Boin
has released version 2.3 of its Wafermap software.
The updated metrology package is compatible with Windows XP and
can import data files from Filmetrics and QC Solutions systems.
Wafermap collects, edits, analyzes, and visualizes thickness,
ellipsometric, and other physical-parameter measurements from
various metrology tools and turns the imported data into line
scans, two- and three-dimensional plots, histograms, or contour
plots. Information: info@boin-gmbh.com.
Two
patents from Entegris's NT International subsidiary have
been added to the parent company's intellectual property
portfolio. One was awarded for a pressure transducer,
featuring the Sapphire sensor, which measures and monitors pressure
in corrosive acid and vacuum applications. The other was given
for the integrated flow controller, which offers closed-loop liquid
flow control through the use of direct liquid flow and pressure
measurements. Information: www.
nt-intl.com. (Semicon Japan)
The
software capabilities of Micro-Metric's MicroLine 500
and 600 noncontact measurement systems have been
upgraded to include Windows 2000. Application programs
for both systems are written with the company's measurement control
language software, a text-based language that controls tool functions
and permits users to modify existing programs or create their
own control programs. Information: info@micro-metric.com.
DuPont
has augmented its Teflon PFA HP Plus fluoropolymers
with several new grades. The polymers are designed for
forming fully adhered linings for piping, fittings, vessels, and
columns for use in semiconductor chemical processing. Compatible
with most chemicals and solvents, the Teflon material is 50% less
permeable to HCl. It also resists stress cracking caused by fluorosurfactants
and minimizes problems from ozonated ultrapure water. The company
says that parts made with the fluoropolymer in the proper equipment
should meet SEMI F-57 requirements. Information: www.teflon.com.
(Semicon Japan)
Adept
Technology's Adept ActiveV+ software permits real-time
control of the company's robots and motion controllers from native
PC languages using Microsoft component object model protocols.
Allowing the flexibility and ease of use of an open-architecture
environment, the software package enables a PC to issue direct,
real-time robot motion and monitor commands over FireWire- or
Ethernet-based high-speed bus connections. Information: www.adept.com.
An
animated, Flash 6.0-enabled product tour from Membrana
describes different fiber types and contactor designs
available for the addition and removal of dissolved gases
to and from liquid streams. One feature of the tour, found on
www.liqui-cel.com, goes inside a membrane contactor and shows
how the liquid and gas paths move through it. The company plans
to make the interactive tour available in multiple languages.