May 28–31, IEEE Electronic Component and Technology Conference; San Diego. Contact: www.ectc.net.

June 3–4, Materials Integrity Management Symposium; Austin, TX. Contact: 952/556-8079; www.entegris.com.

June 3–5, 2002 IEEE International Interconnect Technology Conference–IITC 2002; Burlingame, CA. Contact: 301/527-0900, ext. 104; iitc@his.com.

June 4–6, Atlantic Design and Manufacturing Show; New York City. Contact: 310/445-4200.

June 5, Fundamentals of Chemical-Mechanical Processing; San Jose. Contact: 636/343-1333.

June 5–7, IEEE International Symposium on Plasma Process-Induced Damage; Wailea, Maui, HI. Contact: 301/527-0900; iitc@his.com

June 17–19, Second Annual MEMS Technology Seminar—BioMEMS; Boston. Contact: 212/591-7423; www.asme.org.

June 24–25, Semiconductor 2002; Edinburgh, Scotland. Contact:
elaine.townsend@ee.ed.ac.uk.

June 27, Fundamentals of Chemical Vapor Deposition; San Jose. Contact: 636/343-1333.

July 7–11, SPIE International Symposium on Optical Science and Technology; Seattle. Contact: 360/676-3290; www.spie.org.

July 17–19, Semicon West (final manufacturing); San Jose. Contact: www.semi.org (expositions).

July 22–24, Semicon West (wafer processing); San Francisco. Contact: www.semi.org (expositions).

July 29–August 2, International Conference on the Physics of Semiconductors (ICPS); Edinburgh, Scotland. Contact: +44 20 74704800; sara.somerville@iop.org

August 19–23, IEEE International Symposium on Electromagnetic Compatibility—EMC 2002; Minneapolis. Contact: 651/213-0966; www.2002-iee-emc.org.

September 7–12, AEC/APC Symposium XIV; Snowbird, UT. Contact: www.sematech.org.

September 11–13, BACUS Photomask; Monterey, CA. Contact: 360/676-3290; www.spie.org.

September 15–18, International Symposium on Ultraclean Processing of Silicon Surfaces (UPSS); Oostende, Belgium. Contact: www.imec. be/ucpss/ucpss.html