Simulation Tool Set

ASML MaskTools

Santa Clara, CA

A simulation tool set enables photolithography engineers and IC designers to predict the manufacturability of their products before production. The LithoCruiser helps design and optimize lithography processes. It allows viewing of the lithography process windows based on the simulation of circuit features. Nearly all photomask and wafer imaging variables can be evaluated at a rapid rate. Engineers can use the tool to view circuit-design data, clip pieces from the designs, process the data, and specify mask layers and types, such as binary or phase shift. They can make real-time modifications to mask design and scanner variables to optimize the imaging process. Deep-submicron lithography processes are developed at a fast rate. Users are able to drop arbitrary cut lines at any point in the circuit design layout and get instantaneous statistical information about process window performance focus-exposure.

High-Flow Turbopump

Alcatel Vacuum Products

Hingham, MA

A high-flow maglev turbopump has a small design for semiconductor processes. The ATH1600 provides reliable vacuum performance. The pump is suitable for metal etch, dielectric etch, interconnect etch, ion implantation, sputtering, and plasma-enhanced chemical vapor deposition applications. It features a five-active-axes magnetically levitated rotor, an automatic balancing system, an optional integrated heating system, and an inert-gas purge. It can produce a process pressure of 4 mTorr, with up to 400 std cm³/min of process gas. The ATH1600 is available in a heated version for condensable process gases and a nonheated version.

Noncorrosive Gears

Rush Gears

Fort Washington, PA

Thousands of sizes of preengineered gears are suitable for use with sensors, scanners, instruments, automated controls, and robotics. A wide variety of styles, noncorrosive, and noncontaminating materials are available, including bevel, spur, rack, change, bronze, Delrin, and stainless. For customers with limited-space applications requirements, the company also offers chemical-resistant miniature lab gears.

Overlay Metrology Tool

KLA-Tencor

San Jose, CA

An overlay metrology tool provides low cost-of-ownership solutions for 300-mm production at the sub-0.13-µm node. The Archer 10 features coherence probe metrology, which takes three-dimensional measurements of overlay targets. It also incorporates adaptive noise reduction algorithm focus methods. These enhancements enable a 30% increase in precision to within 2 nm. High throughput of up to 150 200-mm wafers per hour and 120 300-mm wafers per hour, as well as heightened sensitivity, allow for tighter overlay budget control. An automated recipe setup and a Windows NT platform reduce the amount of training time needed to operate the tool. Other features include an integrated operator console, a built-in interface for future integration with KLA-Tencor yield management products, and a field upgrade path for the 5300-series overlay tools. The Archer 10 is compliant with current SEMI factory-automation standards.

Motorized Impeller

Continental Fan Manufacturing

Buffalo, NY

An airfoil impeller with an enclosed ball-bearing motor exhibits good sound characteristics and performance. Used in plenums for cleanroom air, the TMK motorized impeller has an external rotor motor mounted inside that optimizes space and allows for optimal cooling. The motors are industrial duty, completely enclosed, and 100% speed controllable. A balanced assembly provides smooth, vibration-free operation. Five sizes are available from 11 to 17.7 in. in diameter. Flows are provided to 5000 cu ft/min, and pressures are provided to 41/2 in. water gauge. Standard single- and three-phase voltages are available, with optional capacitor and speed control.

Cast Platen Heaters

Durex Industries

Cary, IL

Cast platen heaters with thicknesses of 1/2 in. or more serve as a durable heat source for commercial applications. A tubular heating element is distributed evenly to provide a uniform temperature pattern across the surface. CNC machining operations provide surface finishes from 125 to 8 rms, depending on the application. Standard flatness tolerance is 0.005 in., and other tolerance specifications are available. Secondary coatings such as Teflon or nickel can be added to enhance surface performance. The heaters can accommodate mounting options, including threaded holes, cast-in stud terminals, or mounting tabs. The efficient heat transfer characteristics of the cast-in design offer high wattage outputs and long life cycles.

Polypropylene Filter Cartridge

USF Filtration & Separations

Timonium, MD

A depth filter cartridge employs CoLD MELT technology for use with chemical-mechanical polishing systems. Made of 100% inert polypropylene material, the CMPD cartridge is compatible with metal slurry chemistries and is designed for CMP slurry distribution. The optimization of the gradient pore structure and the polypropylene material make the cartridge useful in metal slurries. The cartridge's tungsten, copper, and other capabilities allow precise control during the creation of the multiple filtration zones within the CMPD cartridge. The cartridge has a wide range of pH compatibility. Selected grades are recommended for wafer and rigid-disk polishing.

Oxygen Analyzers

Delta F

Woburn, MA

A process oxygen analyzer can be separated into components to be mounted separately throughout an OEM system or housed in a single, compact enclosure. The DF310 is unaffected by temperature variations and is available in sensitivity ranges from 0­500 ppb to 0­25%. Features include RS-232 and RS-485 interface capability, 24-V-dc input power, and NIST-traceable calibration. The manufacturer offers a five-year warranty for the analyzer.

Slurry Monitoring System

Particle Measuring Systems

Boulder, CO

A slurry monitoring system detects the presence of large particles that cause microscratching and yield loss. The SlurryChek avoids problems such as particle agglomeration, waste-stream creation, and dilution ratio errors by eliminating the need for dilution. The system measures all common slurry types, including fumed and colloidal silica slurry, aluminum oxide­based slurry, and cerium oxide­based slurry. The system measures the spectral transmission properties of slurry at thousands of wavelengths to ensure the accurate characterization of changes in particle-size distribution and percent solids. The versatile system can perform batch sampling and measure slurry on-line from the distribution system.

