Product Extra!

Olin Microelectronics Materials' Rent-A-Chem program gives the vendor full ownership and responsibility for the chemicals it provides to semiconductor manufacturing fabs—from production through disposal. The program diminishes regulatory reporting obligations on the part of device manufacturers. Olin makes acids, etchants, solvents, photoresists, polyimides, developers, CVD, and diffusion products. Information: 203/750-2687. (Semicon/West, San Francisco, North Hall, Booth 5425)

Eaton's semiconductor equipment operations has established the Spares Management and Replenishment Tracking (SMART) inventory program. The SMART program monitors customers' inventory levels—taking into account external factors such as weather—and adjusts delivery specifications as needed. Benefits derived from the program come in the form of reduced ordering, storage, and ownership costs. Information: 617/684-0770. (Semicon/West, San Francisco, North Hall, Booth 5526)

Lam Research has received two patents for advances in plasma-etch technology. The first is for a confined system used in the company's Rainbow 4520XL oxide etcher. The patented technology extends the etcher's performance capabilities by permitting smaller feature sizes, higher throughput, and lower contamination than in previous configurations. The second patent is for the design of the planar-inductive plasma source used in Lam's Continuum flat-panel display etch tool. This technology makes it possible to enlarge Lam's TCP reactor to accommodate large-area substrates and flat-panel displays. Information: 510/659-0200. (Semicon/West, San Francisco, South Hall, Booth 1632)

Fluid Systems has released Version 6.1 of its RoPro 6 for Windows software, a program originally offered in 1995 to assist in reverse-osmosis system design. The latest version features a comprehensive cost-analysis function called CostPro that helps users design economical RO systems from a cost viewpoint and make cost comparisons between designs. It also includes the company's newest membrane elements, TFC-ULP, Magnum, and TFC premium, as well as the Spiral composite product line. Information: 619/695-3840.

Ultratech Stepper's updated Saturn series provides chipmakers with the flexibility to select the i-line stepper that best suits individual application and budgetary requirements while delivering the benefits of a proven platform. The Saturn platform accommodates advanced i-line processes for manufacturing with resolutions down to 0.65 µm. Dual alignment and throughput options are available. The steppers come with either a traditional wafer-alignment system or Ultratech's pattern recognition­based machine-vision system. Information: 408/577-3116. (Semicon/West, San Francisco, South Hall, Booth 238)

Johnson Matthey Electronics uses a vacuum hot pressing production method in fabricating a new line of ultra-high-purity tungsten sputtering targets that are more than 99.999% pure. The process does not leave pressure-filled submicron voids that can cause plasma disruption and particle generation, as do methods such as cold pressing and inert-gas sintering. The high-purity targets have fine, uniform microstructures. Additional benefits include low gas levels, low alkali contamination, and low alpha emitters. Information: 509/891-2216. (Semicon/West, San Francisco, North Hall, Booth 5768; San Jose, McEnery Hall, Booth 11744)

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