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MicroMagazine.com

Back Issues of MICRO Magazine

October/November 2003 | August/September 2003 | December 2003
July 2003 | June 2003 | May 2003

April 2003 | March 2003 | January/February 2003


December 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: IMEC, five big chipmakers launch 45-nm research program (Sidebar: IMEC 300-mm process facility will be cornerstone of new program)
  • Lefty: Vapor ware
  • Breakout: New name, familiar tools; Aviza Technology enters the thermal process market fray
  • World Beat:
    Asia: FSA expands in region; Novellus, Fudan University to establish manufacturing tech facility; Air Prods, SinoMOS ink clean dry air, bulk gases deals; Trebor grows in Japan
    Europe:
    Wacker Siltronic consolidates, ramps 300-mm capacity
  • Market Outlook: Big wafers, big growth
  • 'Round the Circuit: Infineon chip finds faults; EUVL on track; KLA-Tencor nabs MESA award; Semiconductor Services offers in-house training
  • Expansions and Acqusitions: SCP Global gives AMAT rights for drying-technology applications; Brooks, Schneider team up on APC; Oxford, Hi-Tech get a grip on coating technology; Praxair expands PVD biz; Mykrolis buys Aeronex; Fab Solutions scores funds

GREATEST HITS OF 2003

This year's Greatest Hits of 2003 have been chosen. The product selections, reflecting offerings in the IC and microelectronics manufacturing supply chain, include supercritical CO2 chambers, macrodefect inspection tools, copper electroplaters, ALD tools, ion implanters, wafer carriers, pressure regulators, pinch valves, metrology tools, and much more.


October/November 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: Chipmakers sparing no effort to cut manufacturing costs
  • Lefty: No mirage
  • AEC/APC Symposium Report: Taking control of "weirder and weirder" products
  • Biz Tech: Mask projections
  • Breakout: Upgraded campus fab to give engineering students taste of chipmaking experience
  • World Beat:
    Asia: SMIC eyes $1B in tools; GE Global structures AMD-Fujitsu deal; Lytron opens service depot; Torrex snags reorder; SCP Global wins tool orders

    Europe:
    ASIC design center opens; Genus sells ALD tools
  • 300-mm Imperative: Inotera to install Axcelis tools; Sematech lauds SEZ; Mattson adds new DRAM customer
  • MEMS Zone: Start-up receives DOE MEMS contract; microsystems CD-ROM updated; Intelligent Micro Patterning upgrades micromolding
  • 'Round the Circuit: NIST aids 'liquid lens'; chip surge helps cleanrooms; SPIE launches digital library; ASTM opens up standards; books cover films, defects
  • Expansions and Acqusitions: AMD buys National Semi unit; Air Products purchases Ashland electronic chem business; managers to buy out WWK; Schlumberger team launches metrology firm; DuPont forms materials unit; Oxford gets Thermo VG; Edlon inks plastics pact with 3P
TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Photomask cleaning tool, wafer transfer/loadlock system, cordless vacuum wafer wand, enclosed adjustable-speed drives, pressure regulator, integrated metrology tool, cleanroom-compatible filters, liquid optical particle counter, storage system/stocker, extractive gas monitor, ESD monitoring system, machine control system, mechanical vacuum pump, field emission SEMs, continuous gas-emission monitor
  • Product Extra!:Vendor releases new version of wafer-mapping software; supplier awarded pressure transducer, flow control patents; noncontact measurement system upgraded to include Windows 2000; manufacturer augments fluoropolymers with new grades; software permits real-time control of robots, motion controllers; vendor offers Website product tour for fiber types, contactor designs

 


August/September 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: Chip industry searches for solutions to slow start for low-k materials
  • Lefty: Face reality
  • Breakout: Finnish optoelectronics firm eyes breakthrough with spin-on material
  • Breakout: Institute seeks to speed carbon nanotube transistor use
  • World Beat:
    Asia: Tel, Nikon accelerate liquid immersion work; Silterra to expand in Asia, Europe; TSMC adopts PDF Solutions technology for 90-nm ramp; SMIC buys yield program from Virage
    Middle East
    : IBM opens design center Europe
    Europe:
    IMEC, Soitec, Umicore to tackle <45-nm scaling; Infineon consolidates Service centers; Micronic, ASML to develop optical maskless litho technology
  • Photo Gallery: Automated marriage
  • 300-mm Imperative: UMCi installs more tools; TEL sells track modules; fab buys Mattson strip systems; Asyst sells RFIDs
  • Tech Trends: Emerging fab technologies
  • 'Round the Circuit: Metology market heads for $4B; SEMI elects Chamillard; Immersion tools see progress; gloves, cots RP published
  • Expansions and Acqusitions: TI plans new 300-mm fab; Cabot Supermetals opens films center; Axcelis gets Matrix; BOC buys Eco-Snow assets; Matheson to double capacity; ATMI buys ESC; Implant Sciences to triple capacity
  • MEMS Zone: Optical outlook is strong; Planartechnik buys QuickSIlver inspection tool; CD tool installed at U of Alberta; Silex purchases EV Group litho tools

