Advertiser and

Buyer's Guide
Buyers Guide

Chip Shots blog

Greatest Hits of 2005
Greatest Hits of 2005

Featured Series
Featured Series

Web Sightings

Media Kit

Comments? Suggestions? Send us your feedback.

Back Issues of MICRO magazine

2000 Back Issues | 1999 Back Issues | 1997 Back Issues

November/December 1998 | October 1998 | September 1998 | July/August 1998
June 1998 | May 1998 | April 1998 | March 1998 | February 1998 | January 1998

November/December 1998 - Selected Contents

  • Lead Story: MEMS contamination questions starting to yield some answers
  • Lefty: Art versus science
  • Photo Gallery: Cleanroom on display
  • 'Round the Circuit: Firesafe plastics for fab environments scrutinized; Lucent, Emcore team to develop new thin films; CMP wastewater reclaim system debuts; Balazs Lab installs Atomika metrology tools; ESD standards published
  • Expansions and Acquisitions: Applied buys Consilium in stock swap deal; Park Scientific, TopoMetrix merge, form ThermoMicroscopes; Soitec opens SOI plant; ATMI launches Q4D gas sensor business; Prudential Cleanroom to open world’s largest Class 1 laundry
  • What’s Going On: ISS, SemiPAC, and more
  • Order Desk: M+W to build TSMC fab; Singapore's SMP taps Asyst; Tegal scores repeat buy; Camstar sells WIP software to Intarsia
  • Allstars: The readers choices for products of the year from our Product Technology News section range from tubings and fittings to PVD and inspection tools, CMP systems and slurries to copper control equipment, and more.
  • Our Buyer's Guide is in the process of being updated with 1999 information.
  • Movin’ On: Siemens selects Dave exec vp, COO; Tyson adds CEO title at PRI; Thompson joins Lam's board; Gehman to chair ASTM’s F-1 committee; Jenoptik Infab's Honold honored by SEMI

October 1998 - Selected Contents

  • Lead Story: California R&D program wants state's IC makers at head of class
  • Lefty: Tiny bubbles
  • Obituary: Robert F. Graham, 1929-1998
  • Breakout: International cleanroom standard reaches important stage in global approval process
  • Breakout: Los Alamos, HP develop nontoxic breakthrough for photoresist removal
  • World Beat:
    Asia: Ashland, Union Petrochem build in Taiwan; FSI forms support group; DuPont opens Japanese tech center; BOC provides turnkey help to TSMC; Cymer offers Korean training
    Europe: Rippey opens Dublin plant; Breed debuts Helsinki sensor fab; Philips makes power chips at new fab
  • 300-MM Imperative: NEC to build California fab; Steag tool passes 'marathon'; Eaton implanter in beta; S300 picks tracking supplier; Daw to design advanced fab
  • Expansions and Acquisitions: Zellweger Luwa buys Lepco; Motoman opens support facility; 'green' parts cleaner expands; MST opens new HQ; Aeroquip unit to sell gas delivery components; Ion Systems, Rhetech sign pact
  • Order Desk: U.S. Army lab signs x-ray litho contract; Emcore hits paydirt
  • What’s Going On:
  • 'Round the Circuit: Ball Semi is on a roll; Leica, Applied demonstrate against defects
  • Viewpoint: Assessing future trends in automated defect inspection and yield management
  • Mapping the Roadmap: The series concludes with a look at the challenges facing the industry in the elimination of yield-limiting defects.
  • Process Equipment— Etch: High throughput can be saved without sacrificing particle-free process conditions.
  • Analysis Metrology—Yield Management: Taking a systematic approach to yield enhancement reduced defect density and raised monthly learning rates at Tower Semi.
  • Process Equipment—Tool Packaging: Developing clean-film specifications that include outgassing hydrocarbons and leachable ion species can facilitate the selection of contamination-free packaging.
  • Products: Nitrogen-purged microenvironment, CMP slurry delivery system, metrology tool, photochemical filter, 193-nm stepper, wafer test systems, ultrasonic cleaning equipment, chemical air filter, wafer-handling system, minienvironment filter modules, mass spec, recirculator, and more
  • Pick of the Literature: Guides, brochures, catalogs, and more
  • Product Extra!: Module enables chipmakers to form transistor junctions needed for faster device designs; software allows rapid access to best possible images of defects; add-on increases implanter throughput; connector eliminates mistaken hookups in chem delivery; metrology stage permits users to measure parts on microscopes, download data for analysis; same-day sensor service offered
  • Semicon Southwest: Exhibitors and selected events from the conference programs and a product spotlight of exhibiting companies.
  • Movin’ On: Varian’s Ginzton dies at 82; Genmark names Genov president, CEO; Oxsen takes reins at Oliver

