offers a series of upgrades for its x-ray fluorescence wafer analyzers:
a new version of SuperQ software that enhances the user interface
and improves integration with other metrology techniques, new boron
detection channels that boost the system's gauge capability, and improved
embedded firmware that achieves excellent results with very thin or
flexible wafers. SuperQ software offers enhanced FP-Multi results presentation,
providing users with a full data report or enabling them to select particular
parameters. Its improved interface allows fabs to integrate data on
film thickness collected using alternative technologies. The boron detectors
improve throughput at a given accuracy or increase accuracy at a given
data-collection time. For a limited period, the upgrades are available
at a reduced price to owners of PW2800, PW2820, PW2830, and PW2880 systems.
new Web site from Ionics offers comprehensive
on-line information on the company's complete line of systems and services
for water purification, wastewater treatment, and water analysis.
The fully redesigned site takes advantage of the latest Web development
tools to create a dynamic appearance. It provides quick and efficient
access to the latest company and product information. The user-friendly
format enables visitors to navigate the site effectively, selecting
the technologies and applications that are most suitable for their needs.
The site offers a wide selection of downloadable technical papers, case
studies, feature articles, and data sheets, as well as a company fact
sheet and worldwide contact list. Information: www.ionics.com.
International has been awarded a patent for a new process that etches
high-k films with high selectivity. For use at the 45-nm node
and below, the process performs wet etching of high-k films, which is
not possible with traditional dielectric wet-etch techniques. It works
by contacting high-k films with a dilute fluoride-containing solution
to selectively etch the high-k film. The process chemistry provides
hafnium silicate removal rates of up to 80Å/min, with selectivity
oxide as high as 16:1. Chipmakers can use the process on the company's
Magellan immersion clean system and the Zeta spray processing system
to remove high-k thin films quickly and selectively. Information: www.fsi-intl.com.
Performance Plastics offers free samples of its Meldin polyimide and
high-performance thermoplastic materials. The complete range
of materials is available in the form of rods, sheets, custom-molded
parts, machined components, or stock shapes for excellent machinability.
When used continuously, the materials retain their critical properties
over temperatures ranging from cryogenic to 600°F (315°C). When
used intermittently, they function up to 900°F (482°C). The
materials have high dimensional stability, low thermal conductivity,
and low friction. Information: www.plastics.saint-gobain.com.
2005–2007 catalog from Pfeiffer Vacuum covers the company's
vacuum technology, including equipment for producing, controlling, and
measuring vacuum. The four-color, hardcover catalog contains
information on each product's applications, features, technical data,
and part numbers. It also includes accessories and components. Products
include turbomolecular, rotary vane, Roots, dry, and diffusion pumps;
vacuum gauges and controllers; helium leak detectors; flanges; feedthroughs;
and valves. The catalog also offers an expanded line of large turbo
pumps, the HiMag magnetic-bearing turbo pump with an integrated controller,
the XtraDry low-particulate dual-piston pump, and the magnetically coupled
Roots pump. An on-line catalog is available. Information: www.pfeiffer-vacuum.com.
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