TECHNICAL ARTICLES

  • Taking Control 2: Developing and implementing an advanced CMP run-to-run controller
  • Tool/Fab Automation: Testing the use of purge gas in wafer storage and transport containers
  • Behind the Mask: Studying chemically amplified resists and top antireflective coatings in photomask fabrication

PRODUCT TECHNOLOGY NEWS

  • Products: MEMS etch/deposition tools, gas-line heater system, supercritical CO2 chamber, trench measurement tool, integrated metrology platform, control technology, transfer station, 300-mm copper electroplating tool, pressure transducer, metrology unit, ion implanters, cross-sectional analysis, handheld particle counter, antivirus software, flowmeters, quiet ball screws, microstructure monitoring, wafer cassette transfer carts, remote plasma source, overlay measurement system
  • Product Extra!: Supplier offers critical shape metrology on a CD-SEM; surface conditioning system combines improved hardware, software, process features; vendor adds ultra-high-purity system to gas-delivery products; resolution enhancement tools extended; package reduces robot teaching times; supplier awarded patent for in situ wafer temperature measurement; chemical Web site offers new customer-service features; specular reflectance standards for reflectivity surface measurements introduced; vendor's pellicle service allows customers access to inspected photomasks

July 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: Ad hoc metrology association hopes to take measure of ITRS
  • Lefty: Make and model
  • Breakout: Applied Materials makes first diagonal X architecture test IC, consortium reports
  • World Beat:
    Asia: China foundry buys Mattson tools; Air Products installs gas supply equipment at Samsung; ASML sells to ASMC; MySem installs Feinfocus x-ray inspection tool
    Asia/Europe: DHL to handle FSI goods
    Middle East: Tower taps KLA-Tencor tools
  • SIA Forecast: A Chip Shot
  • 300-mm Imperative: Axcelis touts resist strip tool; Wacker buys SemiTest metrology system; Mattson client wants more process equipment; GSI Lumonics to ship wafer repair system to Powerchip; UMCi Singapore chooses ASML tool
  • New Materials Roundup: Ebara joins SiLKnet; Sematech says low-k will be ready in 2003
  • 'Round the Circuit: Films to meet roadmap goals; SEMI releases 13 new standards; maskless litho tool called a success; Molecular Imprints ships novel litho tool to Motorola; IEST publishes outgassing RP
  • Expansions and Acqusitions: Infineon eyes Senso-Nor; ASM, Soitec sign strained SOI pact; Ziptronix finds funds for wireless devices; Despatch concentrates business, manufacturing functions under one roof; Enthone gives ATMI rights to use, sell copper processes; Entegris sells wafer shippers to two chipmakers
THE MICRO INTERVIEW

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Wafer-edge inspection tool, AMHS integration, defect inspection tool, pad-conditioning system, depth filter cartridges, reticle area filter, atomic layer deposition tool, single-wafer wet-process cleaning, E-beam inspection system, wet-process station, closed-loop gas chiller, photoresist dry stripper, dual-axis servomotor controller, post-CMP cleaning solution, safety curtain
  • Product Extra!: Method determines trace-metal contaminants in phosphoric acid; new technique for scanning probe microscopes released; components supplier issues O-ring guide; company offers vision-based autofocusing for CD tool; vendor expands wafer-mapping package; supplier software manages sampling needs of batch-based operations

June 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: Nanoimprint firms begin to make an impression
  • Lefty: Unforgivable
  • Breakout: Brainstorming team develops new tool for analyzing wafer edge contamination
  • World Beat:
    Middle East: Tower snares volume order from Alliance Semiconductor
    Asia: Selete buys analytical tools from n&k Technology; TEL to build office in Shanghai
    Europe: ON Semiconductor opens fab in Slovak Republic; Intelligent Micro Patterning to help build MEMS line at Madrid university; Europractice IC Service, MOSIS to offer additional AMI Semiconductor technologies
  • Biz Tech: Counting pennies
  • 300-mm Imperative: Axcelis touts program to speed up tool installation; FSI nabs repeat order
  • The MEMS Zone: Tronic Microsystems opens French plant
  • 'Round the Circuit: NIST, Hewlett-Packard claim to have measured capacitance-voltage of molecular device; McIlvaine report projects surge in UP water market; Applied elects Michael Splinter as CEO, president; ASMC seeks papers
  • Expansions and Acqusitions: Applied buys Boxer Cross; Keithley, Novellus team on copper, low-k integration tests; Purus starts up disposables business; Swagelok forms semi services unit; Newport improves test and metrology lab for motion control products
TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Acetone washing machine, noncontact analog position sensor, thermal metrology tool, CO2-process metering pumps, thin- and thick-film SOI wafers, small-volume etch/deposition tool, 300-mm FOUP cleaning system, 1X stepper, CMP polishing pressure mapping, pumping and abatement unit, ozone generator, particle-measurement system
  • Product Extra!: Supplier offers connectivity software to achieve 300-mm compliance; vendor provides CD with linear-motion product catalogs and manuals; instrument maker receives patent for acoustic particle sizer; vendor publishes brochure on electric heater, temperature-sensing products; supplier augments resist-parameter-determination software; toolmaker granted CMP endpoint patent

