INDUSTRY NEWS

Expansions and Acquisitions

Ibis joins IBM on SOI

IBM and Ibis Technology of Danvers, MA, have teamed up to develop an economical method of manufacturing silicon-on-insulator (SOI) wafers. The chipmaker and the supplier of SOI implantation equipment have signed an agreement aimed at making low-cost, high-quality SIMOX-SOI wafers with thinner layers of silicon than are now manufactured. The companies hope to develop IBM's modified low-dose (MLD) technology for SOI CMOS processes.

Commercial production of microprocessors using SOI CMOS has demonstrated the benefits of the technology over bulk CMOS, asserts Ghavan Shahidi, an IBM Fellow and director of high-performance logic development for the manufacturer's microelectronics division. "As we move to the 0.1-µm generation and beyond, SOI is expected to be the technology of choice for a wide variety of devices, including advanced designs using multiple-gate transistors, strained silicon, and even 3-D ICs."

IBM developed MLD technology and licensed Ibis to make SIMOX-SOI wafers. Ibis is the first company to mass-produce the wafers, the firm says. The Massachusetts-based manufacturer has developed two oxygen-ion implanters for making the wafers.

Rite Track enlarging plant

Rite Track is increasing its manufacturing space in West Chester, OH, by almost 50%, the company announced. The supplier, which makes track systems, broke ground for the expansion in February and expects to finish by mid-May. Rite Track says it has purchased additional land for expansion, believing that the newly added floor space will suffice for the next two years or so.

Philips boosts copper biz

Philips Electronics has launched a new metrology unit that will focus on the emerging market for copper and low-k processes. Philips Advanced Metrology Systems (AMS) will specialize in tools for measuring the thickness of interconnect metal films during on-line process monitoring. As part of the launch, Philips says it has boosted investment in the SurfaceWave technology at the core of the business unit. SurfaceWave was the name of the technology branch of Philips's instrumentation division. Based in Natick, MA, the company also set up a network of support partnerships in Europe, Taiwan, Japan, and the United States.

Philips says the measurement tools are suitable for barrier/seed, ECD plating, and CMP uses on both blanket and patterned wafers. The automated systems accommodate both 200- and 300-mm substrates. The company claims it has gained valuable experience from the installed base of SurfaceWave metrology gear used in copper-based process lines around the world.

Coherent to buy Light

Coherent was expected to complete the purchase of a Silicon Valley–based industrial lasers manufacturer by the end of March 2003. Coherent, a photonics specialist, signed a definitive agreement to buy Positive Light of Los Gatos, CA. Positive Light makes advanced solid-state lasers for industrial and scientific applications. The merger calls for the company to maintain its management team and to continue operating its Los Gatos facility. Coherent is based in Santa Clara, CA. Terms of the merger were not disclosed.

Switch maker acquired

Pressure Devices, a manufacturer of industrial pressure switches, has been purchased by Gems Sensors for an undisclosed sum. Gems makes sensors that measure liquid level, flow, and pressure. Gems is based in Plainville, CT. Pressure Devices has its headquarters in West Union, SC.

Slurry tool firm signs rep

A supplier of chemical and slurry delivery equipment has appointed a sales representative for Silicon Valley. Innovative Design Solutions (IDS) of Milton, NY, has hired Citadel Technologies to represent its line of chemical, solvent, and CMP blending, distribution, and recovery products. As a manufacturer's representative, Citadel sells a range of semiconductor manufacturing equipment, including tools for inspection, etch, lithography, and CMP polishers. IDS specializes in the design, installation, and service of systems for delivering high-purity chemicals to POU process tools.

Partners upgrade resist plants

Arch Microelectronic Materials and Fuji Photo Film have embarked on a program to upgrade their combined photoresist production capability. Partners in a joint venture called Fujifilm Arch, the companies are renovating a cleanroom facility in Japan with a 193-nm toolset for developing advanced photoresists. In addition to this investment, the partners are also upgrading Arch Microelectronics' advanced technology and manufacturing center in North Kingstown, RI. The equipment being installed at Fuji's site in Shizuoka, Japan, includes an ASML PAS 5500/1100 193-nm scanner and TEL ACT 8 wafer track. Arch has already installed a Yosemite ultra-low-voltage CD SEM from Schlumberger at the Rhode Island facility.