Ion Implanter

Eaton SEO

Beverly, MA

A medium-current ion implanter for 0.18-µm processes can deliver throughput up to 210 wafers/hr. The fully automated, serial processing 8250^_HT features 4- to 3500-µA beam currents sufficient to run at mechanical limits for all high-tilt, medium-current applications. The throughput limit is independent of lot size. The system processes a wide spectrum of species within an energy range of 3–750 keV, removing the need for a dedicated implanter for indium processes. System highlights include a patented extended-life source, which provides a beam current 150–200% of that of an enhanced bernas source, and a special angular-energy filter, which deflects the beam by 15° and can keep chemical contamination below metrology detection levels.

Ash-Residue Remover

J. T. Baker

Phillipsburg, NJ

An 80% aqueous ash-residue remover cleans a wide variety of metal-organic residues from substrates, including copper and low-k dielectrics. REZI-38 is compatible with standard postash residue-removal equipment and can be used in automatic spray processing equipment or in a simple one-bath process. No special rinse is required. Offering a typical processing time of 5–10 minutes, it is effective at temperatures between 23° and 45°C. The residue remover contains no SARA 313–specified components or hazardous air pollutants and has a concentration of volatile organic compounds below 5%. Because of its high water content, the chemical can be disposed of down most acid drains.

Slurry Filter Capsule

Meissner Filtration Products

Camarillo, CA

The AlpHA filter capsule can help optimize filtration of oxide and metal slurries at the point of dispense for CMP tools. It features a gradient-density polypropylene media that removes wafer-damaging agglomerations and particles without adversely affecting the distribution of the polishing slurry. Capsules with absolute retention ratings of 0.45–70 µm are available. The self-contained capsules offer a high dirt-loading capacity and are disposable.

300-mm Shipping Box

Entegris

Chaska, MN

A front-opening shipping box (FOSB) for 300-mm wafers meets strict environmental protection and contamination specifications. The 25-capacity, reduced-pitch box complies with I300I requirements, featuring a design that limits the amount of system material that comes in contact with each wafer. Wafer manufacturers can use the FOSB as many as four times before returning it to the company for recycling.

Microprocessor Module

Xycom Automation

Saline, MI

The XVME-658 VME-bus, PC-compatible board-level microcomputer integrates a 333-MHz AMD-K6-2 cpu with a PCI-to-VME-bus interface. The automation module gives semiconductor OEMs access to the multiprocessing capability of the VME bus while allowing them to use standard personal computer software and operating systems. It contains an array of input and output capabilities, including PCI Graphics, EIDE and Ethernet controllers, a universal serial bus port, two high-speed serial ports, an EPP/ECP parallel port, and PS/2-style keyboard and mouse ports. Its cpu features 3DNOW technology for optimal floating-point intensive 3-D graphics, and is supplemented by 512 Kb of synchronous Level 2 pipeline cache and 256 Mb of fast-page or EDO DRAM.

Liquid-Level Sensors

MEGA Kinetics

Tempe, AZ

The TK series of photoelectric liquid-level sensors provide long-term determination of the presence or absence of liquid and of the presence of bubbles within translucent tubing made of such materials as PFA or FEP. They feature a luminous infrared diode as light source, a photodiode as the sensing element, and leakproof electronics that are encapsulated and housed within a rugged polycarbonate package. The TK-010P is a 13/4 x 21/4-in., 24-V-dc solid-state sensor for use with tubing ranging in outer diameter from 1/4 to 3/4 in., and the TK-020C is a smaller counterpart for tubing of 3–6-mm OD. A control unit contains the sensitivity setting and LED status indicator.

ESD-Protective Polypropylene

BF Goodrich Performance Materials

Cleveland, OH

A static-dissipative polypropylene alloy for use in semiconductor-handling and other cleanroom applications offers a consistent surface resistance of 10⁸ . Stat-Rite S-250 is based on a patented inherently dissipative polymer system that remains intact from the polymerization stage through compounding and processing via extrusion or injection molding. The material displays a predictable static-decay time, from 5000 V, of <0.01 second. Its effectiveness is independent of relative humidity. The alloy outperforms predecessors in its series with respect to outgassing, tribocharging, and the contribution of ionic contaminants to sensitive environments.