SEMICON WEST 2003

  • The show section features a rundown of show activities, including the Technology Innovation Showcase and the MEMS Pavilion.

May 2003
Selected Contents

INDUSTRY NEWS

  • Lead Story: Litho simulation start-up wants to keep chip industry on right track
  • Lefty: Test and measurement
  • World Beat:
    Asia: TSMC touts 130-nm process; SMIC buys Veeco profiler; Tevet hires Hakuto to sell its metrology and APC products; Waseda University installs EV Group nanotech tools
    Europe: Entegris expands in Germany; Xtreme Technologies ships prototype of EUV light source to Exitech; Epichem, Degussa to supply silane-based products
  • 'Round the Circuit: IMEC, National Semiconductor to develop 180-nm SiGe-based BiCMOS processes; Cypress Semiconductor makes first 90-nm device with DuPont advanced imaging mask; USDC collaborates with DCI Acquisition to improve machine-vision inspection for microdisplays; ASTM invites students
  • Expansions and Acqusitions: ICD/Heateflex buys Fluidix; Soitec acquires Picogiga; Brooks signs automation pact with Tibco; Air Products launches materials delivery systems unit

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: As part of its 20th anniversary celebration, MICRO presents a Product Technology News section highlighting four companies' products today and two decades ago.
This month MICRO presents a special section devoted to its 20th anniversary. The section includes essays by long-time industry veterans who muse about the magazine's evolution and about such broad-ranging topics as defect reduction and ESD control. In addition, it provides a 20-year time line, short Q&As with industry notables, and statistical factoids comparing then and now. The section concludes with the MICRO 20th contest, offering attentive readers a chance to win Beyond Imagination, a handsome coffee-table history of the semiconductor industry. Just click here, or on the photo at left to open the PDF file.

 

April 2003
Selected Contents

INDUSTRY NEWS

  • Lead Story: Two vendors find recipes for relative success in down market
  • Lefty: Good vibrations
  • Breakout: Industry must address potential problems in materials supply chain, ISMT study asserts
  • Business Trend: Putting China into perspective
  • Breakout: Public-private partnership discussing U.S. mask consortium, says newsletter
  • World Beat:
  • Europe: IMEC, AMI Semiconductor launch program to reduce ASIC costs
    Asia: Cymer opens South Korean chamber plant; Asyst installs materials-handling system in China
  • What's Going On: Electrochemical Society, Semicon Singapore, and more
  • 'Round the Circuit: Canon to ship first 157-nm litho system; USDC publishes roadmap for FPD, LED industries; cleanrooms get a boost; Silicon Valley honors Asyst founder
  • Expansions and Acqusitions: Ibis joins IBM on SOI; Rite Track enlarges plant; Philips starts new metrology unit for copper, low-k processes; Coherent to buy Positive Light; Gems Sensors purchases Pressure Devices; Innovative Design Solutions hires Citadel Technologies to represent line of chemical, solvent, CMP products; Arch Microelectronic Materials, Fuji Photo Film embark on photoresist upgrade program
TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: Overlay metrology tool, micromachining laser, lead screw assemblies, mask repair system, chemical control software, optics contamination sampling, run-to-run APC software, ultra-low-voltage CD-SEM, fluoropolymer diaphragm valves, slit- and gate-valve doors, motor with planetary gearbox, diffusion-furnace software, industrial excimer lasers
  • Product Extra!: Supplier enhances dry-strip system; vendor receives patent for high-power vacuum ultraviolet light generation; toolmaker extends capabilities of x-ray diffractometer; company issues approval standard for use of wafer carriers in cleanrooms

