MICRO: Product Extra!

Agilent Technologies offers a simple, reliable method for measuring metal impurities at ultratrace levels in photoresist samples. Equipped with a high-sensitivity octopole reaction system (ORS), the 7500cs inductively coupled plasma mass spectrometry system eliminates all matrix-based polyatomics that interfere with the measurement of difficult elements such as boron, magnesium, aluminum, titanium, chromium, and zinc, as well as argon-based interferences in potassium, calcium, and iron. The system's sample-introduction unit can handle high sample matrices over extended periods and breaks down the heavy photoresist matrix to prevent clogging. Test results show that the ORS can prevent polyatomic ions from reaching the detector, with spike recoveries at 0.5 ppb for all 35 elements tested. The company offers an application note, Direct Analysis of Photoresist and Related Solvents Using the Agilent 7500cs ICP-MS. Information: www.agilent.com/chem.

A 300-page catalog from Gems Sensors features a comprehensive selection of liquid-level, flow, and pressure sensors. Fluid Sensors & Controls contains information on electro-optic level switches, ultrasonic level sensors, float-type level sensors, high-accuracy pressure transducers, capacitance pressure transducers, pressure switches, flow switches, and temperature sensors. The catalog is color-coded by section for easy navigation. Each section has its own contents and user features, such as selection guides, wiring diagrams, dimensional drawings, application information, specifications, and installation and maintenance data. Information: www.gemssensors.com.

Sigma-C has updated its SOLID-C immersion lithography (IML) simulation software. Version 6.4 addresses technical obstacles that hinder the adoption of IML by expanding the software's ability to simulate arbitrary polarizations in the source and projector to mitigate hypernumerical-aperture effects. The software allows companies to study the feasibility of adopting IML before investing in the technology or undertaking infrastructure changes. With the software's one-click immersion option, companies can detect if the technology offers them effective lithographic solutions for their process and product needs. Information: www.sigma-c.com.

JPSA Laser offers refurbishment services for ultraviolet excimer lasers. Refurbishing lasers saves customers money, and refurbished lasers perform better than products based on original factory specifications because of upgrades, modifications, and the better-quality parts and designs used in the refurbishment process. Complete lasers can be refurbished. In addition, modules such as tubes, valve banks, vacuum systems, and pulse-forming networks can be refurbished or replaced. Depending on customer requirements, lasers can be modified to meet expanding production needs. Refurbished lasers are leak-checked for 24 hours and burned in for 24 to 48 hours. Gas lifetime, power, energy, and beam quality are verified, and final test results are documented. Information: www.jpsalaser.com.