September 1998 - Selected Contents

  • Lead Story: Life during downturn: some take lemons, make lemonade
  • Semicon West: Seasonal Food Chain Update
  • Lefty: The big picture
  • Breakout: Industry, government launch 'ambitious' university-based chip R&D program
  • DISKCON '98: Contamination standards meeting, cleanroom courses are on tap; 450 exhibitors expected
  • World Beat:
    Asia: MKS opens tech, sales office in Singapore; Ametek picks two distributors
    Europe: Ireland seeks U.S. high-tech partners; ion beam firm to double capacity
  • On Display: USDC to test dry cleaning process; Motorola is first to use new coating system; MicroDisplay picks Filmetrics measurement tool
  • Expansions and Acquisitions: Olin, Matheson offer combined services; AlliedSignal, Air Products unit sign chemicals pact; Canon U.S.A. to build new HQ in San Jose; Heuristic sells divisions to focus on yield business
  • Order Desk: Japanese chipmaker buys Tegal etch tools; Applied Materials picks Aera's MFCs; SubMicron Systems sells etch strippers; Sematech installs AST wafer surface monitor; FSI receives approximately $2.4 million for slurry blending systems
  • 'Round the Circuit: IBM licenses copper technology to Novellus; OnTrak introduces copper CMP cleaning tool; 3M's FTIR methods aiding effort to reduce greenhouse gas emissions
  • What’s Going On: Diskcon '98, Semicon Southwest, and more
  • Surface Chemistries: Using a combination of standard and custom methods, the amount and composition of organic components in high-purity hydrogen peroxide samples from four different chemical suppliers were examined
  • Ultrapure Materials— Gas Delivery: Stainless steel that had been passivated using a proprietary process exhibited better surface chemistry and moisture desorption characteristics in comparison to standard electropolished stainless steel
  • Cleanroom/Facilities Technologies: As case studies show, continuous contamination monitoring can deal with a variety of factorywide sampling and measurement needs in a cost-effective way
  • Products: 300-mm wafer robots, 300-mm ion implanters, vacuum pump, copper control system, air valves, liquid carbon dioxide cleaner, pod door opener, 300-mm wafer stage, CMP particle size analyzer, pure water monitor, spectrometer, fan filter system, white sheet material, post-CMP cleaner, TOC analyzer, and more
  • Product Extra: Strippers/cleaners are formulated for use with low-K dielectric materials; software minimizes variations in process wafers, detects early tool and process problems; stepper upgrades ensure high throughput, facilitate maintenance; calibration standards developed for gas cylinder program; international service center provides technicians for pump inspection, repair; system delivers bulk high-purity carbon dioxide to the point of use; computer program integrates thin-film measurement tool software and advanced film stack analysis; software improves measurement success rates on CMP layers and STI processes
  • Movin’ On: Gualandris hired to lead Semitool; Epsztein to head Vanguard; Novellus elects Lucent's Spivey to board; Sun joins SensArray

