Boston, MA

A monitoring device for chemical-mechanical planarization applications provides rapid insight into the pressures applied during the polishing process and supplies data directly to personal computers. The easy-to-use I-Scan system measures the tactile force and pressure applied by a polishing head on a wafer. When uneven pressures exist, tool adjustments can be made, and then new measurements can be taken. The unit includes interface hardware, software, and patented thin-film array sensors that are minimally disruptive to the pressure pattern.

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Atomic Layer Deposition Valve

Swagelok

Solon, OH

The ALD-series valve is an ultra-high-purity, pneumatically actuated component for use in atomic layer deposition (ALD) processes. To meet the stringent demands of ALD applications, the valve features rapid valve actuation speeds <5 milliseconds. It also achieves lifetime ratings >25 million cycles. The patent-pending flow-setting feature provides consistent process-gas delivery. Manufactured from 316L VIM/VAR stainless steel, the valve body is available with 1/4-in. VCR and 1/4-in. and 6-mm tube-butt-weld end connections. A high-temperature model, rated for temperatures up to 200°C, is available. Additionally, multiport, multivalve manifold, and modular surface-mount configurations are available.

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Spray-Coating Tool

EV Group

Schärding, Austria

The EVG150 automated spray coater performs conformal coating of substrates with challenging surface topographies, such as cavities. Also suitable for coating small and irregular substrates, the tool provides high coating uniformity and extended layer thicknesses from 100 nm to 100 µm. It coats organic or dielectric materials of various viscosities and positive and negative photoresists such as BCB and SU-8. The system is for use in a range of MEMS applications, including acceleration, pressure sensor, and waveguide fabrication. It can also be used in advanced packaging applications and in the manufacture of compound semiconductors, OLEDs and displays, read-write heads, and ink-jet printer heads.

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FTIR Moisture Analyzers

Midac

Costa Mesa, CA

V-series Fourier-transform infrared (FTIR) moisture analyzers offer a range of enhancements, including dual analog-to-digital convertor electronics for improved signal to noise; a sensitive, thermoelectrically cooled indium arsenide detector; electropolished gas cells to eliminate sample moisture retention; and low internal power dissipation for durability under extended vacuum operation. The analyzers perform real-time measurement of trace moisture in ammonia, hydrochloric acid, HB₄, nitrogen trifluoride, and other corrosive matrices. Measurement intervals are typically less than 1 minute. The instruments are operated under vacuum to eliminate background atmospheric moisture, reducing setup times to a few hours. Purged versions of the V series are also available.

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ArF Excimer Light Source

Cymer

San Diego, CA

Designed to support 65-nm photolithography applications, the XLA 105 argon fluoride (ArF) excimer light source is based on master oscillator power amplifier dual-gas-discharge-chamber technology. Operating at a 4-kHz repetition rate and delivering 40 W of output power, the instrument provides full imaging capability for 200- and 300-mm lithography scanners at a very tight bandwidth of ≤0.2 pm at full-width half maximum and ≤0.50 pm at 95% energy integral. It enables tools with high-numerical-aperture (NA) lens designs to expose the most critical semiconductor features. Because of this high-spectral-bandwidth performance, high-NA lens designs require fewer calcium fluoride elements. The instrument also offers increased pulse duration of ≥=70 nanoseconds, helping to reduce peak fluence for increased scanner optics lifetime.

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Miniature Linear Stage

SKF Motion Technologies

Bethlehem, PA

The Pico-series ball screw–driven miniature linear stage performs high-precision pick-and-place positioning applications in the semiconductor and other industries. The compact stage integrates drive and guidance mechanisms using the company's standard components (precision-ground ball screws and miniature-profile rail guides), promoting high-performance and customization capabilities. The stage is available in 60- and 80-mm sizes, with five standard stroke lengths for each size. It offers the high load-carrying capacity of drive screws, high running accuracy, and high moment stiffness. Travel speeds up to 500 mm/sec can be achieved.

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Ozonated-Water Delivery System

MKS Instruments

Andover, MA

The Liquozon smart ozonated-water delivery system provides ultrapure ozonated water (DIO₃) for wafer and substrate cleaning in IC and thin-film applications. The small-footprint, self-contained system offers low gas and DI-water consumption and is easy to install. It generates DIO₃ at the point of use, eliminating the need for chemical storage. The unit does not generate NOx, a source of contamination that can damage metal piping. It delivers very high and accurate dissolved-ozone concentrations up to 65 ppm, and its closed-loop control ensures ozone delivery at stable concentrations, even when flow rates vary. Undissolved, residual ozone is converted back to oxygen before being released through the exhaust system. The unit is virtually maintenance-free and has a mean time between failures of >20,000 hours.

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Videographic Recorder

TTI

Williston, VT

An advanced videographic recorder, the Datagraph II is suitable for monitoring, recording, and evaluating processes in semiconductor and other applications. The recorder is a modular paperless unit that accommodates up to 18 analog inputs or a mix of analog and digital I/O cards. Other features include a high-resolution color display (640 X 480 pixels), an infrared detector for prolonged display life, a plug-and-play I/O card, shallow unit depth, and a user-friendly interface. Low-voltage and benchtop kit options also make the unit suitable for portable applications. Multiple display formats and easy-to-access keys make monitoring and setup easy. Data can be stored in flash ROM, on a compact flash card, or on a PC via RS-232/422/485 or Ethernet options.

