Corning
has reached full production capacity of CaF2
crystals at its plant in Canton, NY, the supplier announced. After
expanding the facility, the Corning, NYbased company began producing
the material last September in new furnaces installed at the site.
The manufacturer has more than doubled output capacity for the crystals,
which it also makes at a plant in North Brookfield, MA.
The
fluoride crystals are a critical optical material for argon-fluoride
193-nm microlithography used in manufacturing semiconductors with
linewidths down to 95 nm and smaller. The Canton plant also manufactures
HPFS fused-silica material for argon-fluoride steppers.
Partners
offer lithography help
Two
European firms have teamed to offer lithography simulation products
for improving process yields. ISE Integrated Systems of Zurich and
Sigma-C of Munich say their partnership will address the growing demands
on process and device simulation in next-generation manufacturing.
Subwavelength lithography requires the use of simulation for predicting
pattern transfer, the partners point out. The partners have agreed
to integrate Sigma-C's simulation software, called Solid-CTM, in ISE's
TCAD simulation programs.
Standard
TCAD simulation programs look at lithography effects "too simplistically,"
according to the companies. Corner-rounding or shortening of end lines,
for example, are ignored. The new products will obtain "realistic"
structures from a lithography simulation program and feed them into
front-end TCA simulation. The combined analytical capability will
enable customers to link lithographic parameters such as defocus and
dose to device characteristics, and thus learn how settings affect
device output, the partners say.
Pact
pinpoints organic LEDs
A
leading manufacturer of polymer organic LEDs will work with a company
specializing in the displays to create advanced soluble OLED materials
and technology. DuPont Displays and Universal Display say they hope
the results of their joint development agreement will enable them
to garner more of the $30 billion FPD market. The partners plan to
farm out manufacturing based on materials they develop to a subcontractor.
The
collaboration combines each firm's respective strengths in OLED research.
Universal has developed phosphorescent (PHOLED) technology at its
corporate center in Ewing, NJ, near Princeton University. The company
claims the technology is four times more efficient than other OLED
platforms. Universal holds more than 400 patents in OLED technology.
A
cross-licensing agreement signed by the two firms calls for DuPont
to pay Universal an initial payment and continuing royalties for products
that use Universal's background phosphorescent emitter, transparent
cathode, and ink-jet printing technologies. Based in Wilmington, DE,
DuPont Displays specializes in polymer science and optical components
used in flat-panel displays.
Newport
opens optics plant
Newport
has opened a 42,000-sq-ft plant to accommodate its growing precision
optics business. The facility is located in Irvine, CA, next to the
company's worldwide headquarters. The plant is part of Newport's $16.3
million investment in its precision optics business. The supplier's
line of precision optics includes collimators, beam expanders, spatial
filters, and aspheric optics. Other products include lenses and thin-film
coatings for wavelengths from 157-nm deep UV to the infrared spectrum.
Luxtron
moves HQ
Luxtron,
a manufacturer of in situ fiber-optic temperature gauges, has moved
its headquarters. The new 33,000-sq-ft corporate home is located in
Santa Clara, CA, and houses a 4600-sq-ft R&D and applications
engineering space. Luxtron's fiber-optic products target plasma, MOCVD,
RTP, and diffusion processes.