Return to the top of this page

July/August 1998 - Selected Contents

  • Lead Story: Vendors waste no time responding to need for post-CMP treatment
  • Lefty: Let's get rolling
  • Breakout: Novellus debuts integrated copper system, signs strategic alliances with Lam, IPEC
  • 300-mm Imperative: Selete evaluates Varian implanter; two fabs qualify Steag RTP tool; GaSonics opens applications lab
  • ’Round the Circuit: Rockwell fab workers call strike; industry veteran dies; University of Arizona researchers earn ESH award
  • Expansions and Acquisitions: FSI lab focuses on contaminants; Hiden launches SJ office; Ion Systems, Novx form charge-monitor alliance; Fluoroware opens Class 100 fab for disk shippers; Dover completes facility expansion
  • World Beat:
    Asia: Intel plans to build $50-million research center in Beijing; Applied opens Singapore training center; PRI grows in Korea; Spectra launches Japan division; Rudolph Technologies expands
    Europe: SGS gets a new name
  • Order Desk: Two Korean companies buy VG tool; Eaton sells RTP; Samsung, Air Products sign pact
  • What’s Going On
  • Photo Gallery: Freshly planted
  • Viewpoint: Tool suppliers need IC makers to help make the “Year 2000 Problem” a top priority
  • Products: Defect review SEM, RTP system, automated inspection system, chemical disconnect couplings, bulk facility valve, polymer removers, TOC analyzer, deep-UV reticle inspection system, 300-mm wafer inspection system, ozone control system, diaphragm valve, digital MFCs, and more
  • Product Extra: Automated module enables time-saving decision-making; videoconferencing links fab customers, support offices; bonding process reduces container liner failure; ion-beam scan controller increases die yields
  • Pick of the Literature: Brochures, application notes, and more
  • Movin’ On: Wright leads NuPure unit; Lam taps Bright, Bayly, Hemker; MRC grabs Cross from HP

Return to the top of this page

June 1998 - Selected Contents

  • Lead Story: Chip industry is still bemoaning its stroll down memory lane
  • Lefty: Conventional wisdom
  • Breakout: PackLithography start-up signs pact to develop postoptical steppers
  • 300-mm Imperative: Semiconductor 300 buys tools from Applied, Jenoptik Infab; SVG demonstrates successful doping process; ASML plans to install stepper at Samsung fab
  • World Beat:
    Europe: Johnson Matthey touts plant upgrade; FSI completes expansion; STS receives plasma etch honor
    Middle East:GaSonics opens Israeli center
    Asia:Motorola, Nanjing University launch research program; DuPont invests in Singapore plant; Lam, Yokogawa team up
  • Tech Transfer: SEMI/Sematech members, Sandia National Labs benefit from umbrella agreement
  • Expansions and Acquisitions: Genus sells implantation line to Varian; CMP Tech becomes Lucid Treatment Systems; Asyst buys WIP-tracking technology from Fluoroware; YieldUP, Steag ink pact; Parker Hannifin consolidates units; Cintas Cleanroom opens Class 1 laundry
  • Photo Gallery: Taking the initiative
  • Order Desk: Therma-Wave contract marks Newport's largest sale; SpeedFam tallies sales; Daw Technologies strikes deal with major chipmaker; AG receives repeat orders; Micron Laser ships systems
  • ’Round the Circuit: GaSonics customer service gets kudos; Realtime exits semi market; IMEC, Mattson partner; IEST seeks papers
  • What’s Going On: Semicon West, Diskcon '98, and more
  • Viewpoint: Automated defect inspection: Facing the challenges of decreasing critical dimensions, new processes, high aspect ratios
  • Products: PVD tool, laser annealing system, wafer transfer systems, UHP pressure transducer, heated vacuum valve, FIB/SEM workstation, air composition monitor, metrology system, wafer temperature measurement, wetted wipers, thin-film analysis tool, 300-mm RTP, flow sensor, ionizing gun, mask aligner, cleanroom garments, gas cabinet, and more
  • Product Extra: System creates automated dry-in/dry out CMP process; film frame shipper provides secure transport; electronic service manual and customer support system offers CD-ROM, real-time access; end-effector uses robot centering and gripping to provide diagnostic feedback
  • Pick of the Literature: Guides, brochures, catalogs, and more
  • Movin’ On: Nakayama, Matsuno lead Yaskawa; Eaton promotes Simonton, Erokhin, Wilson; Bolick joins AlliedSignal; Gen Chem grabs Mori

