June
27, Fundamentals of Chemical Vapor Deposition; San
Jose. Contact: 636/343-1333.
July
7–11, SPIE International Symposium on Optical Science and
Technology; Seattle.
Contact: 360/676-3290; www.spie.org.
July
17–19, Semicon West (final manufacturing); San
Jose. Contact: www.semi.org
(expositions).
July
22–24, Semicon West (wafer processing); San Francisco.
Contact: www.semi.org (expositions).
July
29–August 2, International Conference on the Physics of Semiconductors
(ICPS); Edinburgh, Scotland. Contact: +44 20 74 704800; sara.somerville@iop.org
August
17, The ABCs of Semiconductor Fabrication; 510/643-8278;
kgj@unx.berkeley.edu.
August 19–23, IEEE International Symposium on Electromagnetic
Compatibility–EMC 2002; Minneapolis. Contact: 651/213-0966;
www.2002-iee-emc.org.
September
5–6, Opto Ireland; Galway.
Contact: 360/676-3290; spie@spie.org.
September
15–18, International Symposium on Ultraclean Processing
of Silicon Surfaces (UPSS); Oostende,
Belgium. Contact: www.imec.be/ucpss/ucpss.html.
September
16–17, Semicon Taiwan; Taipei.
Contact: Contact: www. semi.org
(expositions).
September
18–20, Integrated Nanosystems 2002; Berkeley,
CA. Contact: www.asme.org/nano;
973/882-1717 (fax).
September
22–27, IEEE International Conference on Ion Implantation
Technology; Taos,
NM. Contact: 732/562-3878; www.iit2002.com.
September
30–October 4, 22nd Annual BACUS Symposium on Photomask
Technology; Monterey,
CA. Contact: 360/676-3290; info-bacus@spie.org.
October
6–10, EOS/ESD Symposium; Charlotte,
NC. Contact: 315/339-6937; info@esda.org.
October
15–16, Semicon Southwest; Austin,
TX. Contact: www. semi.org
(expositions)
