Product Extra!

YieldNET third-generation data-management software from Inspex can provide multiple fabs with an overall yield management strategy. This software permits a fab to analyze all phases of wafer manufacturing and find ways to improve line performance. By using YieldNet, one fab can compare its data to similar data generated in another fab, easing the transfer of new devices from pilot lines to production lines. Scaleable to small custom fabs as well as large ones, YieldNET can isolate low-yielding equipment through the interface to its manufacturing execution system or work-in-process database. It can compare the performance of process equipment and provide postsummary reports on a company's Intranet. The software also performs in-line yield monitoring, identifies correlations between data modules, and generates alarms through automatic reports. Information: 978/667-5500.

Macrotron Systems has added Ham-Let fittings and valves to its distribution portfolio. As a result of this distribution agreement, the company offers components for semiconductor manufacturing in addition to systems for the supply of chemicals and fire-protection equipment for cleanrooms. Drawing on its logistical experience with sales of spare parts for production equipment, the company will have direct access to Ham-Let stocks in the U.S., Canada, and Israel. To ensure fast delivery, these parts will be stocked at the Munich airport. Information: +49 89 45111150.

AutoSimulations's Poseidon MES adapter is an off-the-shelf module for integrating Poseidon manufacturing execution software (MES) with the company's real-time scheduling and dispatching software. By combining this reporting and dispatching software with leading MES packages, the adapter helps to improve productivity, increase throughput, and reduce work-in-process and cycle times. The company's scheduling and dispatching software includes Real Time Dispatcher for scheduling and dispatching and the APF Reporter for transforming raw data from the MES into time-based analysis information. The Poseidon MES adapter has been installed at Dominion Semiconductor in Manassas, VA. Information: 801/294-1350.

A microprocessor-based gas system controller for use with electronic specialty gas source systems and distribution manifolds by Air Liquide performs essentially the same job as a programmable logic controller­based system with a lower cost of ownership. It provides manufacturers with the information and capabilities required for the safe operation of gas systems. Functions include automatic purging, panel status, alarm monitoring, emergency shutdown, and pressure indication. The system has the same dimensions and connections as the company's MicroPurge P-series PLC controller. It offers such remote system shutdown capabilities as emergency gas off as well as fire and gas-leak control. Alarm inputs are configurable as warnings or shutdowns. Color LEDs on the controller indicate the status of the gas panel as "gas available," "warning," or "shutdown." Information: 713/624-8056.

ADE has released Device Toolbox, a software package that allows software engineers to visualize and quantify changes in wafer shape, thickness, and flatness. Used both as a measured and differential (before-after) data device, this package permits engineers to develop, diagnose, and maintain thermal, photolithography, backgrind, and backside etch processes. It runs independently of the company's tools. The thickness and shape data created by any ADE ASC or ASC-2000 measurement system are transformed by the software device into 1-, 2-, or 3-D maps of as-measured or differential information for one wafer or an entire lot. The package may enhanced by adding optional film-stress map or site-flatness modules. Information: 617/831-8089.

A customer-support program providing technical support and training at a reasonable price, Rudolph Technologies's Productivity Plus program allocates man-hours by quarters, which can be used for preventive maintenance, emergency service, on-site technical training, on-site applications training, parts, or special projects. Unlike traditional service contracts, this program may be used for any of the manufacturer's tools at any or all of the customer's sites. In addition to offering flexibility and a wide variety of services, it saves money because customers do not pay for services they do not use. The program schedules each quarter's time allocation in advance and covers the activities planned for that quarter. The customer then consumes all of the hours by the end of the 12-month term of the agreement. The program also may be used for worldwide support or training during off-shift or weekend hours. Information: 973/691-1300.

KLA-Tencor has released Pattern Quality Confirmation (pQC) software to enhance the company's 8100 family of critical dimension scanning electron microscopes (CD SEMs). With this software, the CD SEMs combine in-line, real-time metrology and process inspection, enabling the detection of systematic lithography- and etch-related problems that can go undetected by traditional measurements. As a result, the company says users can achieve better lithography and etch process characterization and higher production yields. The software analyzes the pattern fidelity of IC features and detects subtle differences between them and reference data for in-control processes. It detects changes in sidewall slope, scumming, footing and bridging, and partially cleared or closed contacts, which indicate problems with the lithography or etch process. Information: 408/875-7039.

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