Return to the top of this page

May 1998 - Selected Contents

  • Lead Story: Study finds human factor is key to best fabs' productivity
  • Lefty: A sound investment
  • ’Round the Circuit: Asian crisis may spur CMP market slowdown; Irish Cleanroom Society provides support, forum; tool permits sputtering process observation; SIA report features expanded coverage of semiconductor industry issues
  • Breakout: Packed disk drive contamination meeting highlights cleaning, corrosion concerns
  • World Beat:
    Europe: Jenoptik acquires majority stake in CIMple; Extraction Systems chooses Metron for sales, service
    Asia: Anam, Amkor set technology pact with TI
  • 300-mm Imperative: CFM, Novellus provide tools for Siemens fab; Fluoroware sells wafer shipper
  • Expansions and Acquisitions: DuPont, Hyundai close photomask deal; Talon moves to new facility; Amray becomes KLA-Tencor division
  • Order Desk: SGS-Thomson, Align-Rite buy Applied tools; YieldUP, Oliver Design ink OEM agreement; Commonwealth Scientific sells deposition systems; ProMOS Technologies, Samsung to install Therma-Wave thin-film measurement units; GaSonics grows in foundry market
  • What’s Going On: IITC, SEMI CIS Executive Mission and Exhibit, Vacuum & Semiconductor Processing Conference, and more
  • Products: Wafer inspection system, i-line step-and-scan tool, 300-mm wafer dryer, electrostatic plasma probe, parametric tester, motorized microscope stage, weld heads, 300-mm wafer cleaners, cleanroom lighting, digital microscope, vacuum controller, and more
  • Product Extra: Slurry mixing tool eliminates contamination, air infiltration, and other problems; etch system offers short clean time, low COO, and more; cleaning method reduces ionic levels in cleanroom tape; ion, liquid chromatography techniques monitor copper baths, analyze contaminants; tantalum-silicide targets are effective barriers to copper interconnects; study indicates reference wafers should be cleaned before use
  • Pick of the Literature: Catalogs, guides, data sheets, and more
  • Movin’ On: Novellus taps Matsumoto; Chuang joins KLA-Tencor; Lessen leads Polymer Design; Ion Systems promotes McCracken

Return to the top of this page

April 1998 - Selected Contents

  • Lead Story: Applied takes wraps off its first wafer defect detection tools
  • Lefty: Holy fog bank, Batman!
  • Breakout: Lam takes CMP plunge with dry-in/out tool
  • World Beat:
    Asia: Cabot to build slurry plant in Japan; Fluoroware buys business from distributor; Camstar, Malaysian firm ink software deal
    Europe: Flemish government, Meissner+Wurst develop fab lease plan
  • 300-mm Imperative: Intel begins building its first 12-in. fab; SpeedFam delivers polisher to MEMC; Applied tool goes to Dresden
  • Photo Gallery: Quite a development
  • Expansions and Acquisitions: Veeco to buy Digital Instruments; Varian plans $25M facility expansion; NOW to become ATMI subsidiary; Koch plants grow globally
  • Order Desk: National Semiconductor buys MEGA slurry tools; KLA-Tencor sells SEMs to TI; Novellus picks Asyst SMIFs
  • ’Round the Circuit: ESCA touts off-site parts cleaning; robot revenues climb; AVS, SPIE call for papers; SEMI hosts CIS exec exchange
  • What’s Going On: IEST/ICCCS, Cleanroom Technology Expo, SID '98, and more
  • ANALYSIS & METROLOGY: Using SSA to measure the efficacy of automated defect data gathering
  • GREEN & CLEAN: Examining purification and certification strategies for high-purity C2F6 process gas
  • SURFACE CHEMISTRIES: Evaluating the performance of polysulfone membrane filters in SC-1 chemistries
  • Products: Surface analysis tool, weld purge monitor, gas analyzers, excimer-laser stepper, pallet storage buildings, pipe fitting, 300-mm wafer grinder, airflow fogger, spectroscopic reflectometer, desiccant dehumidifier, LCD bake/fill module, cleanroom ceiling grid, double-block valve, disc manufacturing systems, process monitoring wafers, abrasive flow machining system, sputter sources, 300-mm SOI wafer, thermoplastic piping system, and gas monitor
  • Pick of the Literature: Brochures, catalogs, data sheets, and technical description manuals
  • Product Extra: CD-ROM stepper documentation eliminates cleanroom paper, reduces downtime; transport module control software supports cluster tools; equipment monitoring, advanced fault detection software expands etch systems' capabilities; Web site helps chem buyers strike deals on overstocked inventory
  • Movin’ On: Moore takes TopoMetrix reins; British consulate-general taps Elder; Kovar joins EKC; Lien leaves Applied for YieldUP; Fluoroware promotes Villas