Liquid-Flow Controller

McMillan

Georgetown, TX

The automatic Model 401 liquid-flow controller features Teflon and sapphire wetted parts to protect the cleanliness of ultrapure fluids. The unit can be set to measure and control flows from 15 ml/min to 8 L/min. Using a miniature turbine wheel and infrared beams, the controller achieves turndown ratios of 10:1 or better with a repeatability of ±0.25% full scale and an accuracy of ±2% full scale. The system requires a 24-V-dc power source. It functions as a stand-alone system or can be interfaced with existing control systems via 4–20-mA inputs and outputs.

Vacuum-Chamber Flange

Atlas Technologies

Port Townsend, WA

A flange made of aluminum bonded with stainless steel can seal aluminum vacuum chambers to achieve a reliable ultrahigh vacuum. The sealing face of the aluminum flange has a thick layer of stainless steel for the knife-edge seal and threaded mounting holes. The stainless steel also lends strength and durability. The flange is available in all standard CF sizes from 1.33 to 10 in.

Stripping Solvent

Moore Enviro-Chemical

Camarillo, CA

A nonflammable, environmentally safe solvent can be used as a drop-in replacement in stripping and cleaning applications. Ultra MEC 804 strips a wide range of polymers, epoxies, and adhesives used in front- and back-end processing, and works quickly at process temperatures 20°–30°C lower than normal. The chemical exhibits a low surface tension which, along with cosolvents, keeps foreign matter in suspension so stripping and cleaning of complex geometries can be optimized and bath life extended by a factor of two to four over that of commodity solvents. Available in a range of purity levels, the solvent has been tested safe for most metallic substrates, ceramics, and common device materials.

Fluorine Monitor

PureAire Monitoring Systems

Rolling Meadows, IL

A monitoring system detects and measures fluorine gas near scrubbers, exhaust stacks, and process areas. The gas monitor measures concentrations down to 50 ppb and does not react to hydrogen or IPA and other alcohol-based cleaning solvents. Changes in ambient temperature or humidity do not affect the instrument's measurement accuracy. The system comes with measurement ranges of 0–1, 0–3, or 0–30 ppm and can be outfitted with or without local readout capability. It consists of a highly selective, renewable self-checking electrochemical sensor and a transmitter linked to an optional control panel. The signal from the transmitter can be routed directly to alarm, control, or facilitywide surveillance systems.

Laser-Scan Micrometer

Keyence Corp. of America

Woodcliff Lake, NJ

The LS-5000 laser-scan micrometer offers 0.05-µm resolution and a frequency of 1200 scans per second. The system includes a visible-beam laser for fast setup and alignment and four sets of scan heads with four-channel operation and simultaneous monitoring of all channels. Features include a menu-driven touch screen user interface, a wide range of measurement functions, and plug-in boards to facilitate system expansion. The system controller simultaneously processes data from all four sets of scan heads. The micrometer carries an IP 64 (NEMA 4) rating for production environments. Applications include measurement of thin-film thickness and IC pin pitch.

Gas System Components

Parker Hannifin, Veriflo

Richmond, CA

Surface-mount components for integrated semiconductor gas systems offer flexibility through modularity. These components include low-pressure and lockout/tagout valves; point-of-use regulators; a high-purity, high-flow manifold valve; a low-internal-volume diaphragm valve; and a transducer. The surface-mount modules incorporate C- and W-style seals made from a proprietary alloy. The components reduce or eliminate the need for welds and fittings. Supported seals are compatible with other systems and may save half the fab space of face-seal connection designs.

Wafer Clamp Ring

Greene, Tweed

Kulpsville, PA

The design of a two-piece clamp ring made from Altymid 750 polyimide, a thermoplastic material, facilitates hardware changeout in semiconductor processing equipment, thus minimizing downtime. When the clamp ring's fingers, which hold the edge of the wafer during etching, become etched to the point of uselessness, only the damaged inner ring of the two-part device, held in place by a tab and a single screw, must be replaced. Changeout is accomplished by a simple snap-and-turn motion while the outer ring remains bolted in place like a conventional clamp ring.