Specialty-Gas Analysis

Midac

Irvine, CA

A series of Fourier transform infrared spectroscopy analyzers and an extensive library of calibrations and methods for use in tool-effluent matrices from CVD chamber cleans to Cu CVD depositions are available. The analyzers are used in several applications, including process- tool effluent characterization, emissions monitoring, continuous toxic gas monitoring, scrubber efficiency measurements, and moisture detection in corrosive gases. Dual gas cell systems allow inlet and outlet streams from wet scrubbers, point-of-use scrubbers, thermal oxidizers, and other volatile organic compound abatement systems. V-series systems detect low levels of moisture or impurities in corrosive gases. Other systems include roaming air-monitoring units and fixed, multipoint analyzers.

Industrial Microscope

Olympus America

Melville, NY

A microscope for inspection, failure analysis, and materials research applications incorporates UIS optics. The strong frame and universal illuminator of the BX51M industrial microscope accepts the entire range of samples. The versatile instrument offers advanced ergonomics and extensive imaging and analysis options. Three types of Nomarski DIC prisms produce optimum resolution and contrast for every type of sample. Near-infrared (IR) imaging is available with 5x to 100x IR objectives, aberration-corrected from the visible to near-infrared light. An intensity-equalized brightfield/darkfield illuminator reduces user fatigue.

Water Purification System

Aqua Solutions

Jasper, GA

A compact water system combines reverse osmosis pretreatment and Type I reagent-grade water purification in a 20 x 12 in. cabinet. The Aqua RODI-C is suitable for applications in which an existing central reverse osmosis (RO), deionization (DI), or distillation pretreatment system is unreliable or overloaded. The RO portion of the system is fully automatic and includes an activated carbon prefilter, product and reject flowmeters, a total fault coverage high-capacity RO membrane cartridge, and an external 42-L pressurized tank for storing the RO purified water for later use. The Type I DI section features a high-purity total organic carbon reduction and DI polishing module, continuous recirculation, a digital resistivity monitor, a remote dispenser, and a 0.1-µm final filter capsule. An optional built-in UV sterilizer is available for analytical-grade systems.

Differential Pressure Controller

Lighthouse Worldwide Solutions

Milpitas, CA

A pressure controller improves minienvironment and cleanroom operation by optimizing fan or exhaust performance. The Intelligent differential pressure controller (IDP) reduces contamination, improves process parameters, and lowers energy costs. Applications include minienvironments, exhaust hoods, and tool airflow regulation. Pressure set point, alarms, and all operating parameters can be configured locally using the control panel or remotely from a computer or terminal. The sensitivity of the controller allows precise pressure measurement and control. Alarms can be local or external, immediate, or delayed. It offers a variety of interfaces, including 0­5 V, 4­20 mA, and 1­10 kHz, enabling it to interact with nearly any external device or system.

Copper Slurries

Cabot

Aurora, IL

Application-specific slurry formulations can be used to polish bulk copper and barrier layer films deposited during advanced copper interconnect processes. The iCue line of slurries can help enable different integration schemes, depending on the specific needs of the customer. All of the high-performance slurries are compatible with each other, thus allowing same-platen chemical mechanical polishing. The company's extensive supply and support network permits it to deliver the slurries to a worldwide customer base.

CMP Pad Conditioners

Abrasive Technology

Lewis Center, OH

Diamond CMP pad conditioner disks operate on the major 200- and 300-mm equipment platforms for both oxide and metal processes. The disks come in both magnetic and nonmagnetic grades of stainless steel in a wide range of front surface configurations. The pad conditioners feature a patented brazed process called PBS, which helps increase crystal retention and lessen debris loading.

Linear Positioning Stages

Anorad

Hauppauge, NY

A line of high-performance linear positioning stages are suitable for a variety of semiconductor and other electronics applications. Standard accuracies range from 1 to 25 µm, with velocities varying from 0.1 mm/sec to 3 m/sec. A wide range of drives and feedback options are available as well as flexible load capacities and other performance features.

Thermoplastic Material

Victrex

Greenville, SC

A high-performance engineering thermoplastic has been specially formulated for semiconductor tool components such as clamp and retaining rings, screws, and hardware used in CMP and etch process environments. The low-particulating E-grade PEEK polymer features sodium levels of 15­25 ppm compared with 350­500 ppm for other similar materials. The dimensionally stable polymer also has improved wear properties, which can lead to higher wafer throughputs, and strengthened chemical resistance properties, which increase component reliability.

LCD Array Test System

Photon Dynamics

San Jose, CA

The fourth generation ArrayChecker test system detects and characterizes a variety of defects in LCDs after array fabrication and before the addition of costly materials and process steps. The AC-2000 increases throughput and defect detection while addressing larger glass substrates, smaller pixel sizes, and the use of low-temperature polysilicon process technology. An improved, larger, electro-optical sensor measures the voltage used to modulate liquid-crystal materials without contacting each array gate and data line.

Noncontact Measuring System

Mitutoyo

Aurora, IL

A noncontact video measuring system features a programmable power turret that provides a wide field view and detailed image. When the built-in lenses rotate, the pixel size is automatically calibrated and the light intensity and image aberration adjusted. The Quick Vision 404 Pro offers 16-in. x- and y-axes and a 6-in. z-axis measuring capacity. Windows NT­based software can be used to program parts using a CAD import feature or easy-to-use learning mode. A variety of customized front ends, special program access, and measuring functions or report-generation formats can be employed. A pattern-focus function allows the tool to focus on very reflective, low-contrast, and translucent surfaces.

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