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Back Issues of MICRO magazine

2000 Back Issues | 1999 Back Issues | 1998 Back Issues | 1997 Back Issues

January 2001 | February 2001 | March 2001

April 2001 | May 2001 | June 2001 | July/August 2001

September 2001 | October 2001 | November/December 2001



January 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: Wider 'Net-based tool diagnosis is becoming a remote possibility
  • Lefty: Check this out
  • Breakout: Applied enters yet another market segment with introduction of Swift implantation tool
  • Breakout II: New head of silicon house foresees 5­19% rise in wafer reclaim prices
  • Expansions and Acquisitions: IBM drops $5B bombshell; Pentagon opens parts cleaning plant; Cymer acquires ACX; Yield Dynamics moves to larger headquarters; NuTool enlarges facility
  • 300-mm Imperative: Trecenti makes 300-mm chips; Motorola, Applied prove ability of 300-mm copper equipment set; Hyundai may keep Wales fab; Chartered weighs 300-mm option; Nanya to break ground on fab
  • Photo Gallery Materially integrated
  • World Beat:
    Asia: China to build countryàs largest wafer plant; Ashland expands chem plant; American-Japanese joint venture opens organometallic chemicals plant near Tokyo
    Middle East:
    Israel gives Tower grant for new fab
    Europe:
    ASM to start up new assembly and test facility to double production of 300-mm vertical furnaces
  • Semiconductor History This Nobel does mean Jack
  • What’s Going On: Semicon Korea, SPIE Microlithography, and more
  • 'Round the Circuit: ACM Research claims copper gains; IBM, Infineon, UMC make 0.13-µm chips; cleanroom market to grow by 2005; chipmaking book covers all

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Thermal desorber, plasma workstation, ground-quality monitor, aluminum sputtering target, ion implanter, UHP gas purifier, reticle inspection tool, deep-UV microscope, pressure control/flow monitors, PVD system, wafer sorter, topology analysis system, universal mass spectrometers, IPA drying system, IR gas monitor, dry photoresist stripper, ion gauge controller, cleanroom ceiling grid, water vapor pumps, postetch-residue remover, and more
  • Product Extra!

February 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: Roadmap committee steers chipmakers onto faster route with ITRS update
  • Lefty: Paper view
  • Breakout: U.S. labor survey gives chipmakers high safety marks; critic doubts study’s validity
  • World Beat:
    Africa: Pelchem doubles production of octafluorocyclobutane
    Asia: Applied backs Taiwan R&D fund; Silterra touts fast ramp-up; Teamasia to build fab in Hyderabad
    Europe: Ion Systems moves Euro HQ; Eindhoven University receives software from Philips, Wright Williams & Kelly
  • What’s Going On: Semicon China, Semiconductor Safety Association conference, and more
  • 300-mm Imperative: TSMC delivers first wafers; Dainippon builds tool plant
  • On Display: SID adds two chapters; Delta Optoelectronics and Dow Chemical create more-readable screen
  • 'Round the Circuit: Air Products buys stake in parts start-up; NIST ends ATP deadlines; Sematech integrates Dow’s spin-on dielectric; Ashland, Dainippon Screen launch cleaning partnership; General Chemical raises prices; Sematech to use Microscan litho system for optical technology; STMicroelectronics’ CEO receives honor
  • Expansions and Acquisitions: Air Products up SiF4 capacity;
    Johnson Matthey establishes gas process unit; Asyst to buy toolmakers; Newport, Kensington to merge; Daifuku merges units; 3M picks Semitorr as rep; Olympus opens optics office
  • SPIE Microlithography 2001: Special section features annual symposium’s emphasis on overlay,SEM, and CD control topics

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Lithography tool, compact IC unit, arsine permeation tubes, vacuum inlet trap, ultrapure regulator, gas cell, sensor fitting, arc welder, oxygen-deficiency detector, level switch, high-purity hose assemblies, digital pressure gauges, wafer-analysis software, antistatic tape, pressure transducers, modular cleanroom, shoe cleaner, leak detectors, 200-, 300-mm etch tools, control ball valve, defect data–analysis software
  • Product Extra!

