Avacuum
chuck stage for nPoint's iC atomic force microscope
(AFM) upgrade kit supports Veeco Dimension-series scanning
probe microscopes, which accommodate large samples such as 300-mm
wafers. The stage offers a scanning range of 100 X 100
µm. The upgrade kit brings subnanometer accuracy and excellent
scan linearity to existing AFMs. It is a highly precise, closed-loop
scanner kit for enhancing existing AFMs. When used with the AFM
controller, the kit can substitute for the x-y scanner in the AFM
head, leaving only the z-scanner of the head enabled. The scanner
can also be used as a precise positioning tool, with all three axes
of motion (x, y, z) of the AFM head remaining functional. The closed-loop
system can be used as a stand-alone device for experiments requiring
precision motion and positioning control. Information: www.npoint.com.
A
free slide chart from Scott Specialty Gases identifies and
links potential lost revenue to the inaccuracy of NOx
and SO2 mixtures used to calibrate continuous
emission monitors (CEMs). To avoid over- or understating
emissions, the Environmental Protection Agency (EPA) requires that
CEM calibration mixtures provide ±2% accuracy—in other words,
the actual mixture concentration contained in a cylinder must be
within 2% of the certified concentration (tag value) as stated by
the manufacturer. Inaccurate CEM calibration can lead to overstating
emissions, thus costing a company hundreds of thousands or even
millions of dollars in lost emission credits. The slide chart is
particularly valuable considering the results of an EPA audit showing
that environmental calibration mixtures are frequently less accurate
than indicated by some gas suppliers. It can be obtained by calling
800-21-SCOTT. Information: www.scottgas.com.
(Semicon West, S.F., North Hall, Booth 6153)
Aviza
Technology has been awarded a patent for a multilayer
composite dielectric film concept for improving the electrical properties
and thermal stability of gate dielectrics in advanced devices. The
film, a composite of high-k metal oxide and metal silicate, enhances
compatibility between a poly electrode and the silicon substrate
at the transistor level. Although the patented concept was developed
for devices with features of ≤65 nm, it can also be used at
the 90-nm level. The company's atomic layer deposition products
will use the new film concept, which can be sequentially deposited
in situ in a single chamber. Information: www.avizatechnology.com.
(Semicon West, S.F., South Hall, Booth 1537)
The
assured shipping time FAST program from Festo is
a product-
delivery service that provides same-day shipment of stock
products
and three-day shipment of custom-configured products, including
actuators, valves, valve manifolds, air preparation units, and accessories.
The service delivers products for prototype, production, and replacement-part
needs. The company backs up the service with an "It's on time, or
it's on us" policy, promising to reimburse the shipping charges
for orders that do not meet FAST lead times. Information: www.festo.com/us/fast.
(Semicon West, S.F., South Hall, Booth 2737; S.J. McEnery Hall,
Booth 11642)
A
24-page catalog from United Electric Controls summarizes
electronic and electromechanical pressure, differential
pressure, and temperature switches; temperature sensors; and pressure
transducers. Most products in the catalog are available
for shipment in less than a week. The catalog contains a product
overview and selection guide for the company's extensive offerings.
Pressure switches cover ranges from vacuum to 9000 psi; temperature
switch ranges are from –180° to 650°F; and pressure
transducers cover vacuum to 50,000 psi. Process interfaces include
U.S. and metric port connections. High-purity models, flush mounts,
and a wide selection of wetted materials are available. Information:
www.ueonline.com.