15, Cleanroom Mechanical Systems Concepts; Tempe, AZ. Contact: 480/965-5324.

February 15­17, Semicon Korea; Seoul. Contact: 650/964-5111.

February 16­17, 3C 2000, Contamination Control & Cleanroom Products; Birmingham, England. Contact: +44 (0) 1822 614671; fax, +44 (0) 1822 614818.

February 21, Semiconductor Processing Overview; Mountain View, CA. Contact: 650/369-7890.

February 22­24, Eighth International Exhibition and Conference on Electromagnetic Compatibility; Düsseldorf, Germany. Contact: +49 711 619460.

February 27­March 3, SPIE's 25th Annual International Symposium on Microlithography; Santa Clara, CA. Contact: 360/676-3290.

February 28­29, Dielectrics for ULSI Multilevel Interconnection (DUMIC), Santa Clara, CA. Contact: 813/978-3552 (fax).


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