BOC
Edwards is manufacturing a fluorine generator qualification
system for client use. The unit enables users to test the
benefits of using fluorine to clean their process chambers.
The qualifying system is a smaller version of the system installed
at the supplier's site. The small system produces up to 16
kg per day of pure fluorine. BOC says the gas is an effective
and economical alternative for chamber cleaning. Information:
nancy.irwin@bocedwards.com.
(Semicon West, S.F., South Hall, Booth 402)
A
new catalog from Saint-Gobain Performance Plastics
features Meldin polyimide and high-performance thermoplastic
materials. The materials are available in custom-molded, machined,
and stock shapes for machining. The Meldin materials accommodate
temperatures from cryogenic through 600°F in continuous
operation and in intermittent operations at temperatures up
to 900°F. Additional properties include rigidity
and self-lubrication for extended, maintenance-free service.
Information: www.plastics.saint-gobain.com. (Semicon West,
S.F., South Hall, Booth 1510)
ECI
Technology's new Web site provides detailed production information
and product literature in a .pdf format. The site, www.ecitechnology.com,
also contains technical information on all ECI products and
an FAQ section. The site links to vendor partners such as
Pill and Vibrobot. Copies of technical documents on topics
such as copper electrodeposition and chemical monitoring are
available as well. A bibliography contains related papers
by scientists and others in the field of analytical instruments
for electroplating process control. (Semicon West, S.F.,
South Hall, Booth 3045)
An
interactive CD-ROM from Gencoa contains information
on magnetron sputtering. The disk covers plasma fundamentals,
sputtering source data, process simulations, magnetron product
details, and process tips. Information on current and
future applications is included. Information: sales@gencoa.com.
A
catalog from United Electric Controls summarizes the
supplier's line of electronic and electromechanical switches,
sensors, and transducers. Featured in the booklet, the
company's solid-state One-series two-wire pressure-and-temperature
switch offers remote diagnostic capability and local display.
The switch can be used as a drop-in replacement for a mechanical
switch. No modifications or extra wiring are required. The
supplier's pressure switches operate in ranges from vacuum
to 9000 psi, while its temperature switches accommodate 180°
to 650°F. Standard product features include metric port
connections, high-purity versions, flush mounts, and wetted
materials. Information: www.ueonline.com.