February
25–26, DCMIC; Santa Clara, CA. Contact: 813/978-3552
(fax); wade@eng.usf.edu.
February
27–March 1, CMP-MIC; Santa Clara, CA. Contact:
813/978-3552 (fax); wade@eng.usf.edu.
February
28–March 1, Plasma Etching and Reactive Ion Etching;
Millbrae, CA. Contact: 510/642-4151.
March
3–8, SPIE's 27th Annual International Symposium on
Microlithography; Santa Clara, CA. Contact: 360/676-3290;
spie@spie.org.
March
4–5, Introduction to Integrated Yield Management;
San Jose. Contact: 360/676-3290; heather@pti.com.
March
5–8, Practical Microlithography with Experimental Design
and SPC; Tempe, AZ. Contact: 480/965-1740; asu.cpd@asu.edu.
March
6–7, SPIE's International Symposium on Advanced Microelectronic
Manufacturing and Nanotechnologies; Santa Clara, CA.
Contact: 360/676-3290; spie@spie.org.
March
10–12, Semico Summit 2002; Scottsdale, AZ. Contact:
602/997-0337.
March
11–14, SPWCC; Santa Clara, CA. Contact: 408/745-0600.
March
17–22, PITTCON; New Orleans. Contact: 412/825-3220;
pittconinfo@pittcon.org.
March
18–19, ABCs of Semiconductor Fabrication; Washington,
DC. Contact: 510/643-8278; kgj@unx.
berkeley.edu.
March
20–22, Advanced Topics in CMP; La Jolla, CA. Contact:
408/277-2400; info@displaysearch.com.
March
21–22, Advanced Topics in CMP; San Jose. Contact:
636/343-1333; heather@pti.com.
March
21, Understanding Silicon Materials Technical Workshop;
San Jose. Contact: 636/474-5929; Bavants@memc.com.
March
25–26, Defect Isolation for Multilevel Failure Analysis;
San Jose. Contact: 636/343-1333; heather
@pti.com.
March
26–27, Semicon China; Shanghai. Contact: www.semi.org
(exhibitions).
April
1–5, 2002 Materials Research Society Spring Meeting;
San Francisco. Contact: 724/779-3003; info@mrs.org.
April
2-5, SESHA Annual International High Technology ESH Symposium
and Exhibition; Palm Springs, CA. Contact: 703/790-1745;
sesha@burkinc.com.
April
10–12, Third European Advanced Equipment Control/Advanced
Process Control (AEC/ APC) Conference; Dresden, Germany.
Contact: +49 351 8925244; fax, +49 351 8925256; aecapc-europe@tzdresden.de.
April
16–18, Semicon Europa; Munich. Contact: www.semi.org
(exhibitions).
April
23, Semiconductor Processing Overview; Mountain View,
CA. Contact: 650/369-7890; info@semiconductorservices.
April
23–25, SPIE Photomask Japan; Yokohama, Japan. Contact:
+81 3 58145800; +81 3 51845823 (fax); pmj@bcasj.or.jp.
April
30–May 2, IEEE/SEMI ASMC; Boston. Contact: 202/289-0440;
mkindling@semi.org.
May
7–9, Semicon Singapore; Singapore. Contact: www.semi.org
(exhibitions).
May
12–17, The Electrochemical Society Meeting; Philadelphia.
Contact: 609/737-1902.
