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INDUSTRY NEWS

What's Going On

January 20–25, LASE 2002 High-Power Lasers and Applications Symposium; San Jose. Contact: 360/676-3290; spie@spie.org.

January 22–24, Photonics West; San Jose. Contact: 360/676-3290; spie@spie.org.

February 5–7, Semicon Korea; Seoul. Contact: semi.org/web/wcalendar.msf.

February 27–March 1, CMP– MIC; Santa Clara, CA. Contact: 813/ 978-3552 (fax); wade@eng.usf. edu.

March 3–8, SPIE's 27th Annual International Symposium on Microlithography; Santa Clara, CA. Contact: 360/676-3290; spie@spie.org.

March 4–5, Introduction to Integrated Yield Management; San Jose. Contact: 360/676-3290; heather @pti.com.

March 6–7, SPIE's International Symposium on Advanced Microelectronic Manufacturing and Nanotechnologies; Santa Clara, CA. Contact: 360/676-3290; spie@spie.org.

March 10–12, Semico Summit 2002; Scottsdale, AZ. Contact: 602/ 997-0337.

March 11–14, SPWCC; Santa Clara, CA. Contact: 408/745-0600.

March 20–22, U.S. FPD Conference 2002; La Jolla, CA. Contact: 408/277-2400; info@displaysearch.com.

March 21–22, Advanced Topics in CMP; San Jose. Contact: 636/343-1333; heather@pti.com.

March 25–26, Defect Isolation for Multilevel Failure Analysis; San Jose. Contact: 636/343-1333; heather@pti.com.

March 26–27, Semicon China; Shanghai. Contact: semi.org/web/ wcalendar.msf.

April 1–5, 2002, Materials Research Society Spring Meeting; San Francisco. Contact: 724/779-3003; info@mrs.org.

April 2–5, SESHA Annual International High Technology ESH Symposium and Exhibition; Palm Springs, CA. Contact: 703/790-1745; sesha@burkinc.com.

April 10–12, Third European Advanced Equipment Control/Advanced Process Control (AEC/ APC) Conference; Dresden. Contact: +49 351 892 5244; fax, +49 351 892 5256; aecapc-europe@tzdresden.de.

April 16–18, Semicon Europa; Munich. Contact: semi.org/web/wcalendar.msf.

April 30–May 2, IEEE/SEMI ASMC; Boston. Contact: 202/289-0440; mkindling@semi.org.

May 12–17, The Electrochemical Society Meeting; Philadelphia. Contact: 609/737-1902.


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