INDUSTRY
NEWS
Materials
center plan unveiled
International
Sematech and the state of Texas have agreed to create the Advanced Materials
Research Center (AMRC) in Austin. A 5-year program, the AMRC will receive
an initial $40 million from the newly created Texas Enterprise Fund, with
an additional $160 million to be funded from various sources over the
next 4 years. The center will collaborate with the University of Texas
system as well as other universities in the state. Leading-edge materials
and capabilities for next-generation semiconductors—including advanced
interconnect schemes and immersion lithography—will be the AMRC's main
focus, as well as research projects in MEMS, nanotechnology, biotechnology,
and other disciplines.
Varian,
ISE enter JDA
A
leading ion implantation equipment supplier and a technology CAD (TCAD)
solutions provider have agreed to jointly develop advanced doping and
diffusion models for sub-90-nm devices. Varian Semiconductor and Integrated
System Engineering say that the modeling efforts on key applications such
as low-energy implantation and angle-control effects will allow chipmakers
to use their own TCAD capabilities with greater accuracy, which will lead
to faster process development. The models will also aid in understanding
future doping requirements and applications. "Our joint development work
with ISE will encompass the entire doping regime, including mixed-species
implantation, with special emphasis on the impact of ion, implant angle
and low-energy implantation, as well as plasma doping," says Sandeep Mehta,
Varian's director of strategic applications.
China
scholarships launched
A
new initiative aims to promote technical education among students at major
Chinese universities. The SEMI China Scholarship Fund, launched at Semicon
China in March, hopes to raise at least RMB160,000 ($19,300) per year
through donations from the trade group's member companies. This amount
should underwrite between 40 and 50 individual scholarships annually,
to be awarded to deserving students at five major Chinese universities.
SEMI members that participate in the scholarship fund will also receive
the resumes of all grant recipients to facilitate possible employee recruitment.
A guest lecture program is also planned to let participating companies
promote themselves at the selected universities. The association is surveying
its members to determine which Chinese universities should be included
in the fund. For further information about how to participate in the scholarship
initiative, contact Mark Ding, president of SEMI China, at mding@semi.org.
Stripper
recovery expands
An
expanded global recovery program for photoresist-strip chemicals promises
cost savings and an environmentally conscious alternative to traditional
waste disposal. Mallinckrodt Baker says its Photoresist Stripper Recovery
Program can help lower fabs' costs. The program gets rid of disposal or
incineration costs associated with solvent-based strippers. It also eliminates
expenses connected with the rinsing, packaging, and disposal of drums.
On the regulatory front, the program reduces administrative and reporting
costs at federal, state, and local levels.
In
order to start the recovery program, a fab first returns the used stripper
to Mallinckrodt Baker. The chemical company then inspects and tests the
materials, recovers the original components, and reformulates a new stripper.
Quality control steps are performed, and the recovered stripper is shipped
to the customer in its specified container.
Design
kit guide issued
A
Fabless Semiconductor Association working group has issued process design
kit guidelines for mixed-signal and RF devices. Such kits, known as PDKs,
are sets of data files that allow analog circuit and layout designers
to efficiently design an IC using a set of electronic design automation
(EDA) tools and a selected foundry process, according to the trade group.
"This document facilitates the clear communication between foundry, fabless
customer, EDA vendor, intellectual property developer, and design service
provider," says Ken Brock, chair of the working group and vp of marketing
at Silvaco. The "Mixed-Signal/RF PDK Checklist" can be downloaded from
the FSA's Web site at www.fsa.org/committees/foundry.
E-diagnostics
showcased
An
Indian IT and product engineering company demonstrated its secure remote
e-diagnostics framework to International Sematech. HCL Technologies verified
its e-manufacturing package by allowing users from the consortium's Austin,
TX, headquarters to remotely access an FEI CLM DualBeam tool located at
the metrology company's Peabody, MA, plant. The New Delhi–based company
describes its e-diagnostics framework as a new-generation, web- and component-based
rapid deployment solution, constructed using Sematech guidelines and meeting
SEMI standards specifications, which is scalable to advanced levels of
e-diagnostics capabilities.
"The
HCL approach incorporates flexibility in data monitoring and addresses
the data security issues that have prevented fabs from attaining increased
tool utilization through remote diagnostics," notes Gary Viviani, FEI's
director of software engineering.

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© 2007 Tom Cheyney
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