After
four years of intensive development, MEMC Electronic Materials has
begun mass-producing the world's first polished silicon wafer that
is completely free of defects. Called Optia, the substrate comes in
150- and 200-mm sizes. The Missouri-based supplier says its researchers
modified existing science in order to make volume production of the
pristine substrates cost-effective.
The
science of making a polished wafer devoid of defects "has been around
for a long time, probably 10 to 20 years," says Brett Avants, the
unit's public relations director. It's a science that carried a heavy
price tag, however. Researchers at MEMC worked over the past several
years on the crystal-pulling process and temperature control to create
the patented processes that enabled the company to give the Optia
a customer-friendly price, Avants says. "We made a lot of modifications
having to do with crystal pulling and cooling."
The
wafer has no crystal-originated pits and is free of agglomerated imperfections
related to crystal growth either on its surface or throughout its
thickness, according to the company. In addition, a patented proprietary
thermal treatment called Magic Denuded Zone (MDZ) produces "robust
internal gettering protection."
Avants
claims that initial customers are already reporting "noticeable and
substantial" improvements in yield. The company has approximately
20 customers around the world, which Avants declined to name.
Even
though MEMC's costs enable the company to mass-produce the wafers,
"we do charge a premium" for the substrates, Avants points out. "Not
a huge premium; just a few cents more per square inch per wafer."
MEMC sales staff tells customers that the Optia makes a "great test
wafer," Avants says, adding, "we don't want to sell them as test wafers,
though." But such use would enable chipmakers to eliminate the wafers
as a source of contaminated die off the bat, he notes.
The
200-mm Optia costs "a few percent more" than the standard polished
200-mm, says the PR director. Avants says MEMC has a production capacity
of "tens of thousands" of Optia wafers per month.