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Mantis Deposition offers a laboratory service for depositing nanocluster films onto customer samples. Using a special sputtering principle and gas condensation technology, nanoparticles can be produced, mass filtered, and accelerated onto 2 in. diam and larger substrates. Any material that can be dc magnetron sputtered is applicable, including almost any elemental or alloy base material and reactive oxide or nitride compounds. Some examples are copper, titanium, silicon, ruthenium, and various magnetic clusters. A variety of film characteristics and properties can be achieved through consideration of the process parameters. The service enables companies and universities to prove feasibility of concept to further their research or to justify the expense of continuing the work in-house. Info:

Axcelis Technologies will integrate cluster boron source technology on select implant platforms. The technology is a promising method for extending the viability of low-energy implants, especially for the production of advanced ultrashallow-junction and dual poly gate transistor structures. Cluster boron molecules contain 18 boron atoms and deliver the equivalent of an 18-fold increase in beam current at ultralow energy. The technology rivals the productivity of alternative plasma immersion techniques without introducing the process issues typically associated with non-mass-analyzed plasma immersion, such as energy and species contamination, poor angle control, and lack of tilt. The company uses ClusterIon source technology from SemEquip, a manufacturer of ion sources and ion delivery systems. Info: (Semicon West, South Hall, Booth 702)

Matheson Tri-Gas and ATMI offer SDS3, the third-generation Safe Delivery Source subatmospheric storage and delivery system. Using ATMI's monolithic carbon adsorbent, the SDS3 can store and deliver two to three times as much implant dopant gas as the second-generation unit, or the equivalent of 10 to 20 dilute high-pressure gas cylinders. All SDS3 cylinders are specially leak tested with a patented chamber procedure to 1 X 10–8 atm-cc/sec, which is 1000 times lower than typical industry standards. The unit is initially available in JY-size cylinders for arsine, phosphine, and enriched boron trifluoride gas species. Info: or (Semicon West, South Hall, Booth 1526 [Matheson]; South Hall, Booth 2508 [ATMI])

EDAX has received a patent for a method that accounts for the influence of x-ray focusing (XRF) optics on the exciting spectrum in fundamental parameter (FP) quantification. XRF FP quantification uses fundamental atomic parameters and modeling of x-ray excitation, sample interaction, and detection processes to quantify sample composition. The advantage of FP quantification is that it drastically reduces the number of standards required for analysis. Many analyses can be done without using any standards, resulting in substantial time savings. The method allows EDAX's FP quantification software to account for the influence of x-ray focusing optics on the exciting spectrum to improve the accuracy of quantification results for micro-XRF analyses. FP quantification software is a standard package available with the Eagle product line. Info: (Semicon West, North Hall, Booth 6348)

The human interface panel from Micro-Metric is an operator-control product for the company's critical-dimension measurement systems. Providing full machine-status display and operator-control functionality, the unit can be mounted to a support arm or placed on a desk. It consists of two flat-panel touchscreen monitors: a 17-in. unit for displaying the video image and system status windows and a 6.4-in. one for displaying context-sensitive operator-control screen buttons. Features include velocity control joysticks for x-, y-, and z-axis motion, handwheels for positioning control, and a two-button trackball. The system is standard on the company's CD tools. Info: (Semicon West, South Hall, Booth 3044)

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