Product Extra!

A new wafer-cleaning system from Semitool combines the vendor's aqueous-based HydrOzone and FluorOzone cleaning processes. The linked processes sequentially remove postpolysilicon etch residue at a reduced rate of chemical and water consumption. HydrOzone uses ozone and DI water. FluorOzone combines HydrOzone and diluted hydrofluoric acid. The integrated steps occur sequentially in the same process chamber. The technology is designed to reduce cycle time and improve productivity by bringing the media to the wafer instead of bringing the wafer to the media. The HydrOzone process features boundary-layer control to remove photoresist at a strip rate >800 nm/min. Both processes can be used on Semitool's Equinox and Millennium single-wafer systems, its automated batch-wafer Spectrum platform, and semiautomated batch wafer process equipment. Information: http://www.semitool.com.

Boin's WaferMap-View.OCX software development kit was developed to meet the analysis and visualization requirements of metrology equipment manufacturers. Compatible with Windows 95/NT, the software has seven different types of graphics and object-oriented visual programming for creating and modifying wafer plots. Software developers can use the program to develop histograms and data analysis tools as well as graphs of one, two, and three dimensions. The program meets the ActiveX standard and offers example sources codes in Visual Basic. A free evaluation copy is available at http://www.boin-gmbh.com.

Astro Arc Polysoude has introduced a mechanized welding program designed to increase customer productivity, improve weld quality, and lower costs. The program offers engineering support, design help, training, and products such as power sources, peripheral controls, and weld heads. Operators can adapt and control positioners, arms, and other mechanical components using the axis controls in the modularly designed power source. The program comprises application and training centers, engineering and design, preinstallation testing and proving, and installation and after-sales service. Welding procedures include TIG, TIG hot wire, plasma, and microplasma. Information: http://www.polysoude.com.

Valcor Scientific's new on-line program provides technical assistance for users of the vendor's line of precision pumps and valves. Clients visiting the company's Web site may click on an application data form that links to a comprehensive specification questionnaire. Reviewed by a company engineer, the form includes specifications such as orifice size, flow coefficient, price, and delivery requirements. The engineer replies within 24 hours. The product line includes solenoid operated metering pumps, Teflon solenoid valves, and cryogenic solenoid valves. Information: http://www.valcor.com.

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