Return to the top of this page

March 1998 - Selected Contents

  • Lead Story: Sematech Watch: Innovative energy study designed to trim fab costs, maintain yields
  • Lefty: In its wake
  • Lead Story Sidebar: Sematech expands scope of global 300-mm effort
  • Breakout: USDC displays signs of success despite small market share, say supporters
  • Whither Korea?: One crisis, four scenarios
  • World Beat:
    Asia: Moto plans $15M Taiwan expansion; Chartered, Lucent sign $1B fab pact; Canon wins MITI award; Samsung taps Applied, again; Ultratech opens new Japan office; General Chemical, Dynamic ink deal
    Europe: PVS Chemicals buys Belgian plant; Metron opens cleanroom laundry
  • ’Round the Circuit: Mitsubishi shutters North Carolina fab; SBA lauds Emcore; Hydraulic Institute seeks standards help; Cleanroom Tech Expo debuts in Frankfurt; Handbook of Semiconductor Interconnection Technology published
  • 300-mm Imperative: IBM builds advanced chip research plant; Ferrofluidics withdraws from MEMC competition; Selete installs Applied RTP tool
  • Expansions and Acquisitions: Comdisco buys ISI surplus tools; Raytheon sells chip biz to Fairchild; Tyecin, Promis combine fab software; Cintas, Eastwater close garment deal; SVG lab adds cluster capability; AZ becomes division of Clariant
  • Photo Gallery: On the beam
  • What’s Going On: MRS, SVC, IEST/ICCCS, and more
  • Order Desk: FSI nabs first Asian client for Polaris; Hitachi buys RTPs from AG
  • MAPPING THE ROADMAP: Second installment of exclusive article series looks at the methods, impacts, issues, and challenges involved in creating yield models and defect budgets.
  • CLEANROOM/FACILITIES TECHNOLOGIES: A cleanroom particle-profile study showed that while head gear eliminated particles down to 0.1 µm, masks actually contributed contamination.
  • MEMS TECHNOLOGY: Using modeling and DOE, a yield enhancement team has identified a process control metric that can be used to predict product yield.
  • WAFER-HANDLING—MANAGEMENT STRATEGIES: Ergonomics, standards, automation architecture, and COO are critical issues in the development of 300-mm wafer-handling systems.
  • Semicon Europa: The show section includes a directory of exhibitors and technical program events.
  • Products: CMP retaining ring carrier, wafer-transfer tool, CMP slurry analyzer, getter pump flange, ionization bar, reflection metrology tool, etch system, liquid particle sensor, thin-film metrology tool, MFCs, and more
  • Product Extra: Microwave stripper option for metal etch system expands process capabilities; software evaluates AFM tips; ion implanter accelerators' warranties extended; production instrument measures alpha contamination levels; configurable solutions for automating semiconductor tools offered; round-the-clock process, analytical component tech support available
  • Movin’ On: Dickson named president of Lucent; Beacham leads Gel-Pak; FSI taps Sloan, Sand, and Elftmann

