Optima family of single-wafer ion implantation tools is a comprehensive
platform that performs all ion implantation applications at the 65-nm
technology node and beyond. The first tool in the series, the Optima
MD, offers implant precision and productivity for a wide variety of
low-energy, middose applications, especially high-tilt HALO processes.
With a broad energy range of 500 to 750 keV, the system also enables
customers to perform evolving well and channel implants while achieving
high productivity levels for more-traditional implant processes. The
tool family also includes systems for performing high-dose and high-energy
Nicolet ECO/RS Fourier transform infrared (FTIR) spectrometer is a benchtop
tool used for wafer analysis. Integrated with the Nicolet 6700 FTIR
spectrometer, the instrument can measure materials with nanometer-size
dimensions and purities that often exceed 99.999%. It is used in manufacturing
support labs and in near-line and on-line applications to determine
dopant uniformity in silicon wafers. Because silicon is infrared transparent,
common FTIR applications include thickness measurements on epitaxial
films, MEMS and silicon-on-insulator (SOI) analysis, interstitial oxygen
and substitutional carbon measurement in silicon, and dielectric film
characterization. The ECO/RS provides the same analytical capabilities
as the fab-ready members of the FTIR family, enabling easy transfer
of recipes from the lab to the fab.
ball screws use ceramic rolling elements. By incorporating balls manufactured
from silicon nitride instead of tool steel, the ball screws eliminate
microwelding in the ball nut. The benefits of this construction include
longer lifetime, lower friction, and less lubricant use. In a preloaded
nut, microwelding typically occurs when the lubricant film breaks down
between the balls and thread, resulting in direct metal-to-metal contact.
When the nut moves with respect to the screw, tiny bits of the steel
balls break off and mix with the lubricant in the nut. Over time, the
solid metal chips in the oil or grease adversely affect the lubricant's
ability to function properly, causing adhesive wear and premature failure.
The ball screws are available in a range of sizes.
nanoimprint system for use in next-generation lithography applications,
the Imprio 250 offers sub-50-nm half-pitch resolution, sub-10-nm alignment,
and integrated magnification control. The tool is built around a core
platform using step-and-flash imprint lithography (S-FIL) technology.
It includes fully automated wafer handling for wafers as large as 300
mm and automated template-loading capability. The system has a novel
in-liquid alignment and magnification control system for performing
precision overlay in advanced lithography applications.
Tractrix XP spin track system is a cassette-fed standard mechanical
interface–compliant wafer track system with Windows XP GUI for
recipe creation and system control. For use at 0.25-Ám geometries and
below, the fully automated tool offers precise and repeatable results,
easy substrate size changes, embedded maintenance procedures, and network
connectivity. It has an optional environmental control for temperature,
humidity, and particle and chemical filtration. The small-footprint,
low-maintenance system can be used for full production or R&D applications.
Modules and configurations are available for coat/bake/chill, PEB/chill/develop,
plasma polymer removal, dual-jet high-pressure scrub, and other applications.
lint-free ultraclean 810B SmartWipes offer the same cleanroom-grade
quality and cleaning performance as 810 wipes but cost less because
they are bulk-packaged by machine rather than hand-stacked. The Class
100 polyester wipes offer very low particle generation and soluble extractables.
They are for use in environments that require wipes with good absorbency,
tear resistance, and softness. They clean aggressively but do not scratch
surfaces. The 9 X 9-in. wipes are manufactured from 100% continuous-filament
polyester fiber and have a knit construction.
easy installation and teach-in programming, 941-D ultrasonic sensors
are suitable for applications such as level detection and wafer mapping.
The sensors offer longer scanning distances than inductive technology.
Unlike photoelectric technology, they are not affected by dust, light,
and color. The sensors' nontouch technology makes them more reliable
than electromechanical sensors and more cost-effective than laser technology.
They feature one analog or two switching outputs in a limit switch–style
housing with a five-pin standard M-12 connector. With epoxy heads and
high IP67 sealing, they are for use in many wet processes or difficult
areas and applications that require high chemical resistance.
FTF 1000 system flares the ends of plastic tubing before installation
with PFA fine-thread flare-type fittings. The system flares 1/4, 3/8,
1/2, 3/4, and 1-in. PFA and FEP tubing, increasing the reliability of
plastic fluid systems by reducing potential entrapment areas and ensuring
a leak-tight connection. The tool features a robust patent-pending design,
making it easy to operate with minimal training. In addition, it is
portable and offers better cycle times than other flaring technologies.
By providing consistent, well-shaped flares, it performs better than
cold or hot flaring technology. A 120-V ac model is available for the
U.S. and Japanese markets.
DC power-conversion and control systems offer power performance, repeatability,
and precision in advanced PVD applications. The specialized systems
enable high throughput and process flexibility for demanding generation-7
and -8 flat-panel-display and sub-65-nm semiconductor applications.
They feature high arc management by delivering 12 mJ of energy into
a plasma arc at full power, enhancing yields in new PVD applications.
They deliver up to 50 kW from 300 to 3000 V dc, while interfacing with
an input power range of 380 to 480 V ac. The systems' modular design
eases installation and maintenance, increasing tool uptime and reliability.
In critical reactive processes requiring a high level of arc management,
the Pulsar pulsing capability provides advanced process control.
pad conditioner that is used in chemical mechanical polishing (CMP)
processes, Diamonex Phoenix conditioner is manufactured using a chemical
vapor–deposited diamond film. The film bonds diamond grit to a
silicon or ceramic substrate, resulting in an all-diamond
surface that is inert to corrosive CMP slurries. This molecular diamond-bond
surface avoids the chemical interactions experienced by nickel-plated
and sintered conditioners and also minimizes loose diamond grit, preventing
wafer scratches. Available in a range of sizes, the conditioners have
improved planarity, which increases the amount of diamond that contacts
the pad to be conditioned, thereby improving surface conditioning.
new generation of Fourier transform infrared (FTIR) moisture analyzers,
the V series has been reengineered for more-sensitive detection levels
and increased durability under vacuum. Product enhancements include
new dual ADC electronics for improved signal to noise, a sensitive thermoelectrically
cooled indium arsenide detector, electropolished gas cells that eliminate
sample moisture retention, and low internal power dissipation for durability
under extended vacuum operation. The analyzers provide real-time measurement
of trace moisture in NH3,
and other corrosive matrices. Measurement intervals are typically less
than 1 minute.