The
alliance was formed in 2001. In addition to Dow Chemical, members
include Arch Chemicals, Ashland Specialty Chemical, Dainippon
Screen, EKC Technology, TEL, and Verteq. Five new materials
and equipment suppliers joined the alliance during the conference,
which was the first high-level symposium Dow Chemical has sponsored
for the low-k group. The new members are ATMI MLS Photo/Etch
Solutions, Axcelis Technologies, Bayer, General Chemical, and
the SEZ Group. The additional companies bring the total number
of alliance members to 15.
Service
reclaims GaAs wafers
A
San Josebased company claims to have developed a technique
to restore gallium arsenide (GaAs) wafers to almost prime condition.
Exsil says it has established a contamination-free dedicated
line to reclaim 100- and 150-mm GaAs wafers. To avoid breakage
during shipment, the company also has designed special packaging.
Exsil,
which has offered wafer reclaim services for nearly 25 years,
says a prime GaAs wafer costs approximately 10 times the price
of a silicon wafer of comparable size. A prime 150-mm GaAs wafer
costs $350$450, a mechanical-grade wafer, $175$250,
according to Exsil. In contrast, a restored GaAs wafer costs
approximately $85$100, the company says. Exsil is a unit
of the electronic division of Rockwood Specialties of Princeton,
NJ.