March 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: New devices, materials compound ESH concerns for chip industry
  • Lefty: Function at the junction
  • Breakout: IMEC-Numerical Technologies team to focus research efforts on phase-shift advancements
  • ASMC 2001: Tool use, yield control, factory dynamics share stage at European debut of annual conference
  • Expansions and Acquisitions: Encore triples capacity; Entegris intends to buy Nisso Engineering fluid-handling products; Advanced Energy acquires Engineering Measurements; X-Fab Texas forms alliance with MKS
  • Market Stats: No market barriers
  • World Beat:
    Europe: Intel delays Irish fab; Communicant Semiconductor Technologies to build German foundry
    Middle East: Israel funds Intel fab
  • 300-mm Imperative: Virginia to help fund Infineon; Singapore takes stake in UMC fab; Chartered to delay 300-mm pilot production at Fab 7
  • What’s Going On: Semiconductor Safety Association conference, Semicon Europa, and more
  • 'Round the Circuit: DuPont, Air Products to manufacture colloidal silica-based slurries; Nikon springs into CMP; Sandia National Lab, Microcosm Technologies to speed MEMS development; California NanoSystems Institute receives money from state for nanotechnology research
TECHNICAL VIEWPOINT
  • Trace data; Yesterday's news or key to vastly superior equipment performance?

TECHNICAL ARTICLES

  • Best of ASMC Investigating and eliminating sphere defects in T1 and T2 technologies
  • Extreme Silicon Investigating the formation of time-dependent haze on stored wafers
  • 300-mm Imperative Characterizing FOUPs and evaluating their ability to prevent wafer contamination
  • Green and Clean Using a catalytic technique to abate PFC emissions in a 300-mm etch tool
  • Process Tool Support Increasing PVD tool uptime and particle control with twin-wire-arc spray coatings

FACILITY REPORT

PRODUCT TECHNOLOGY NEWS

  • Products: Spin processor, thin, film-on-quartz heater, metal etch trap, deep-UV laser ablation system, specialty-gas heating system, 300-mm wafer-handling system, deep-UV spectrophotometer, fabwide monitoring system, electroplaing monitor, corrisive-liquid flow sensors, defect inspection tool, metal-sealed flange, ultrasonic sensors, heated chucks
  • Product Extra!

SEMICON EUROPA 2001


April 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: Intel sees the light, unveils chip
    industry’s first EUV photomask
  • Lefty: Fan club
  • Breakout: Bad vibes: Taiwan train route derails Winbond’s plans for 300-mm fab site
  • BreakoutII: Suppliers claim breakthroughs in
    dielectric materials, copper CMP, and copper metrology
  • Photo Gallery: Belt tightening
  • World Beat:
    Asia: International partners launch
    Allegro; Japanese team to develop 70-nm technology; Transcom enters the GaAs market; Silterra hits 0.22-µm target; ON plans China expansion
    Europe: Knights yields software license; International Products moves headquarters|
  • 300-mm Imperative: TEL to use Brooks’ pod; Mattson banks big orders; SemiTest ships analyzer; UMC buys Applied CVD tool
  • Supply Chain Update: Report predicts e-business benefits;
    Applied’s on-line service debuts
  • Expansions and Aquisitions: Corning to buy Tropel; Rodel signs Asian slurry deal; Extraction focuseson contamination; Mattson to sell CVD unit; Ibis, MEMC form wafer team; TEL buys software vendor
  • Whats going on: Clean Tech 2001, SPIE Microelectronic and MEMS Symposium, and more
  • Round the Circuit: Axcelis touts implant advance; NIST develops optics device; University of Arkansas gets WWK software; Atomika installs SIMS system at SiGe foundry; ICE service tracks chip trends; CFM book published; ESD book revised

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Simulation tool set, high-flow turbopump, noncorrosive gears, overlay metrology tool, motorized impeller, cast platen heaters, polypropylene filter cartridge, oxygen analyzers, slurry monitoring system, specialty-gas analysis, industrial microscope, water purification system, differential pressure controller, copper slurries, CMP pad conditioners, linear positioning stages, thermoplastic material, LCD array test system, noncontact measuring system
  • Product Extra!

