INDUSTRY NEWS

On Display

FSI gets cleaning contract

USDC has tapped FSI International to develop a cleaning system for display applications. The San Jose–based display consortium and the process equipment supplier will split the development costs evenly. The contract is valued at approximately $1.38 million. The terms of the agreement call for FSI to examine the effectiveness of its CryoKinetic cleaning tool for display use. The system uses high-velocity cryogenic aerosols to remove particulates from silicon wafers. USDC wants to see whether the techinique would be suitable for cleaning display substrates as well.

"This project will help us determine any special process conditions or tool design modifications that may be necessary to adapt [the] existing cleaning technology to meet the specific needs of display technology," says Bob Pinnel, CTO of USDC.