Axcelis Technologies has formed an R&D partnership with Fudan University in Shanghai. The partners will develop advanced process and device technology at the university's microelectronics center and at Axcelis' new $31 million advanced technology center in Beverly, MA. Axcelis wanted to marry its expertise in ion implantation and RTP technologies to the "superb pool of talent, ideas, and expertise" of Fudan University's R&D center, says CTO John Poate. China "is poised to become one of the top regions for semiconductor technology development," he adds. In March, Axcelis opened an office in Shanghai.

China's first full-service foundry has purchased room ionization and ESD control gear from Ion Systems. Semiconductor Manufacturing International Corp. has installed the equipment at its Fab 1 facility in Shanghai. The equipment includes Ion's Model 5511 ceiling emitters and Model 5285 AeroBar ionizers. The Berkeley, CA–based supplier says Fab 1 will produce 42,500 8-in. wafers a month when it is running at full capacity by mid-2003.

Extending an existing business relationship, Hermes-Epitek will sell and support Boxer Cross products in China, the companies announced. Boxer Cross manufactures automated metrology systems. Its BX-10 source/drain and ultrashallow junction measurement tool characterizes active implant layers. Hermes-Epitek has been selling Boxer Cross products in Taiwan, Singapore, and Malaysia.

The sales and service arm of Ashland Specialty Chemical's Taiwan unit has been reorganized to streamline Asian operations. Ashland Taiwan Co. (ATCL) says the reorganization will make it easier for customers in China, Taiwan, and the rest of Asia to receive chemicals, service, and technical support. ATCL is now the sole source in China and Taiwan for direct sales of wet-process chemicals, photoresist strippers, etch residue removers, CMP slurries, and related products.

An Asian semiconductor research institute has purchased a Verteq dual-chamber cleaning tool for use at its R&D facility. The unnamed institute will use the Goldfinger Mach 2 system for post-etch and post-ash cleaning of copper dual-damascene vias and trench structures on 200-mm wafers, according to the Santa Ana, CA–based vendor. The cleaning system is capable of processing several solvents for evaluating multiple chemistries and low-k dielectric materials for 150- to 70-nm geometries. Delivery of the system is set for July.

A French university plans to install a plasma etch system from Tegal, the vendor announced. The 901e diode plasma etch tool will be used for developing tantalum nitride and silicon nitride etching techniques. The order is the first for Tegal from the unnamed institution. In March, the university was scheduled to install the system in a French fab of an existing Tegal customer, with which it has had a 15-year-long relationship.