Product Extra!

Illumination sources supplier Cymer will provide service and spare parts for excimer lasers installed on ASML's steppers and scanners. Under a new agreement, ASML's customers can directly contact Cymer's field service engineers for laser-related service and spare parts. Information: 858/385-7139; http://www.cymer.com, http:// www.asml.com.

Electro-Graph will use Poco Graphite's PyroGraph for its ion implantation beam-line components. The graphite is produced using specially formulated graphite infiltrated with pyrolytic carbon. It targets high-purity vacuum processes. The infiltration process fills and seals the material porosity, creating a surface region with high wear resistance. According to Poco Graphite, Pyrograph generates fewer particles than comparable materials and coatings. In beta site tests and evaluations by both semiconductor fabs and OEMs, the graphite provided longer life, faster pump down speeds, and improved yields than other graphites. Information: http://www. egraph.com.

New cleaners from J.T. Baker remove slurry particles and trace metals from substrates after CMP processing. The pCMP-800 and pCMP-850 cleaners also prevent redeposition on substrate surfaces. Buffered to maintain a constant pH over a wide range of dilutions and operating temperatures, both chemicals are compatible with copper damascene processing and low-k dielectrics. Both products can be used with SiO^₂, Al, and W substrates. The composition of pCMP-800 provides rapid, efficient cleaning in short exposure times, whereas pCMP-850 is designed for longer-exposure bath processes. Information: 908/859-2151; http://www.jtbaker.com.

The calibration-focused Web site eCalibration.com has redesigned its look and feel. The site had added store fronts, a press room, and four vendor databases. Enhanced directory searching functions are designed to make it easier to navigate the site. Users can now review and compare vendors' products and services without searching the entire Web for individual corporate sites. The site still contains product news, industry news, and events about new calibration tools. Information: 814/689-1047; http://www. eCalibration.com.

Edlon-PSI, which manufactures lined vessels, reactors, and pipes made of fluoropolymer and other engineered polymers, has recently added more cleanrooms and adopted ISO standards at several of its U.S. facilities. The improved quality systems are designed to ensure the quality of its high purity products. The company has also achieved ISO 9002 certification for its plant in Leven, Scotland, and it has adopted ISO standards at its facilities in Charleston, WV, and Avondale, PA. Information: 800/753-3566; http:// www.edlon-psi.com.

A brochure describes a new high-vacuum deposition system from CHA Industries. The Mark 50 system, which operates with interactive computer control, provides a load lock chamber-isolating source from the process chamber between loading and unloading wafers. The tool enables precision coating of both fixed and flexible substrates. Wafer applications include precision coating of semiconductor materials, LEDs, MEMS, and MR/ MGR heads. The system enables predeposition processes to be performed in the process chamber while isolated from the source. The substrates can be loaded and unloaded while the sources are maintained under a high-level vacuum. Vacuum integrity can be maintained for a batch of substrates and the source chamber can be vented during the process run. Information: 510/683-8554; http://www.chaindustries.com.

Bayer has launched an electronic chemicals site showcasing its line of conductive polymers, colloidal silica, and borane-based reducing agents. The Web site provides information on the company's Baytron conductive polymers for use in antistatic and electrostatic surface coating applications and capacitor manufacture. Also described on the site is Levasil, an aqueous colloidal dispersion of amorphous silica for use in wafer polishing and chemical-mechanical planarization. Site users can e-mail technical questions, review information by application, and request free literature. Information: 412/77-2000; http://www. bayer-chemicals.com.

To address the need for tighter tolerances on wafer carriers, RTP has developed a wafer transport carrier that uses polycarbonate overmolded with a conductive specialty compound. According to the company, overmolding enables the wafer carrier to be created from two distinct materials. RTP's 2200 series carbon-filled PEEK compound provides a grounding path and lines the carrier in areas where it could contact a wafer or the equipment. The remainder of the carrier is also molded from polycarbonate. Information: 507/454-6900; http://rtpcompany. com.

Enhancements to a line of i-line photodefinable polyimides from HD MicroSystems are designed to provide faster and thicker polyimide layers. The HD-4001 provides enhanced photospeed, and the HD-4010 offers thicker layers. The HD-4001 is said to increase photospeed by 25%. I-line exposure energies as low as 120 mJ can pattern images as fine as 7 µm in a 6-µm cured polyimide film using a puddle-develop process. HD-4010 has been formulated to achieve a film thickness that ranges from 8 to 15 µm on standard track lines. Information: 302/892-0548; http://www.hdmicrosystems. com.

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