Pressure Sensors

Sentir Semiconductor

Santa Clara, CA

Piezoresistive MEMS silicon-based Sentium pressure sensors offer performance stability across a temperature range of –40° to 150°C. The fully functional 3.5- or 5-k bridge sensors have a combined linearity and hysteresis deviation of <1% over the entire temperature range. Long-term stability at extreme temperatures is exemplified by a tested measurement deviation of <20 µV at 150°C over 120 days. The sensors are available in full-scale pressure ranges of 5–5000 psi. Sensor die can be mounted in surface-mount, stainless-steel, and modular assemblies and combined with ASIC configurations.

Chemical Delivery System Fittings

Saint-Gobain Performance Plastics

Anaheim, CA

A line of fine-thread flare-type fittings minimizes dead volume and pressure drop in systems that handle and deliver corrosive chemicals and ultrapure fluids. The industry-standard Flare Grip II fittings feature course-type threads; are available in 1/4-, 3/8-, 1/2-, 3/4-, and 1-in. sizes; and are double-bagged in a Class 100 cleanroom for shipment. Other products offered include Grab Seal PFA compression fittings, fuse-bond pipe fittings, dual-containment PFA fittings, and Nippon Pillar high-temperature fittings.

Pressure Transducers

Sensortechnics

San Jose, CA

Compact-Line piezoresistive pressure transducers for OEM applications feature small and uniform stainless-steel housings, internal digital signal conditioning, and intrinsic design flexibility. Three series offer different types of media compatibility and pressure ranges. The 2.05-in.-long, 0.86-in.-diam CTU7000-series transducers for gas-pressure measurement have pressure ranges from 0.3 to 100 psig. CTU8000-series units are 1.85-in. long, compatible with most industrial media, and handle pressure ranges of 15–500 psig. Measuring 2.56-in. long and offered in pressure ranges of 5–500 psig, CTU9000-series units have an all-welded stainless-steel diaphragm. The transducers are available with standard output signals of 0–5, 0.5–4.5, 0–10 V, or 4–20 mA and with a wide range of fittings.

Chemical-Processing Station

Air Control

Henderson, NC

Microvoid Model CS-31 chemical-processing stations can be used in cleanrooms and under laminar-flow hoods. Standard systems are made of corrosion-resistant polypropylene. Their modular design includes a segmented work surface to facilitate installation of optional process tanks. Below the tabletop is a full-length exhausting tub with drain for the capture or disposal of waste liquids, as well as cabinets for the storage of standard 2-gal chemical bottles. Also available made of fire-retardant polypropylene, PVC, polyethylene, or stainless steel, the stations comply with OSHA and National Electrical Code requirements.

Liquid-Level Sensor

Sensor Measurement Technology

Redwood Falls, MN

Designed for corrosive environments, a nonmetallic liquid-level sensor continuously monitors any liquid medium. Made of pultruded carbon-fiber electrodes encapsulated in 3/8-in. PFA Teflon tubing, the system has no moving parts and offers a variety of length and mounting options. The electrode assembly is welded into the base of the microprocessor- based control housing, and a PFA-jacketed multiconductor wire enables connection to any analog input device. The sensor produces a proportional analog output of 0–10 V dc or 4–20 mA, with measurement accuracy within 0.10 in.

Flip-Chip Lithography Tool

Ultratech Stepper

San Jose, CA

The Saturn Spectrum 3 lithography tool is designed for bump (flip-chip) and micromachining applications. Incorporating broadband optics technology, the system can process any g- or i-line photosensitive film from 1.0 to 100 µm thick on the same stepper. All resists tested on this system can be exposed in 25–50% less time than on other systems. The tool offers 2.0-µm resolution and a usable depth of focus of more than 5.0 µm. It is equipped with a fully automatic wafer-size-change feature that permits back-to-back processing of wafers with diameters varying between 4 and 8 in.

Level-Sensor Controllers

Scientific Technologies

Fremont, CA

A series of controllers for ultrasonic level sensors and transmitters provide continuous level measurement of solids and liquids. DF200-series microprocessor-based controllers offer 4–20-mA input for the company's DF300-series sensors and can be programmed to display calculations of distance, level, volume, differential, and open-channel flow. Three models provide filtering that includes averaging and out-of-range samples, trip points to configure seven on-off combinations, and eight predefined units of measure. They also allow temperature compensation. A fourth model features four relay set points plus 4–20-mA output, a menu of tank shapes for volume calculation, and output options of 0–5 and 0–10 V.

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