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Dual-Output Pressure Sensor

Honeywell Sensotec

Columbus, OH

The Model DS dual-output pressure sensor provides an RS-485 or RS-232 output and 0–5-V dc analog output. The 1200-Hz frequency response of the analog output and 380 readings per second of the digital output are within the requirements of the test and measurement market. The digital output eliminates the need for a computer interface AD card with a direct connection to a PC or data-acquisition system. The sensor's rugged, all-welded stainless-steel construction makes it suitable for factory or test-cell installation. It has a combined accuracy of ±0.1% full scale, including temperature errors over the compensated temperature range. Sensors are available with pressure ranges from 0–5 to 0–10,000 psi. Models with metric units are also available.

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TOC Analyzer

Mettler-Toledo Thornton

Bedford, MA

The 550TOC analyzer uses proven ultraviolet oxidation technology to measure total organic carbon accurately and rapidly in pure and ultrapure water applications. The analyzer offers continuous on-line monitoring and has point-of-use and portable monitoring capabilities. The low-maintenance, low-cost unit is simple to use, requiring no reagents or chemicals and no moving parts. It is suitable for use in semiconductor manufacturing, recycle/reclaim, and other applications.

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Pressure Transmitters

Orange Research

Milford, CT

Low-differential-pressure transmitters are low-cost alternatives for wafer-fab, cleanroom, and other applications. The heart of the 20300-series transmitters is an accurate inductive transducer design that delivers long-term stability and low hysteresis. The transducer uses a beryllium copper diaphragm coupled to an inductive pickup to measure very small changes in pressure. The transmitters extend measurement capabilities to 0.04 in. H₂O. Fully featured models include integrated LED digital displays, square-root extraction for flow measurement, pneumatic overload protection, and a variety of outputs. The family includes an accurate portable pressure calibrator to generate pressure and calibrate sensors.

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Wide Miniature Linear Guides

Danaher Motion

Mayfield Heights, OH

MicroGuide Wide miniature linear guides meet the high-accuracy and load-capacity requirements of front-end semiconductor manufacturing and other applications. The guides are constructed of 440 stainless steel, require little or no lubrication, and are corrosion resistant. With dimensional tolerances within ±0.010 mm, they deliver smooth, quiet operation and high accuracy. The two-track, gothic-arch ball-groove geometry makes them suitable for single-rail applications with moment loads. The guides are available in one-piece lengths up to 1 m, eliminating the need for rail joints within that size parameter. For unlimited stroke capability, they are easily customizable for longer lengths with butt joints. The guides are available in 7, 9, 12, and 15-mm sizes.

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LED Lift-Off System

JPSA Laser

Hollis, NH

The IX-1000 ChromaLift excimer laser system for LED lift-off applications in the compound semiconductor and wafer-fab industries reduces the time and cost of the LED fabrication process. A major cost factor in LED fabrication is the sapphire and scribe-and-break operation. LED lift-off eliminates wafer scribing by enabling manufacturers to grow gallium nitride (GaN) LED film devices on the sapphire wafer and then transfer the thin-film device to a heat-sink electrical interconnect. The process homogenizes the laser-beam profile and fires through the back of a sapphire wafer to debond the GaN LED device and transfer it to a substrate, where it can be packaged onto a heat sink or optical reflector. The laser can perform either step-and-repeat or fire-on-the-fly area-per-shot processes in areas as large as 1 X 1 cm. Different laser powers enable different fields of view.

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Filtration Capsules

PTI Advanced Filtration

Oxnard, CA

FluoroCap filtration capsules are available in "T" and "L" cap configurations. The new models feature an all-fluoropolymer pleated filter cartridge for excellent chemical resistance in aggressive chemical applications. The integral filter design maximizes up-time by providing fast and easy change-out capability with no additional cleaning protocols. Because the replacement of filter elements is eliminated, the chance of introducing contamination into processes is minimized. The filtration capsules are available in four models: FluoroCap, FluoroCap-HT for aggressive chemical filtration up to 180°C, FluoroCap-Select for applications using high flow rates and aggressive chemicals, and FluoroCap-Select-HT for the highest-temperature and flow-rate applications.

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FPD Process-Optimization Sensors

SensArray

Fremont, CA

An economical and convenient alternative to factory-instrumented glass panels, Process Probe 2050 glass-panel sensor-instrumented templates perform in situ characterization of glass temperature profiles for chemical vapor deposition, physical vapor deposition, and other flat-panel display (FPD) applications. Users can mount the flexible, thin plastic templates with sensor-embedded glass chips attached to glass panels on-site, saving time and money without sacrificing accuracy and reliability. The instruments measure glass temperature directly in real time during each step in the process cycle, including load, temperature ramping, steady-state, cool-down, and unloading, allowing users to determine edge-to-center temperature differentials and optimize cycle times by directly measuring the thermal stabilization time of glass panels within a load.

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Panel-Mount Controllers

Walchem

Holliston, MA

Single- or dual-input panel-mount controllers for pH and oxidation/reduction potential (ORP) are flexible and easy to use, even in challenging industrial environments. The W305 controllers provide cost and space savings by allowing users to add a second sensor rather than a second controller. A simple sensor-calibration process saves time, and digital inputs for each sensor input channel prevent control based on stagnant samples or empty tanks. Control output-limit timers prevent runaway chemical addition. Manual output activation simplifies the process of testing outputs during installation or making chemical additions safely by hand. The 1/2 DIN, NEMA 4X controllers are UL/CSA/CE-certified and support one or two sensors in any combination of pH or ORP. Each sensor input channel has temperature-measurement capability for automatic-probe temperature compensation or process-temperature monitoring.