March 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: Roadmap right-of-way yields to recession
  • Lefty: To dye for
  • Breakout: Polcari, senior IBM technologist, replaces Helms as head of International Sematech
  • World Beat:
    Asia: Mitsubishi signs strained-silicon pact with AmberWave; Schlumberger hires Seki Technotron as sales agent; Jazz duets with ASMC; Selete, two Japanese mask makers order Veeco AFMs; Hanwha, Plasmion create negative-ion-beam deposition partnership; Mallinckrodt opens lab
    Europe: Rockwood Specialties gets facelift
    Australia: Technology Futures Conference scheduled
    Middle East: Lytron names Israel Scientific Instruments as distributor
  • 'Round the Circuit: Sematech, SUNY tackle NGL; JMAR claims litho leap; process delivery, control segments to grow; ASTM updates metric standard; Ting heads SEMI China
  • Expansions and Acquisitions: Entegris buys Asyst lines; SCP to buy Mattson wet tool biz; Spectra absorbs Thermo Electron businesses; Veeco, FEI nix merger; Solvay launches Solexis; Microchip seeks fab buyer; Synopsys to buy Numerical Technologies
  • Photo Gallery: Shipley opens tech center
  • 300-mm Imperative: IMEC to build new cleanroom; sales of 300-mm front-end tools to grow in 2003; UMC installs process equipment in Singapore fab; Varian, BOC Edwards, ASM subsidiary book tool orders
  • What's Going On: Semicon Europa, MRS meeting, and more
  • Business Prognosis : Fab utilization, capacity sluggish

TECHNICAL ARTICLES

  • Special Apps: Reducing defects in integrated surface-micromachined accelerometers
  • BEOL Equipment: Using RF metrology to optimize HDPCVD plasma cleans
  • Green Manufacturing: Replacing piranha cleans with an O2 RIE/fluorine process to remove post-ion-implant residues
  • Materials Integration: Improving spin-on-glass processes by using pump and filtration technology

PRODUCT TECHNOLOGY NEWS

  • Products: MEMS metrology, wafer-measurement system, high-capacity filter cartridges, electronic optical alarm, mass-flow controller, atomic force microscope, MEMS motion analyzer, industrial membrane contactor, noncontact 3-D surface profiler, high-purity pressure vessels, miniature gearhead, etch-residue removers, copper-plating chemistry, cleanroom ionizing gun, controlled resistivity ceramics, pressure-measuring instruments, tool pedestal, helium leak detector sniffer, digital pressure controllers
  • Product Extra!: Vendor offers kit to test technical feasibility of thermometry system; consulting service opens thermal Web site; supplier publishes pump repair guide; vendor publishes specialty gas and equipment reference guide

SEMICON EUROPA 2003

  • The show section features a preview of ASMC, the AEC/APC Europe conference, and the Fab Managers Forum

 

January/February 2003
Selected Contents

EDITOR'S PAGE

INDUSTRY NEWS

  • Lead Story: Basically, backers have big plans for new nanoscience center
  • Lefty: Worth their weight
  • Breakout: SPIE symposium expands manufacturing conference; highlights IC costs, APC
  • World Beat:
    Europe: Matsushita Electrial Industrial to collaborate with IMEC on high-k dielectric
    Asia: Samsung Electronics licenses Numerical Technologies' phase-shift technology; Huajing Microelectronics orders ASML photolitho systems; FSI ships first cleaning tool to Japanese chipmaker; Oxford sells GaN tools to ITE Compound Semiconductor and Epitech Technology; Jon Goldman chooses Grandway to represent it in China, Taiwan
  • 'Round the Circuit: BOC Edwards, Micell Integrated Systems to develop supercritical CO2 delivery system; IBM readies 90-nm chip; Applied promises better yields; Kopin claims LED breakthrough; Shadman receives EHS award
  • Expansions and Acquisitions: Corning reaches full production of CaF2 crystals at expanded plant; ISE Integrated Systems and Sigma-C partner on litho simulation products; DuPont Displays and Universal Display pinpoint OLEDs; Newport opens optics plant; Luxtron moves HQ
  • Photo Gallery: Looks good on paper
  • 300-mm Imperative: Sematech is damascene ready; Toshiba to build two fabs

TECHNICAL ARTICLES

PRODUCT TECHNOLOGY NEWS

  • Products: MEMS deep-oxide ICP etch tool, gas flowmeter power supply, x-ray sources, polishing tool, silicon wafer analyzer, copper CMP control profiler, etch tool APC system, noncontact measurement system, CMP slurry pinch valves, rigid-wall cleanrooms, macrodefect inspection system, EUVL simulation software, scanning thickness mapper, chemical line sampler, particle counter
  • Product Extra!: Toolmaker offers enhanced connectivity software; supplier provides pressure/vacuum loadlock transducer; company launches MEMS, NEMS patent profile info; vendors add new specialty gases to subatmospheric safe-delivery sources; supplier enhances CMP polishing pads


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