following companies and their respective products and technologies
made the final cut for this year's Technology Innovation Showcase
(TIS), which takes place in the Emerging Technologies Hall in the
Moscone Esplanade. The hall also includes the only WiFi hot-spot
lounge at Semicon West.
ATMI's ProE-Vap transports solid CVD precursors
at low temperatures efficiently, reducing the ALD cost of ownership
and promoting high wafer throughput with low tool downtime.
Aviza Technology's Satin is a proprietary low-pressure
chemical vapor deposition process for depositing silicon nitride
at approximately 500°C.
Bede Scientific's BedeScan is a digital
defect-mapping tool for high-speed identification and quantification
of structural defects in semiconductor wafer substrates and epilayers.
Brewer Science's CON-TACT planarized device layers
improve performance and ease of use, while reducing cycle times,
material use, and costs for STI/DRAM, SRAM, ILD/MRAM, waveguides,
and MEMS devices.
Chapman Instruments' MPT1000 is a noncontact
thickness-measuring system for ultrathin (0.1-mm) and bumped wafers
after backgrind. The tool uses a dual-focused laser beam as its
Checkpoint Technologies' InfraScan 200
INV employs scanning laser beams to provide feedback to chip designers
pinpointing where circuits need modification to increase performance,
cutting development time.
Electro Scientific Industries features
the smallest wafer ID/reading system, reducing reader real estate
more than 50% with improved readability of OCR and 2D-ID "supersoft"
Extraction (now part of Mykrolis) offers
LithoScout, the only packaged air- and gas-sampling system for simultaneously
detecting low-level acid, base, and organic contamination. The system
meets all sampling and reporting specifications.
LogicVision's products measure picosecond
jitter, jitter tolerance parameters, and wave shape in
<100 ms/channel, with diagnostic and pass/fail outputs, on almost
Micro Encoder's sensor measures height and orientation
from a silicon wafer or polished surface, or any combination of
position and orientation from a special scale.
MKS Instruments introduces a new toroidal plasma
source for generating ultraclean atomic neutrals (radicals) remotely
from the process chamber for many different on-wafer processes.
Nano Cluster Devices' proprietary self-assembly
technology facilitates the fabrication of transistors, interconnects,
gas and biochemical sensors, read heads, and many other nanowire-based
Nanodynamics' Nano metal powders, used for applications
in interconnects within packages and modules, are 10 nm and larger,
have controlled surface chemistry, and are available as dry powders
NanoGeometry Research's die-to-database geometry
verification tool, the NGR2100, is capable of 2-D CD measurements
in x, y, and curvilinear dimensions that can be used to
perform OPC verification.
Nanometrix has developed a patent-pending
process and the necessary machinery to produce ultrathin 2-D continuous
films, with photoresists and fuel cells as initial market applications.
Nikon Precision's NSR-S609B immersion
lithography system features a 1.07 NA, advanced polarization
control, and a proprietary nozzle design.
nLine's Fathom, featuring direct-to-digital
holography (DDH), uses both intensity and phase of reflected light
to detect defects. Sensitivity in the vertical dimension is not
limited by diffraction, providing an increased signal-to-noise ratio.
OnWafer's PlasmaRx performs plasma-chamber fault
isolation. The system's data-processing capability combines with
the company's mobile wireless SensorWafers to resolve plasma-chamber
Physik Instrumente's Nexline, a high-force,
high-resolution linear piezomotor, features subnanometer resolution,
unlimited travel, and forces to 50 kg. It is nonmagnetic and vacuum
compatible and has a zero-drift autolock mode.
Silicon Genesis's NanoTec is a suite
of technology licenses in layer-transfer and engineered-substrate
technology that includes NanoCleave, NanoBond, NanoSmooth, and NanoStrain
Optics' LaserTrace cavity ring-down analyzer offers multipoint
from 100 ppt to1000 ppm. It is a calibration-free, extremely fast,
sensitive, robust, and transportable system.
University of Toronto Innovations Foundation
showcases a bidirectional microelectrostatic actuator that provides
large stroke displacement, eliminates stiction, and is CMOS compatible
for fabricating RF MEMS products such as tunable capacitors and
Verionix's VX-2100 is a miniaturized gas analyzer
for process control and
fault detection that offers composition data under common process
conditions without differential pumping or sampling.