BOC
Edwards recently opened a 2500-sq-ft chemical management applications
lab at its technology and applications center in Santa Clara, CA.
The lab's mission is to test components and evaluate prototype tool
performance, including software and metrology instruments, in the
copper chemistries and slurry delivery areas. "The equipment demonstration
and test lab houses five systems at this time and has the ability
to house up to eight," says Ben Roberts, director of technology of
the company's chemical management division. "We can test every viable
slurry on the market, then give our customers a complete answer."
The wet chemistry lab portion of the facility, which contains "a variety
of instrumentation, test benches, and slurry and pure chemical loops,
is used for slurry characterization testing and studies of the effects
of long-term circulation of slurry through the equipment." Tool prototypes
under development at the lab include the iSPEQ intelligent slurry
particle equipment system, which is slotted to begin beta testing
this month, and the CuBIS copper ECD chemical management system, scheduled
for shipment to OEM beta sites in July, according to Roberts and division
business manager Olivier Blachier. The company is building a new exhaust
management lab at the Santa Clara site, which is scheduled to go on-line
this month, says Frank Jansen, BOC's vp of technology and engineering.
The photos above show the recirculation flow in an iSIS 7000's dispense
module being adjusted (below) and a portion of the demo and test lab
floor (above).
BOC
Edwards recently opened a 2500-sq-ft chemical management applications
lab at its technology and applications center in Santa Clara, CA.
The lab's mission is to test components and evaluate prototype tool
performance, including software and metrology instruments, in the
copper chemistries and slurry delivery areas. "The equipment demonstration
and test lab houses five systems at this time and has the ability
to house up to eight," says Ben Roberts, director of technology of
the company's chemical management division. "We can test every viable
slurry on the market, then give our customers a complete answer."
The wet chemistry lab portion of the facility, which contains "a variety
of instrumentation, test benches, and slurry and pure chemical loops,
is used for slurry characterization testing and studies of the effects
of long-term circulation of slurry through the equipment." Tool prototypes
under development at the lab include the iSPEQ intelligent slurry
particle equipment system, which is slotted to begin beta testing
this month, and the CuBIS copper ECD chemical management system, scheduled
for shipment to OEM beta sites in July, according to Roberts and division
business manager Olivier Blachier. The company is building a new exhaust
management lab at the Santa Clara site, which is scheduled to go on-line
this month, says Frank Jansen, BOC's vp of technology and engineering.
The photos above show the recirculation flow in an iSIS 7000's dispense
module being adjusted (below) and a portion of the demo and test lab
floor (above). 