IMEC
and National Semiconductor are working to develop a 180-nm process for
silicon germaniumbased BiCMOS processes. The Belgian R&D consortium
and the chipmaker are targeting low-power applications. National plans
to offer the process by December 2003 at its fab in South Portland,
ME. The partners have been working together since January 2002 to develop
an 180-nm SiGe heterojunction bipolar transistor module. The second
phase of the four-year contract calls for IMEC and National to develop
more-advanced BiCMOS technology based on silicon germanium by the first
half of 2005.
In
other news, IMEC has extended its industrial affiliation program on
high-k dielectrics for sub65-nm devices. The program was established
in order to find solutions for the use of metal gate stacks in planar-scaled
CMOS processes. The consortium also received the first full-field 157-nm
step-and-scan system from ASML Holding of Veldhoven, The Netherlands.
The Micrascan VII is the first such system for manufacturing working
devices, ASML says.
Cypress
Semiconductor of Round Rock, TX, has made its first 90-nm device using
an Acuity 90 advanced imaging mask from DuPont Photomasks. Cypress used
the mask set in its 90-nm RAM9 process technology to manufacture 72-Mb
SRAMs. Depending on the layer requirements, the chipmaker customized
the set using a combination of Definity binary masks and Luminex phase-shift
masks from DuPont.
The
United States Display Consortium (USDC) is collaborating with a manufacturer
of inspection tools to improve machine-vision inspection for microdisplays.
San Josebased USDC awarded $286,720 to DCI Acquisition of Exeter,
RI, for the joint project. DCI says improved inspection tools will aid
in commercializing microdisplays, which are used for devices such as
rear-projection HDTV, front-projector systems for conference rooms,
and virtual-reality goggles. Poor defect inspection has hindered commercial
development of liquid crystal-on-silicon (LCOS) microdisplays, according
to DCI.
The
company says current detection capability can spot defects measuring
a few microns. Improvements are needed, however, because projector systems
magnify even the smallest defects, the company says. Robert Pinnel,
USDC's CTO, says improved speed and accuracy of defect inspection is
imperative if LCOS-based projection is to thrive. "These capability
shortfalls impact both the cost and quality of the displays and must
be improved for the LCOS market to reach maturity." The improvements
should be ready this year as field upgrades to DCI's DisplayCheck MDT-250LH
system for microdisplay inspection.
ASTM International
has established a membership category for undergraduate and graduate
students. The voluntary standards development organization says the
new student membership category is free for those who qualify. Benefits
include e-mail delivery of Standardization News, the monthly
magazine; free admission to ASTM symposia; a reduced fee of $25 for
the first year of membership following graduation; and sharing in an
international network of future peers. Information: www.astm.org/studentmember.