Product Technology News

Excimer Lasers

Lambda Physik

Ft. Lauderdale, FL

NovaLine excimer lasers feature a metal/ceramic laser tube that does not require cryogenic cooling and a solid-state halogen generator that eliminates the storage and handling of noxious gases. An internal computer provides diagnostic information. Suitable for use in sub-0.25-µm wafer processing, the Litho model has a 1-kHz repetition rate, <0.8-pm bandwidth, and 10-W stabilized output. Another model, the 100 KrF laser, features up to 100 W of stabilized output, 400-mJ pulse energy, and a 250-Hz repetition rate at 248-nm wavelength. Its resonator has an Invar frame that is mechanically isolated from the laser tube to provide stability for beam pointing, output power, and related laser functions. (Semicon/Europa, Booth 838)

PFA Diaphragm Valve

Parker Hannifin Partek

Tucson, AZ

A perfluoroalkoxy 1/2-in. diaphragm valve features a reliable, cost-effective, and contaminant-free design. The PFA unit offers multimillion cycles of operation, minimum pressure drops, and minimal fluid entrapment and is suitable for semiconductor and other high-purity applications. (Semicon/Europa, Booth 1317)

RGA Control Software

Spectra International

Morgan Hill, CA

With its SPC software package that provides a simple interface between the company's line of residual gas analyzers and users, Process-Eye can help enhance product yield and quality. A user-friendly, recipe-based approach allows data to be entered on critical process parameters, data display preferences, and levels of required process interaction. When used with multisensor software, the package can simultaneously control and oversee up to 31 process monitoring systems. By linking it with a remote vacuum controller, the software can also prevent inadvertent damage to the process or RGA in the event of vacuum accidents or operator error. During production runs, any significant statistical deviation triggers a customized warning. (Semicon/Europa, Booth 1237)

Disk-Drive Cleaning

Branson Ultrasonics

Danbury, CT

The MicroCoustic cleaning technique removes films and particulates on the micron and submicron levels from disk-drive components without cavitation. An alternative to sprays and conventional ultrasonics, the system quickly cleans heads, sliders, flexures, and drive hardware. The process operates at a frequency of 400 kHz. The high frequency reduces the thickness of the viscous boundary layer that typically masks smaller particles on drive components. The frequency also carries a high amplitude component, enabling the system to remove larger particles than are generally removed by megasonic processes operating at 800 to 1000 kHz. The system is available as a power supply and independent acoustic arrays for retrofitting installed solvent or aqueous cleaning equipment.

Cluster Tool Robots

Smart Machines

San Jose, CA

SVR 200/300 robots offer 10 times the reliability and 2 to 3 times greater wafer-exchange speed than conventional timing belt- or gear-driven robots, according to the company. The MESC-compatible robots average 10 million mean cycles between failures compared to the conventional robot's 500,000. The direct-drive design features fewer than 20 moving parts and brushless servo motors attached to drive shafts, eliminating failure-prone components. Additional features include continuously optimized substrate motion algorithms to keep wafers moving at high speeds, and absolute position revolvers that eliminate the need for manual recalibration of the robot.

Coater Parts Cleaner

Poly-Flow Engineering

Sylmar, CA

The S-1193 SVG coater parts cleaner is an automatic support tool for photoresist application systems. Ultrasonic agitation used in conjunction with a PBR40 solution loosens and then dissolves deposits from the coater cups, rings, and related parts. An automatic filtration systems functions during recirculation, and standard condensing coils help eliminate VOCs from the exhaust airstream. A process control management system with user interface is optional. (Semicon/Europa, Booth 1577)

Liquid-Level Sensor

SUNX Sensors

West Des Moines, IA

The UA-11 liquid-level sensor requires no drilling of holes, no welding of sensor wells, and no contact with the liquid inside the vessel. The ultrasonic instrument can detect liquid levels inside metal tanks ranging from 300 to 3000 mm diam, with wall thicknesses up to 6 mm. The stainless-steel device operates on 12–24 V dc at a current consumption of 60 mA. Two NPN open collector outputs are standard features.