May 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: Fabless industry segment remains upbeat despite downbeat news
  • Lefty: Holy moley!
  • Breakout: Sandia teams with business incubator to commercialize advanced MEMs technologies
  • Photo Gallery Mass appeal
  • World Beat:
    Asia: Japan chem venture launched; Ashland opens Taiwan shop; Water heater pact signed; Varian sales go Kuching; Opto opts for Tegal etchers
    Europe: LETI readies annual review
  • 300-mm Intel claims 0.13-µm first; FOUP sales set record; Genus sells first ALD tool
  • Expansions and Acquisitions: Seiko Epson inks SOI pact; Partners offer software; Ibis ups wafer capacity; Brooks buys SEMY; Lambda opens service center; Semtech exiting foundry biz; Chem vendors expands to Asia
  • What’s Going On: SCP Global Technology, SPIE's Symposium on Microelectronic and MEMS Technologies, Semicon Southwest, and more
  • 'Round the Circuit: DI/Veeco joins nano institute; PRI announces layoffs; ESD group awards grants; Revised deposition book out

 

TECHNICAL ARTICLES
  • Best of AMSC Improving the etch process as part of an overall plan to increase fab productivity
  • Facilities Technologies Testing liquid-handling system components to ensure purity and reliability
  • Ultrapure Gas Characterizing an electrochemical oxygen sensor for process gas monitoring applications

PRODUCT TECHNOLOGY NEWS

  • Products: Cleanroom roll-up door, liquid-level sensors, wipers, 300-mm etch tools, temperature/humidity data logger, hollow-fiber membrane, UV-intensity calibration unit, manual wafer tweezers, contamination control mat, particle size and shape analyzer, filtration system, ESD display tower, process analyzers, chemical filtration material
  • Product Extra!

June 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: New Sematech head is well suited for pocket protector and pinstripes
  • Lefty: Hubba2
  • Breakout: University at Albany boosts nanotech programs with new school, more funding
  • Breakout: Intel taps wafer-processing expertise to
    target growing MEMS market
  • 300-mm SEZ to assess cleaning tool; Air Liquide installs distribution systems at TI fab; Soitec picks ASM furnaces
  • On Display Three-five expands pact with Mitsui; Toshiba, Matsushita Electric to build world's largest
    LCD plant
  • World Beat:
    Asia: Sumitomo, Mitsubishi combine silicon wafer operations; SMIC buys Axcelis tools; Boxer Cross partners with AP Tech, Hermes-Epitek
    Middle East: Tower starts new fab
    Europe: Ashland inaugurates European resist stripper production; Applied makes on-line support program available to Europeans; Austria Mikro Systeme selects Brooks Automation equipment
  • Expansions and Acquisitions: Seiko Epson inks SOI pact; Partners offer software; Ibis ups wafer capacity; Brooks buys SEMY; Lambda opens service center; Semtech exiting foundry biz; Chem vendors expands to Asia
  • 'Round the Circuit: DI/Veeco joins nano institute; PRI announces layoffs; ESD group awards grants; Revised deposition book out
  • What’s Going On: SCP Global Technology, SPIE's Symposium on Microelectronic and MEMS Technologies, Semicon Southwest, and more

 

