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INDUSTRY NEWS

The MEMS Zone

DOE backs sensor work

A Colorado-based start-up has received a government contract to develop MEMS sensors for use in conditions above 1000°C. The U.S. Department of Energy (DOE) awarded the contract to Sporian Microsystems of Boulder through DOE's National Energy Technology Laboratory in Morgantown, WV. The pact lasts through early 2004. Founded in 2000 as an R&D firm, Sporian focuses on MEMS, optics, and microelectronics packaging.

Sporian says the sensors' commercial promise rests on their ability to provide data from the severe conditions found inside turbine engines, furnaces, and gas processes used in many industries. Sensors in use today operate far below 1000°C, the company points out.

Microsystems CD-ROM updated

An updated version of a microsystems CD-ROM has been issued in three languages. World of Microsystems covers MEMS processes such as resist coating, CVD, and dry etching, as well as market trends, prices, volumes, and costs. The disk covers industries such as automotive, environment, aerospace, and medical. The three languages are French, German, and English.

Optical switches, microspectrometers, accelerometers, micropumps, and ADR magnetic heads are among the components featured. Yole Développement, the Swiss Foundation for Research in Microtechnology, MIB, and VDI-VDE are the publishers. Information: http://extranet.yole.fr/wsmst/cdmst.pdf.

Prototype service upgrades

Intelligent Micro Patterning System Solutions has added a special type of micromolding for making microfluidic and other MEMS devices, the company announced. The Florida-based company, which provides rapid MEMS prototyping services, now offers polydimethysilane (PDMS) material. PDMS is ideal for making biological microdevices because it's transparent, easily moldable, and compatible with many biological materials, the company says.

Intelligent Micro Patterning claims that the photomask-free technology it licenses from the University of South Florida enables the company to make prototypes faster than traditional techniques permit. The technique projects master images directly onto substrates such as quartz, metal, and polymers.


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