INDUSTRY NEWS

What's Going On

June 19­21, Seventh International Symposium on Particles on Surfaces: Detection, Adhesion, and Removal; Newark, NJ. Contact: 914/ 226-1393.

June 25­29, ASTM Committee D19 on Water; Tucson, AZ. Contact: 520/544-5000.

June 26­29, 2000 International Conference on Characterization and Metrology for ULSI Technology; Gaithersburg, MD. Contact: 301/ 975-2776.

July 10, Fundamentals of Wet and Dry Etch; San Francisco. Contact: 800/727-1848.

July 10­14, Semicon West; San Francisco, San Jose. Contact: 408/428-9600.

July 12, SEMI 30th Anniversary Benefit Gala; Mountain View, CA. Contact: 888/ 500-7364.

July 13, Fundamentals of Chemical Mechanical Planarization; San Francisco. Contact: 800/727-1848.

July 17, Introduction to Microcontamination Control; San Jose. Contact: 800/727-1848.

August 14­18, Practical Methods of Microwave Digestion for Trace Analysis IX; Amherst, MA. Contact: 800/726-3331.

September 5­7, FPD Expo Korea; Seoul. Contact: 822/551-3401

September 12­14, IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop; Boston. Contact: 202/289-0440.

September 13­15, Semicon Taiwan; Taipei. Contact: 408/428-9600; +886 3573 3399.

September 13­15, 20th Annual BACUS Symposium on Photomask Technology; Monterey, CA. Contact: 360/676-3290.

September 18­19, Cleanroom Mechanical Systems Concepts; Tempe, AZ. Contact: 480/965-5324.

September 18­20, Fifth International Symposium on Ultraclean Processing of Silicon Surfaces; Ostend, Belgium. Contact: +32 16 29 05 10, fax; info@timshel.be.

September 18­21, SPIE 2000 Symposium and Education Program on Micromachining and Microfabrication; Santa Clara, CA. Contact: 360/676-3290.

September 18­22, 33rd International Symposium on Microelectronics; Boston. Contact: 703/758-1060.

September 19­21, Diskcon USA; San Jose. Contact: 408/330-8100.

September 23­28, Advanced Equipment Control/Advanced Process Control Symposium XII; Lake Tahoe, NV. Contact: 512/356-3981.

September 25­27, MICRO.tec 2000 International Conference on Microtechnologies; Hannover, Germany. Contact: +49 69 63 08 381; VDE_TAGUNGEN@compuserve.com.

September 26­28, International EOS/ESD Symposium; Anaheim, CA. Contact: 315/339-6937.

September 26­28, Ninth International Symposium on Semiconductor Manufacturing; Tokyo. +81 3 3815 8775; issm@riz.co.jp.

September 27, SEMI Award Dinner for North America; San Jose. Contact: 408/428-9600.

September 27­28, OEM Boston; Boston. Contact: 310/445-4200.

October 2­6, American Vacuum Society 47th International Symposium; Boston. Contact: 212/248-0200.

October 3­6, CIS Executive Mission and Exhibit 2000; Moscow. Contact: +011 7502 224 5847

October 3­6, Practical Microlithography with Experimental Design and SPC; Tempe, AZ. Contact: 480/ 965-1740.

October 9­13, Cleanroom Design-Build Short Course; Tempe, AZ. Contact: 480/965-5324.

October 15­18, 18th International Symposium on Laboratory Automation and Robotics (ISLAR 2000); Boston. Contact: 508/497-2224.

October 17­18, Semicon Southwest; Austin, TX. Contact: 512/349-2422.

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