Spectroscopy Imaging Microscope

Renishaw

Schaumburg, IL

A Raman imaging microscope combines scanning spectroscopy and 2-D imaging in a single system. Using a 25- mW laser, the device scans to a spatial resolution of 1 µm and a spectral resolution down to 0.2 cm^–1. Graphics appear in the form of 2-D Raman images as well as 2- and 3-D spectral plots. The microscope can be customized for remote analysis and temperature measurements at high and low extremes. A semiconductor laser option is available. The microscope and laser come with a Pentium-based IBM PC with color VGA monitor and Windows-based spectroscopy software.

UV Step-and-Scan System

ASM Lithography

Tempe, AZ

The PAS 5500/500 step-and-scan lithography system combines deep-UV imaging at <=0.22-µm resolutions and throughputs of >96 200-mm wafers/hr. The system produces images as large as 26 × 33 mm. Its reticle stage operates at 1000 mm/sec; the wafer stage operates at 250 mm/sec. To minimize contamination, the system is equipped with automatic nitrogen purging cycles that flush hydrocarbons from the beam path between exposures. The system also incorporates activated charcoal photoresist filters and a HEPA filter to create a Class 1 environment at the wafer's surface. (Semicon/Europa, Booth 847)

Backup Power Supply

Q Systems

Bronxville, NY

Designed for use with process equipment and robotic handlers, an uninterruptible power and vacuum supply prevents wafer damage during brownouts, transient events, surges, and similar electrical failures. A front panel displays real-time power and vacuum conditions in a flowchart. In addition to 13 programmable system alarms, the unit contains a self-powered maintenance clock advising when scheduled preventive maintenance should be performed. The equipment measures 15 × 19 1/2 × 22 in. Standard size power sections from 700 to 2100 VA are available.

Vacuum Metallizer System

Darly Custom Technology

Bloomfield, CT

A batch metallizer for thin-film coating applications features a vertical-axis vacuum chamber with two half cylinders–one fixed and the other rotating open. The work loader and evaporating-source assembly rotate out with the mobile half cylinder, allowing direct access to the chamber interior for source filling and substrate loading. The system's simple design reduces downtime by making maintenance easy. Because the metallizers have few exposed surfaces inside the chamber, progressive increases in cycle time are minimized. The system can evacuate a clean, dry, empty chamber from atmosphere to 5 × 10^–4 torr in <5 minutes with an ultimate vacuum of >1 × 10^–5 torr. Four sizes are available, each with automatic or manual control.

Pressure-Sensitive Adhesives

Adhesives Research

Glen Rock, PA

ARclad pressure-sensitive adhesives minimize contamination in high-end disk drives. The low-outgassing transfer adhesives reduce volatile organic content from 1–2% to less than 0.5%. The acid-free products protect disk-drive heads from contamination problems common to high-capacity drives, such as chemical contamination that can damage the drive and fog the disks. The adhesives use either standard siliconized polyester release liners or silicone-free liners. They come in 5- , 2 1/2- , and 1 1/2-mil versions.

High-Purity Transducer

Precise Sensors

Monrovia, CA

A high-purity transducer is fully rated for NEMA 4 service. The Model 322 pressure sensor can be mounted on gas pads or in gas bunkers at semiconductor facilities. Available in pressure ranges from 0–30 to 0–5000 psi, the model has a compensated temperature range of 0–160°F and thermal error of ¾0.0006%°F. Each transducer comes with a four-year warranty. (Semicon/Europa, Booth 187A)

Gas Sensor Module

Sierra Monitor

Milpitas, CA

The Model 4101-06 sensor module measures chlorine gas concentration in the 0–10-ppm range. The unit's LED alerts operators when to replace the electrochemical sensor, and the module's 4–20-mA signal can be used with controllers.

