MICRO: Prod Tech news

Multiple Metrology Tool

Nanometrics

Milpitas, CA

The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization with excellent repeatability. It performs 200- and 300-mm wafer metrology applications and can be configured with any combination of spectroscopic reflectometer, spectroscopic ellipsometer, optical critical dimension, diffraction-based overlay, and wafer stress/bow modules. The tool features temperature control and robotics, including a dual-arm robot, a high-precision stage, and high-speed focus system. It provides robust pattern recognition, fine thickness reproducibility, and high throughput.

Dry Pump System

Alcatel Vacuum Technology

Annecy, France

The Adixen A300 dry pump system offers high pumping speeds in a compact, space-saving package. The system is for use in a wide range of semiconductor processes. One-third the size of comparable units, the pump is easy to integrate and consumes low amounts of energy and water. It uses proven multiroots technology to achieve pumping speeds well above 300 m³/hr (5000 L/min). That technology enables the system to combine two pumps into a single system (equivalent to a pump and blower package). Featuring low noise and vibration characteristics, the unit has acoustic pressure levels that are 65% lower than those of traditional pumps.

High-Torque Stepping Motors

Intelligent Motion Systems

Marlborough, CT

The MDrive product line combines high-torque stepping motors with onboard electronics. The expanded product offering provides users with a choice of simple, low-cost integrated motors and drivers for a range of applications. The units are available in four sizes: MDrive14, MDrive17, MDrive23, and MDrive34, each of which is offered in several configurations. The MDrive14, incorporating a NEMA size-14 stepping motor with onboard drive, is for use in applications that require less torque and where space constraints are a critical consideration, such as in semiconductor manufacturing. That unit incorporates a half/full-step drive and is offered with optional linear actuator, encoder, planetary gearbox, or rear control knob for manual positioning.

Trace-Moisture Analyzer

Tiger Optics

Warrington, PA

The MTO-LP-H₂O trace-moisture analyzer measures moisture in hydride gases such as ammonia, phosphine, and arsine. It combines high technology with plug-and-play operation. The low-maintenance, calibration-free unit has the built-in capacity to measure up to four sample gases. Based on cavity ring-down spectroscopy, it performs state-of-the-art moisture detection in milliseconds with absolute accuracy. Since the unit uses a noncontact measurement technique in which only light "touches" the gas, moisture concentrations can be quantified in many corrosive and reactive gases. With its corrosion-resistant flow stream, robust design, flexible software, four-inlet gas manifold, and advanced sensing technology, the analyzer saves time, money, and space.

Vision Sensors

Cognex

Natick, MA

A family of sight-vision sensors includes the In-Sight 5100 and In-Sight 5400. With four times the processing power of comparably priced sensors and a rugged industrial design, the products meet IEC specifications for shock and vibration and achieve an IP67 (NEMA 6) rating for dust and washdown protection. In addition to their capacity for powerful processing, the sensors acquire up to 60 full frames per second. When a full image is not required, even higher speeds are possible using partial acquisition. The sensors include a full library of vision tools that offer high vision performance. They have M12 connectors and a metal housing.

Vibration-Isolation Workstation

Kinetic Systems

Boston, MA

A vibration-isolation workstation offers Faraday cages and other efficiency-improving accessories. The 9100-series unit can be configured for a wide variety of applications in which external vibrations adversely affect the operation of sensitive equipment. It is available with a load capacity of either 800 or 1300 lb (the lighter-capacity unit can be converted to a heavier-capacity one). Tabletops range from 24 X 36 in. to 36 X 72 in. and are available with lightweight honeycomb or composite material. The unit features high-performance active-air suspension, which provides a vibration-controlled environment with low natural frequencies and excellent vertical and horizontal isolation efficiencies. A preset zero-deflection level is maintained regardless of load addition or removal. Class 100 and optional Class 10 models are available.

Support Bearing Units

Steinmeyer

Bedford, MA

Two series of industry-standard support bearing assemblies for miniature ball-screw product lines provide significant cost savings to tool engineers and manufacturers. Series SLS and SLF support bearing units are integrated components that simplify ball-screw installation, thus reducing design and assembly time. Each assembly includes backlash-free, sealed, precision duplex bearings, a locknut, and housing in either a pillow block design that is ready to be attached to a flat surface (Series SLS) or a round design with a rectangular flange (Series SLF). Since the units are greased for life, they do not require maintenance. The bearing assemblies are available in four sizes: 6, 8, 10, and 12 mm. They are compatible only with ball-screw series 1112, 1214, 1412, and 1510, and with rolled-thread series 1132, 1234, 1432, and 1530.

Day Tanks

Edlon

Avondale, PA

Secure & Pure day tanks are used to store ultrapure, electronic-grade chemicals used in semiconductor manufacturing. The tanks feature a one-piece, 90-mil-thick removable Teflon PFA liner with a high-density polyethylene outer shell (overpack) to eliminate possible metal-ion contamination from the container. Other features include sidewall cutouts for liquid-level monitoring, heat-exchanger coils, PFA-coated mixer assemblies, spray bars, baffles, and flare-type fittings for feed-line connections. In addition to day tanks, the Secure & Pure line includes fluoropolymer coatings and glass-backed, bonded fluoropolymer liners that are designed to satisfy the IC industry's purity requirements. Coatings are fused directly to metal substrates. Bonded liners are adhered using a proprietary bonding system.