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Surface-conditioning systems, miniweld/face-seal fittings, 300-mm wafer carrier, 300-mm sorters, laser spectroscopic ellipsometer, multichambered cluster tool, vapor-sublimation trap, plasma etching tool, dissolved-ozone sensor, photomask pattern generator, vibration isolation legs, single-wafer cleaner, 200-mm wafer prober, airborne-contaminant monitor, antireflective coatings, bare/filmed wafer inspection
  • Product Extra! Vendor offers manual open-cassette adapter; distributor establishes spare-parts logistics center; supplier provides 300-mm manual loading tray; partners develop integrated management solution for photochemical dispense; gas firm offers on-line technical newsletter; motion-control vendor provides Web site; vendor publishes thermal management guide

July/August 2001
Selected Contents

EDITOR’S PAGE

INDUSTRY NEWS

  • Lead Story: X architecture marks the spot for good yields, supporters say
  • Lefty: Frequent flyer
  • Breakout: Downturn? What downturn? Chipmakers, vendors move forward with 300-mm plans
  • Breakout: International Sematech picks experts to oversee key work of lithography division
  • Breakout: Merger of North American associations will enable vendors to speak as one
  • World Beat:
    Europe: Innolite interests ASML, Canon, Nikon in EUV light source; DuPont Photomasks closes doors in Scotland
    Middle East: Tower buys PRI Automation, Axcelis tools; Applied to buy Oramir
    Asia: Applied opens facility in Taiwan, plans regional headquarters in Singapore; SEZ takes full control of its Japanese subsidiary; Rasa Industries to distribute Thomas West CMP products; Sony, Toshiba launch LSI project; SensArray opens branch in Taiwan
  • 'Round the Circuit: SIA adds schools to R & D effort; Intel to use Numerical Technologies' phase-shifting technology; International Sematech selects interconnect director; Shipley enters low-k market; Shimadzu Scientific Instruments begins tool grants
  • Expansions and Acquisitions: ITW to buy Texwipe; Asyst purchases GW Associates; Global Dispense debuts; Air Products breaks ground on WF6 plant; Ashland purchases Alternative Engineering Resources; Electroglas, WWK partner on tool monitoring; industry vets launch Excelerate
  • Photo Gallery: Lessons in logic
  • Whatās Going On: Diskcon, Semicon Southwest, and more
TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Metrology unit, nanoindentation tester, CMP unit, planetary gear head, wafer marker, filtering unit, DUV scanner, VOC abatement unit, carbon wafers, ball bearings, oxygen analyzer, elastomer seals, pressure controller, vacuum pumps, insertion level switch, rapid thermal processor, vacuum gauge, water analyzer, temperature probe, air shower, gas-delivery cylinder, microfilters, cleanroom duct
  • Product Extra! Manufacturer offers process fab automation info on-line; software designer updates wafer analysis metrology software; vendor provides application notes and info sheets on CMP tester; supplier markets subsystems with single-, dual-arm 200- and 300-mm wafer-handling robot

September 2001
Selected Contents

EDITORāS PAGE

INDUSTRY NEWS
  • Lead Story: Integrated metrology beginning to measure up to expectations
  • Lefty: Connect the dots
  • Breakout: Sematech aims spotlight at breakthrough technology for spotting litho projection lens aberrations
  • Breakout: Three tool firms target ultrashallow junctions in San Jose submicron technology center
  • Business/Technology Summary: A pretty penny
  • World Beat:
    Europe: Lab signs metrology pact; laser vendor opens plant; Qualiflow buys Lintec stake
    Asia: TEL likes KDF's PVD tools; SMIC buys SMIF systems; display firm using Trikon tools
  • 'Round the Circuit: NIST/Dow Corning claim dielectric leap; Sony to make more chips; Axcelis, SEZ study cleaning; SEMI unit names leader; MRS publishes new front-end book
  • Expansions and Acquisitions: DuPont Photomasks and Micron Technology to build photomask plant; FlexICs starts up pilot fab to make ICs on plastic; Pentagon Technologies to open fourth parts-cleaning facility; Air Liquide opens analytical lab; Symphony Systems to integrate Aspen Technology optimization system; DuPont Air Products NanoMaterials expands Welsh slurry facility; KLA-Tencor debuts e-beam demo center; BOC Coating buys Intellemetrics; Kajima Overseas Asia to build UMCi fab in Singapore
  • Photo Gallery: Don't look down
  • Whatās Going On: AEC/APC symposium, Photonics Boston, and more