OCR Wafer Lot System

OAI

Milpitas, CA

A compact stand-alone OCR system detects and reads silicon wafer numbers in either alphanumeric or bar code form. The SEE/Wafer system measures 4 1/5 × 2 1/10 × 1 in. and features a CMOS camera, cpu, image memory, and I/O subsystem. It detects, reads, and identifies the wafer number, checks its validity, and transmits the recognized data to a computer or display. The system can be incorporated in process tools and used for automatic wafer recognition. The unit operates on 9 V dc, and its programmable internal software makes it suitable for many applications. The 8-bit parallel TTL-level I/O port is programmable for external trigger, recognition error signal, and peripheral equipment control. (Semicon/Europa, Booth 1300)

Air-Cooled Chillers

Airflow Co.

Frederick, MD

The RCA series of air-cooled chillers allows parallel installation of up to seven modules to handle cooling loads from 30 to 520 tn. Multiple units can be grouped as a chiller bank, and modules can be added as the cooling load increases. The compact modules fit into most freight elevators for simple installation. In addition to side-by-side or end-to-end configurations, the modules may be installed in different areas and still function as a single bank. A microprocessor monitors the circuitry of the chiller bank and provides automatic sequencing to ensure equal run times for each module. The modular design eliminates the possibility that a single-point failure could cause the entire system to shut down.

Face Mask

Tecnol

Ft. Worth, TX

The PCM 2000 Gamma face mask features a soft, knit headband. The mask completely covers the face and features a "gap" guard to control particulates from getting under the chin. The gamma-sterilized mask is designed to be worn in cleanrooms rated at Class 100 or better. Bacteria filtration efficiency is 96.9% presterilization at 0.5 µm. (Semicon/Europa, Booth 647)

Ball Valves

Swagelok

Solon, OH

Ball valves are designed to withstand the rigors of steam and thermal fluid heat transfer. Encased eight-bolt construction provides secure fluid containment. Composed of PEEK, the seats and stem seals of the steam-series valves resist water absorption and erosion. Reinforced Grafoil flange seals keep the valves leaktight at high temperatures. Thermal-series valves feature flexible metal seats. Temperature ratings are –65° to 850°F for stainless-steel valves and –20° to 800°F for carbon-steel valves. The valves operate in pressures <=1000 psig. Sizes are 1/4 to 2 in. (Semicon/Europa, Booth 1029)

SEC Cleaner

Blue Wave Ultrasonics

Davenport, IA

A self-enclosed console cleaner incorporates an ultrasonic wash, two-stage rinse, and forced hot-air in a single unit. The machine's footprint is 80 × 24 × 37 in. The cleaner has stainless-steel insulated hinged lids and features particulate filtration. Temperatures in both the cleaning tank and the dryer are controlled digitally. Options include ultrasonic rinse, spray rinse, conductivity metering system, surface oil removal, and automated parts handling.

Perfluoroethane Replacement

Schumacher

Carlsbad, CA

Trifluoroacetic anhydride (TFAA) is offered as an alternative to C₂F₆ for PECVD oxide-chamber cleaning. TFAA cleans the process chamber as fast as or faster than C₂F₆ while generating emissions with less than 5% of the global warming potential of C₂F₆. The nonflammable chemical has a high vapor pressure and can be delivered using vapor-draw technology. Existing water scrubbers can remove any unreacted chemical from exhaust streams. Cost of ownership is the same as for C₂F₆ when used with a burn box. (Semicon/Europa, Booth 647)

Vapor Dryer

Forward Technology

Minneapolis, MN

The AD-series vapor dryer is designed for use with IPA and other solvents that have low flashpoints. The device reaches vapor temperatures 20°– 50°F above the solvent's boiling point to ensure fast and complete drying of parts. Parts leaving the superheated vapor contain no liquid solvent, thereby abating vapor emissions. The dryer also contains a temperature-controlled condensate tray to reduce reflashing of solvent back into vapor. Standard features include a 50-lb capacity and a secondary containment tray.