Coriolis Mass-Flow Controller

Emerson Process Management

Hatfield, PA

A low-flow Coriolis meter and controller enables users to measure and control liquids and gases precisely at low and high flow rates. The Brooks Instrument Quantim Coriolis mass-flow controller (MFC) is for use in liquid chemical vapor deposition and critical gas-delivery applications. A modular hardware platform using improved sensing-tube geometries and optical sensing techniques enables the MFC to handle both liquids and gases. The platform allows the unit to measure and control flows as low as 1 g/hr and as high as 28,000 g/hr. The controller also provides better overall accuracy at the low end of the flow range, thanks to improved zero stability. The MFC features a new valve that handles variations in line pressures well and a large orifice that reduces the chance of clogging. The valve also uses an all-metal seat, eliminating potential control issues associated with elastomer valve-set compatibility and swelling.

GC-MS Vacuum Upgrade Kit

Pfeiffer Vacuum

Nashua, NH

A kit upgrades the vacuum system of older-model gas chromatography–mass spectroscopy (GC-MS) analytical tools. A complete plug-and-play interface kit, it enables users to employ a state-of-the-art turbo pump with HP 5890, HP 5970, or other older mass spectrometers. All components required to replace an obsolete turbo pump are listed under one part number. Special interfacing can be ordered if the system requires it.

Confocal Laser Microscope

Olympus Industrial America

Orangeburg, NY

LEXT, a confocal laser scanning microscope for submicron imaging, offers 0.12-µm resolution and accurate 3-D measurement capability. The microscope's magnification power from 120X to 14,400X satisfies researchers working between the limits of conventional optical microscopes and scanning electron microscopes. The instrument combines a 408-nm laser with optics designed to operate at that wavelength to optimize image quality and limit aberrations. Accompanying software provides a simple user interface, fast processing, and advanced analysis. The tool performs bright-field, dark-field, and differential interference contrast microscopy techniques in both video and laser confocal imaging modes. It is for use in the manufacture of high-tolerance components such as MEMS devices and also performs quality assurance, roughness analysis, height measurement, and volumetric analysis.

Humidifier

Herrmidifier

Sanford, NC

The Herrmidicool humidifier provides air and water atomizing humidification and evaporative cooling for both in-duct and space applications. The unit is for use in semiconductor cleanrooms, research laboratories, and other environments. It incorporates automatic, fully modulating controls that allow the patented, fine-mist atomizing spray heads to meet the most stringent requirements. The humidifier combines control logic and mechanical design, yielding effective humidity and temperature control at a reasonable cost. Easy to install, the unit adapts to most existing duct systems. Its atomizing heads are self-cleaning and self-sealing, minimizing maintenance and protecting the water supply from ambient contamination. In addition, the unit offers evaporative cooling and consumes low amounts of energy.

Bar Code Tool

Coreco Imaging

Montreal, QC, Canada

A bar code tool extends the functionality of Sapera processing, a software library that includes image processing, search, OCR, and blob analysis tools. The bar code tool includes a comprehensive set of functions used to decode 1-D and 2-D bar codes. It provides support for a variety of standard codes. Designed to operate on degraded and poorly illuminated images, the tool features fast and robust algorithms and functions. Even at high speeds, it can automatically locate a bar code, regardless of its orientation, within an image without having to specify a region of interest. Since all algorithm parameters are automatically computed from the image, no threshold specification is required, making it easy for users to maintain the algorithm under changing conditions.

Arsine Purifier

Matheson Tri-Gas

Parsippany, NY

Nanochem ASX-II purification media removes H₂O and other impurities from arsine gas. It also eliminates the occurrence of pressure build-up and nearly doubles the moisture capacity, extending the purifier's lifetime. The media removes oxy-acid impurities, which can be incorporated in GaAs, InGaAs, AlGaAs, and other III-V films during growth, causing reduced carrier concentration and loss of photoluminescence efficiency. The purifier, part of the company's product line for compound semiconductor applications, is available in a variety of sizes.

Direct-Drive Rotary Tables

Aerotech

Pittsburgh, PA

ADRS-series direct-drive rotary stages minimize stage height. The ultralow stage profile reduces the effective working height of the system, minimizing stack-up-related errors. The series also provides a clear aperture that can be used for product feedthrough or laser-beam delivery. The rotary tables use direct-drive brushless-motor technology, enabling round-the-clock operation. They also provide quicker acceleration and higher top speeds than gear- or belt-driven mechanisms, yielding higher total throughput. The tables use a slotless stator design that eliminates torque ripple, providing smooth velocity stability comparable to that of a high-quality dc brush motor without the latter's inherent maintenance requirements. Since the slotless motor is directly coupled to the tabletop, velocity disturbances created by toothed belt drives or worm gears are eliminated. The rotary tables are available in 100-, 150-, and 200-mm versions.