Product Extra!

Ion Systems has introduced an open-architecture capability that enables continuous, real-time monitoring of air ionization equipment. Designed for integration in facility-monitoring systems, the equipment allows constant control of static charge in the cleanroom by immediately relaying to managers such events as a change in setting, a power line interruption, or an alarm. The feature is available on monitoring systems made by Lighthouse Associates and Particle Measuring Systems, and drivers can be customized to suit any system. Information: 510/548-3640.

ANSI and the Global Environment and Technology Foundation (GETF) will market a CD-ROM that addresses the ISO 14000 environmental management standard. The multimedia disk is manufactured by Reality Interactive of Eden Prairie, MN. ANSI coordinates the voluntary consensus standards system in the United States; GETF promotes the use of environmentally sensitive technologies. ANSI has also licensed the right to embed an electronic reference version of the ISO 14000 standard in the disk. Information: 612/996-6777.

Matheson Electronic Products Group has added a boron trifluoride delivery capability to its Safe Delivery Source (SDS) product line for ion implantation. Developed by Matheson and Advanced Technology Materials, Inc. (ATMI), the added feature provides enriched BF₃ at a capacity nearly equal to that of a standard cylinder at 400 psig. SDS products deliver gas based on the pressure differential between the cylinder and the implanter's ion source. Information: 408/971-6500.

Cole-Parmer's new NIST-traceable calibration services for humidity instruments can be used to certify hygrothermographs, digital humidity meters, humidity indicators, and transmitters. Two types of calibration are available--standard and calibration with test data. All benchmarking is completed in a NIST-traceable environmental chamber. Information: 800/323-4340.

Designed for chemical identification of defects, the Link ISIS microanalysis tool from Oxford Instruments is available with a wafer inspection system from JEOL JWS. The integrated system features a monitor, keyboard, and mouse linked to Oxford's scanning electron microscope. A special program called AutoMatch allows users to create a library of defects that can be accessed with a mouse click. Information: 508/369-9933.

Upgraded models of ASM Lithography's i-line and deep-UV steppers boast throughput improvements of up to 20%. The vendor has installed a 3-kW compact arc lamp in its PAS 5500/200B i-line stepper that enables the tool to process >=90 200-mm wafers/hr. Intensity increases of more than 50% and improvements in optical efficiency in annular mode boost the tool's throughput, says ASML. Two enhancements to the PAS 5500/300B deep-UV tool streamline data handling, reticle handling, and wafer queuing. The stepper offers 0.25-µm capability and processes >80 200-mm wafers/hr. Information: 602/438-0559.

Rodel has established two toll-free telephone numbers for customer service and quality control. The customer service number is 800/404-8775. Hours of operation are 8 a.m. to 8 p.m. EST. The quality control hotline number is 888/233-0853. It is open from 8 a.m. to 5 p.m. EST.

CORRECTION: Empak has agreed to offer without cost or the need for company permission its 300-mm wafer carrier technology, not the carrier itself as reported in the "Product Extra!" column in the October 1996 issue.

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