An automation platform enables multiple plasma process chambers to share a common wafer-transport system. VPX from Surface Technology Systems (STS) is used in pilot production tools that fabricate devices in fuel cells and MEMS automotive sensors. VPX services up to three STS plasma process modules with a single-vacuum 25-wafer cassette, offering a low-cost clustered processing system while maintaining high handling accuracy and wafer-transport integrity. The system uses the Brooks Automation Marathon Express MX400 automation platform. It features the Brooks MAG7 with the FrogLeg arm set and has three process facets to achieve high productivity. For use with 100- to 200-mm wafers, the system offers noncontact optical in-line wafer alignment. Its cassette has wafer-mapping capability. The module has onboard control hardware, OEM deviceNet control communications, a Windows graphical user interface, and a single-point common house facilities hookup. Information: www.stsystems.com.
The Melles Griot Optics Group is making its thin-film coatings capability available to customers that need optical coating services for their own substrates. Utilizing its coating design expertise and multiple coating chambers, including the Leybold SYRUSpro 1100, the company offers rapid development and production of precise thin-film coatings. To expand and optimize its ability to provide high-performance transmissive, reflective, and polarizing multilayer optics coatings, the company is investing in the latest coating equipment, analytical instrumentation, and clean facilities. It continually monitors developments in the laser, fast optics, and DUV areas and designs coatings to meet or exceed the evolving requirements of these markets. Information: www.mellesgriot.com.
Noel Technologies provides photolithography services and blanket resist coatings on wafers from 100 to 300 mm. The latest offering in an extensive list of specialized foundry services, the suite includes a fully integrated and automatic test-wafer recovery program, low-particle thin-film deposition, and particle-measurement capabilities. The company also offers a large inventory of test, monitor, and prime wafers in all standard sizes for low-particle thin-film applications. Information: www.noeltech.com.
Metron Technology has launched a Web site designed to optimize the efficiency of purchasing cleanroom consumables online at competitive prices. Targeting customers in the United States, the Web site, located at www.emetron.com, matches the 24/7 operation of many fabs, enabling customers to take advantage of the company’s cost-competitive catalog of cleanroom supplies, which includes a comprehensive selection of gloves, masks, apparel, and other contamination control products. A personalized, account-specific user interface allows customers to place repeat orders from templates using established product lists. The interface can also be used to check real-time inventory availability and track orders from purchase to delivery. The certified and secure site enables customers to shop using a credit card or an established credit account. Information: www.emetron.com.
Sachem has introduced six new nonaqueous organic hydroxides and salts, significantly extending the company’s Envure strong-organic-base product line. The bases and salts are composed of pure quaternary ammonium molecules with low molecular weights whose organic nature promotes good organic solubility and increased performance. Used by photoresist manufacturers and suppliers of strippers and cleaners, the products have low contaminant levels, making them suitable for demanding high-purity and precision manufacturing applications. The availability of high-purity organic bases and salts in nonaqueous media has opened up new avenues for designers’ chemical products and processes. Information: www.sacheminc.com/electronics/envure.php.
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© 2007 Tom Cheyney
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