Product Extra!

Pacific Scientific is putting its liquid and vacuum particle counter products under one roof. The monitoring tools are made by Pacific's Hiac/Royco and High Yield Technology (HYT) businesses, respectively, and will be designed, manufactured, and marketed from HYT's headquarters in Sunnyvale, CA. In December 1995 Pacific purchased Met One, the maker of air and liquid particle counters. The new merger enables it to combine the R&D and application service support for all three product lines. Information: 408/541-6450.

Empak releases its first production-ready 300-mm wafer carrier this month. Dubbed CAPSil, the unit incorporates molecular contamination control technology, a front-opening pod, and an integrated cassette. The system, which bathes wafers in clean dry nitrogen, permits users to ship 300-mm wafers to other locations for further processing. The carrier is compatible with the Jenoptik-Infab robot codesigned by Infab and Empak. It also meets provisional SEMI standards for 300-mm wafer carriers, the vendor says. Information: 719/528-2651.

In partnership with Leica, KLA Instruments will offer an off-line version of its on-line Impact automatic defect classification system. The new system will enable operators to use KLA's algorithms to review wafer defects on other inspection systems. The multiyear agreement calls for Leica to supply review stations for the KLA tool. The system combines KLA's expertise in defect redetection and Leica's strength in defect review stations. KLA says beta systems should be available by the middle of this year. Information: 408/434-4200; www.kla.com.

Novellus Systems has introduced plasma-enhanced antireflection layer technology that provides tight levels of critical dimension control with i-line and deep-UV lithography at a low cost per wafer. The new process deposits antireflection layers in the Novellus PECVD reactor, maintaining a uniform thickness over device topography. The process is designed for production of chips with linewidths <=0.35 µm. Throughput is >100 wafers/hr, according to Novellus. Information: 408/943-9700.

The electronic chemicals group of General Chemical has increased manufacturing capacity of various grades of MAE mixed acid etchant by 400% with the addition of a 2100-gal reactor vessel at its plant in Pittsburg, CA. The upgrade gives customers improved material consistency because each lot delivered now is the equivalent of five lots prior to the capacity increase. Information: 800/247-4519.

Texwipe's A Systematic Approach to Cleaning videocassette demonstrates the proper use of cleanroom wipers. The 12-minute instructional tape is designed for use by cleanroom workers and managers. Highlights include common wiping mistakes, a comparison of dry and wet wiping, and safety concerns. Information: 800/TEXWIPE, ext. 292.

A free CD-ROM from Ametek's process and analytical instruments division illustrates new technology for moisture measurement and analysis in process gases. The disk's six segments cover financial issues, applications, installation and operation, reference performance, and other Ametek products. Both the Model 5800 moisture analyzer and Model 5900 UHP moisture analyzer are described in the disk's application segment. Information: 302/456-4400.

Desco's Statcon training program is an interactive system for teaching proper ESD control techniques. Available on 10 31/2-in. disks, it features four modules covering the setting up of an ESD program, basic instruction in handling ESD-sensitive products, advanced instruction on the mechanics of static electricity, and compliance requirements. Information: 909/598-2753.

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