Wafer Sorter

Recif

Ausonne, France

A vertical multiple-transfer sorter integrates four functions in one machine. The system offers batch notch finding in two cassettes, batch noncontact wafer ID reading with software, single wafer sorting, and batch wafer transfers. A cleanroom table is a standard feature of the user-friendly system. Back-to-back, face-to-face wafer-loading is an option. Footprint is 38 × 20 in. (Semicon/Europa, Booth 1451)

Thickness Measurement System

Instruments SA

Stanmore, Middlesex, UK

The Sofie Digilem instrument combines interferometry with CCD imaging to measure the thickness of transparent or semitransparent film during deposition or etching in real time. The camera design permits precise alignment of the laser spot on the chosen feature. The instrument also features an end-point algorithm for advanced signal processing and filtering. Applications include thickness monitoring in evaporation, sputtering, CVD, and plasma CVD deposition. (Semicon/Europa, Booth 1786)

Liquid Particle Monitors

Malvern Instruments

Malvern, Worcestershire, UK

MILPA laser particle counters provide on-line analysis of ultrapure liquids used in semiconductor manufacturing. Capable of detecting particles down to 0.1 µm, the compact instruments can be used as portable monitors or panel mounted for in-line monitoring. A variety of systems are available, including models designed for DI water, solvents, and chemicals. Options include printers, pumps, a bubble separator, and chemically resistant wetted surfaces for corrosion resistance. (Semicon/Europa, Booth 199)

FTIR Accessory

ASI SensIR Technologies

Norwalk, CT

An FTIR accessory, the AmplifIR uses 4-mm, 45° incident optical imaging for analyzing thin films on metal and other reflective surfaces. The instrument provides rapid infrared data on thin and residual oils. The system's compact, multiple-reflection optical design produces high-sensitivity spectra for small sample areas. The instrument, which consists of a DuraDisk and sampling fixture, operates in the nanometer to micron range.

Air-Operated Pump

Yamada

Elgin, IL

The DP-20F air-operated pump contains no internal metal parts, eliminating the possibility of metallic contamination in the event of a diaphragm leak or failure. The all-plastic device handles temperatures up to 176°F and has a flow rate of up to 10 gal/min. Assembled and tested in a Class 1000 cleanroom, the pump has 3/4 in. intake. The discharge valves feature a 1/4-in. air inlet. (Semicon/Europa, Booth 651)

Fluoropolymer Tubing

Norton Performance Plastics

Wayne, NJ

Chemfluor 367 scientific-grade fluoropolymer tubing has low parts-per-billion counts of trace metals and a working temperature range of –200° to 232°C. Available in various standard and nonstandard tubing dimensions, the tubing offers excellent chemical resistance and enhanced clarity. The company says its inside surface is six times smoother than comparable tubing, due to the product's molecular structure and small grain size. The tubing can be purchased in 50-ft coils or custom packaged. (Semicon/Europa, Booth 1109)

Gas Standards Generator

Kin-Tek Laboratories

La Marque, TX

The Span Pac I generator produces gas mixtures for on-line calibration of process analyzers and continuous emissions monitors. Using the manufacturer's Trace Source permeation tube, the unit can generate concentrations from the low parts-per-billion level to over 1000 ppm without interstage mixing. Housed in a NEMA 4–specification cabinet with up to three ovens, the unit can be operated remotely and is capable of multicomponent mixture and multipoint span calibration. Applications include parts-per-billion analysis of CO and COS in propylene, VOCs, NO₂ H₂S, SO₂, CI₂, and HCl.

Yield-Analysis Software

Defect & Yield Management

Bedford, MA

The NeuralNet software program systematically analyzes E-test data and graphically communicates the results. The system features a custom-designed class-sensitive neural-network engine that intelligently learns bin patterns and recognizes similar patterns on production wafers. Users can monitor and analyze processes for critical, hidden, or subtle yield problems. Results can be correlated to various in-fab processes to pinpoint corrective action. The system automatically detects patterns such as reticle site, distinctive curves, clusters, areas, and nonrandom distributions along rows and columns. Data from E-tests can be overlaid with in-line defect maps for correlating die failures with known defects. The software includes sophisticated training routines and is based on client-server architecture that uses a central Oracle database.

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