Return to the top of this page

February 1998 - Selected Contents

  • Lead Story: ISS '98: Asian economic woes cloud chip industry forecast for '98
  • Lefty: Downshift
  • Breakout: Drive industry heads for showdown with microcontamination nemesis
  • 300-mm Imperative: Motorola, Siemens unveil Semiconductor 300 venture; Canon DUV tool accepted by I300I; Fluoroware cleaning system loaned to I300I; first complete 300-mm SOI wafers produced
  • World Beat:
    Asia: Anam Semi foundry takes orders; DPI, UMC form Taiwan mask venture; Tosoh SMD enters Taiwan market; Equipe arms Japanese chipmaker; Korean Industrial Gases plant opens; Asyst sets up Japan shop
    Europe: Irish IC center debuts
  • Expansions and Acquisitions: Eaton to build minifab; Mallinckrodt Baker, Samsung to erect Texas chem facility; Millipore to move gas HQ to Dallas; Ion Systems, Hamamatsu team up on photon ionization; Air Products to buy Solkatronic
  • ’Round the Circuit: Strong slurry sales forecast; chemistry grant offered; Applied unveils copper deposition tool; new SIA roadmap published
  • Order Desk: SpeedFam sells CMP systems to Samsung; Hyundai buys Genus tool; MEGA dispenses NEC order; White Oak Semi grows vendor list
  • What’s Going On: SPWCC, Semicon Europa, IEST/ICCCS, Cleanroom Tech Expo, and more
  • Products: 300-mm wafer carrier, stainless-steel tubing, laser scanning microscope, 300-mm analytical tool, piping system, sputterer, TOC analyzer, plasma cleaner, gas valves, UPW system, data collection system, diaphragm valve, illuminator, O-ring-free union, wafer inspection system, inorganics scrubber, pulse modulators, flowmeters, oxygen transmitter, resistivity meter, and more
  • Product Extra: Ductless fume enclosure redesigned; gas jungle, vacuum services offered; precision cleaning solvents available; technical support phone line opens; gauge controllers feature unit-measure displays, modified switches; digital output protocol added to liquid analyzer
  • Pick of the Literature: Catalogs, application notes, brochures, and more
  • Movin’ On:Fisher heads BOC Gases unit; Lipisko leaves General for Olin; Parodi takes over Tegal reins; Campbell joins Lam; Weiner assumes R&D duties at Pall; Equipe hires Tucker, Ugai; MKS appoints Kurzweg; Laursen joins SpeedFam

Return to the top of this page

January 1998 - Selected Contents

  • Lead Story: New fab training program is a virtual paradigm shift
  • Lefty: Positively Wall Street
  • Breakout: Ohmi: Rapid ramp-ups, 100% recycling, ‘dry-in/out’ CMP tools are 2001 needs
  • Photo Gallery: Samsung Boulevard
  • On Display: Display Works 98: Execs to talk business; English translations of Japanese FPD reports debut
  • Web Sightings: The newest industry sites on the Web
  • World Beat:
    Asia: Winbond to lease tools; Fujitsu is ‘mini’ pioneer; Venture begins gas production; Applied scores again
    Europe: Facilities firms to merge
  • Order Desk: Promis, Moto sign $7.5M pact; Tegal takes etch orders; Eaton implants White Oak; Moto gives Olin control; CFM makes Korean sale; SMIF goes to Wales
  • ISO Update: The latest ISO 9000-series certifications
  • ’Round the Circuit: CE compliance has a price; sensor standards benefit tools; ISSM ’98 seeks papers; MRS moves HQ
  • Expansions and Acquisitions: Moto’s mask unit to be sold; Deal extends robot reach; BOC forms new unit; Korean firm opens U.S. biz; Gresham set as mask site; Vendor licenses mask method; OnTrak opens training facility
  • What’s Going On: SPIE Microlithography, SPWCC, Semicon Europa, and more
  • Products: Reticle inspection equipment, spray cleaner, HEPA filter, 300-mm metrology system, chemical ampules, defect-review tool, wafer-temperature measurement, air velocity analyzer, and more
  • Product Extra: Low-temperature stripping capabilities enhance system; UHP dopant sources provide consistent process results, and more
  • Pick of the Literature: Data sheets, brochures, catalogs, and more
  • Movin’ On: Kammer to lead NIST; Fairchild promotes Ward; Veeco corrals Corlew; ESD Association honors Weidendorf; Trabor tabs McCook; Comdisco chooses Jenks

Return to the top of this page

MicroHome | Search | Current Issue | MicroArchives
Buyers Guide | Media Kit

Questions/comments about MICRO Magazine? E-mail us at

© 2007 Tom Cheyney
All rights reserved.