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A product/applications guide from Parker Hannifin's Process Filtration Div. offers filtration product and placement recommendations to the semiconductor industry. With sections on filter recommendations for chemical and photochemical applications and chemical-mechanical polishing, the publication provides tables with specific information on process areas, filter locations, filter materials, pore-size ratings, and filtration objectives. In addition to detailed product descriptions, the guide profiles the company's comprehensive customer support capabilities. Information: http://www.parker.com.

Teledyne Hastings Instruments offers product manuals to prospective users before they purchase the company's products. The technical documents detailing the firm's measurement instruments to control vacuum pressures and gas flows include installation and operation procedures, theory, maintenance requirements, and many schematics. Available at http://www.hastings-inst.com/manual/index.htm, the on-line documents range in size from 1 to 4 Mb. They are also available via mail for customers who wish to avoid downloading the files. Information: 800/950-2468.

Jon Goldman Associates has unveiled a Web site to help semiconductor manufacturers learn how data capture can improve process yields through rapid process error and defect detection. Located at http://www. jga-inc.com, the site contains articles such as "Trace Data--Yesterday's News or Key to Vastly Superior Equipment Performance," "SPC and Equipment Productivity," and "The High-Bandwidth Digital Data Network: A New Tool for Process Improvement." The site also provides charts on what types of data can be captured and how to use them. It explains how data capture and process control can be used in a range of applications, such as Novellus CVD, Applied Materials P5X systems, and TEL 3100, 3200, 4000, and TS400Z series furnaces. Information: 714/283-5889.


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