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Product Extra!
A manual open-cassette adapter from Asyst Technologies is
for use with the company's 200-mm loadport tools. The bolt-on front
end bridges the gap between older-technology open wafer cassettes
and newer isolation technology, thus enabling older fabs to implement
SMIF-optimized process tools without having to implement a full-fab
upgrade immediately. When fabs are ready to transition to the newer
process, they can simply remove the adapter instead of replacing the
entire I/O front end. The adapter meets the SEMI S2 standard and the
European CE standard for safety and reliability, assuring that it
will meet OEM standards. Information: 510/661-5000. (Semicon West,
S.F., South Hall, Booth 1338)
Macrotron Systems has established a spare-parts logistics
center at its main warehouse located at Munich International Airport.
Previously available only to the company's represented vendors, the
service can now be used by third-party suppliers. Called Inter-Parts,
the system provides Internet access for password-authorized customers
who wish to check stock levels and parts numbers at as many as 10
stock locations in Europe. The main warehouse keeps more than
15,000 different parts in stock. The company's logistics system relies
on dedicated software modules that feature a comprehensive reporting
package for handling third-party consignment stock. The system supports
just-in-time delivery, offering European customers fast and cost-efficient
service. Information: +49 89 45111269.
A 300-mm manual loading tray from Micromanipulator is for
use with the company's 9000-series 300-mm analytical probe stations.
The component performs manual loading and unloading of samples
from a single wafer loading tray to the probe station chuck. The
loader helps decrease wafer breakage or contamination. It provides
wafer access via a side wafer loadport. The wafer is moved into position
over a chuck with lift pins. After the pins retract, the wafer is
ready for analysis. The tray may be used with ambient, triaxial, or
thermal chuck systems. Information: 775/882-2400. (Semicon West,
S.J., McEnery Hall, Booth 10216)
Microbar and Mykrolis (formerly Millipore Microelectronics)
have developed an integrated solution for managing, setting up,
logging, and diagnosing critical dispense technology on Mykrolis's
IntelliGen 2 dispense system for point-of-use photochemical dispense.
Initially available with the TrackMate family of products for the
photolithography area, the integrated application allows users to
manage all aspects of the IntelliGen 2 system. Microbar's software
for logging and control of the dispense system supports the system's
recipe management. It can track system history, dispense failures
and alarms, and system utilization. Integration helps users leverage
key process and equipment support personnel time with remote-based
monitoring. The software eliminates the need to purchase additional
capital equipment. Information: 408/542-9083 or 781/533-2980. (Semicon
West, S.F., South Hall, Booth 218 [Mykrolis]; S.F., North Hall, Booth
6457 [Microbar])
Scott Specialty Gases offers a technical newsletter that covers
technical, scientific, and legislative issues currently faced by
specialty gas users and highlights recent developmental efforts in
technology. The first issue discussed the features of using ultra-high-purity
hydrogen bromide for etching semiconductors. Future issues will focus
on the company's efforts to develop the Sigma 2000 HBr for use in
0.13-µm technology. A free subscription to Scott Tech Newsline
is available from bjeffery@scottgas.com.
The newsletter is also posted on the company's Web site at http://www.scottgas.com.
Information: 215/766-8861. (Semicon West, S.F., North Hall, Booth
6153)
A Web site from WorldServo presents an analysis of various
motion-control systems. The site provides discussions of different
servocontrol architectures and lab data showing performance metrics
such as settling time, RMS torque usage, and tracking accuracy.
The pros and cons of servos with centralized controller boards, digital
servos with vector torque control, and servos with controllers using
sine-wave commutation are described. The site also offers compatibility
information, downloads, and application notes such as "How to Make
a Zero-Cost Motion Controller." Information: http://www.worldservo.com.
A thermal management guide from Lytron provides specifications,
performance data, and selection guidelines for thermal management
products. The guide includes data for recirculating chillers, ambient
cooling systems, copper and stainless-steel heat exchangers, oil coolers,
and cold plates. Also available are thermal design principles,
product weight and liquid volume data, selected fluid properties,
and conversion factors. Each product section includes a product description,
information on sizing the unit to the application, ordering information,
and product photographs. Information on thermal design principles,
product weights, and liquid volumes is included. Information: 781/933-7300.
(Semicon West, S.F., North Hall, Booth 5785; S.J., McEnery Hall,
Booth 9115)

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© 2007 Tom Cheyney
All rights reserved.
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