BOC Edwards says it will form a liquid abatement business unit after it closes a deal for a manufacturer of liquid purification systems. After BOC buys Hydromatix of Santa Fe Springs, CA, the company plans to integrate the vendor's technology into its chemical management division. BOC believes the acquisition will enable it to provide abatement solutions for chipmakers using CMP and ECD processes. Hydromatix holds a patent on its 786 ion-exchange technology, which reduces waste regeneration by more than 90%, according to BOC.

Advanced acquires Aera

Completing a deal that began early last year, Advanced Energy Industries has acquired Aera Japan for an estimated $78 million. The closing price included cash and assumed debt. Based in Hachioji, Japan, Aera manufactures mass-flow controllers. Advanced Energy is based in Ft. Collins, CO, and specializes in components for power delivery, power control, remote plasma clean, process instrumentation, and related semiconductor manufacturing uses. The company grabbed a stake in the mass-flow controller market segment when it purchased Emco in January 2001.

Rockwood buys reclaimer

A leading supplier of wafer reclaim services has broadened its reach through the acquisition of another company that specializes in wafer polishing, wafer refurbishing, and wafer reclaiming. Exsil says its parent firm, Rockwood Specialties, has acquired American Silicon Products of Providence, RI, for an undisclosed sum. American Silicon is a subsidiary of SEMX. Exsil operates factories in San Jose and Prescott, AZ, and in Europe through Rockwood Electronic Materials. The company processes 200- and 300-mm silicon and gallium arsenide wafers. The acquisition will enable Exsil to broaden its customer offerings, Rockwood says.