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Lithography laser, contour/roughness analysis, metrology tool, servo transfer unit, CD metrology system, moisture analyzer, plasma PFC-abatement unit, cavitation metrology tool, multihead swaging unit, automated cross-sectioning, moisture and oxygen analyzer, pressure transmitter, metrology station, cleanroom bucket, defect classification software, megasonic cleaner, epi measurement, vacuum pump, structural diagnostic tool, miniature valves, photo-acid generators, moisture analyzer, FOUP loadport, yield management software
  • Product Extra! Toolmaker introduces optimized productivity services; vendor upgrades volume-production mask-patterning systems; manufacturer offers Web site on materials integrity management products and services; chemical supplier implements technology for exchanging electronic business documents

October 2001
Selected Contents

EDITOR’S PAGE
INDUSTRY NEWS
  • Lead Story: Holy Grail! Motorola claims high-yield GaAs breakthrough
  • Lefty: Air guitar
  • Breakout: Software start-up plugs wireless tracking system to end consumables 'chaos'
  • 300-mm Imperative: TSMC yields first wafers; industry leader buys Axcelis photoresist tool; Samsung chooses Daifuku to supply 300-mm storage systems
  • New Materials Roundup: Two prototype copper tools are hits; KLA-Tencor opens demo center for e-beam system; AMD selects Dow Corning gas; 3M debuts 193-, 248-nm photoresist chemicals
  • 'Round the Circuit: NIST tool aids etchers; alliance launches low-k Web site; two Corning scientists receive silica glass patent for 157-nm lithography; SEMI expands Web-based investment service; particle meeting seeks papers; contamination topics set for Estech 2002
  • Expansions and Acquisitions: Photronics, Conexant sign pact; Boxer Cross ups capacity; Shima American, Medtronic Merocel launch brush roller partnership
  • Whatās Going On: Productronica, Semicon Japan, and more

FACILITY REPORT

  • IMEC balances basic research, global industry alliances

TECHNICAL VIEWPOINT

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Wafer traceability FOUP system, film-thickness metrology system, diaphragm valves, solids TOC analyzer, 300-mm wafer inspection, semiconductor fab integration, single-use trilayer HDPE drum, modular process control, stock-removal slurry, optical spectrograph, iron contamination monitor, dry vacuum plasma processing, battery-powered flowmeter, wafer-inspection lamp, digital mass-flow controller, airborne particle counters
  • Product Extra! Pump vendor launches on-line purchasing service; toolmaker upgrades software for characterization system; supplier offers notification tools for data capture software; metrology specialist offers three-year warranty for lasers
  • Products in Action: Ball-valve seal solution eliminates coolant leakage problem

November/December 2001
Selected Contents

SPECIAL FEATURE

  • When Micro Meets Nano
    Advances in nanoscience will have a huge impact on the manufacture of semiconductors and related thin-film products in the approaching sub-100-nm era. In this special report, MICRO explores some of the latest breakthroughs, trends, and challenges for readers ready to explore the world of molecular-scale transistors, carbon nanotubes, and atomic layer deposition.

TOP 30 PRODUCTS ALLSTARS

  • MICRO’s readers have selected the 30 most popular products from among the nearly 200 that appeared in the magazine’s Product Technology News section throughout 2001. This year’s Top 30 All-Stars range from analysis instruments and CMP tools to wafer markers and gears. The list includes cleanroom doors, face-seal fittings, metrology stations, microfilters, liquid flow sensors, ion implanters, tubing pumps, defect inspection tools, pressure transducers, PVD systems, wafer sorters, pressure control monitors, and 300-mm etch tools. MICRO extends a hearty congratulations to the winners!


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