Spotlight

Analytical Equipment

Liquid particle sensor

The nano particle sensor from Particle Measuring Systems is designed for measuring filter efficiency and parti-cle contamination in ultrapure water and corrosive chemicals. It operates in either in-line or batch sampling environments. The nano monitor has four sizing channels with a starting sensitivity of 0.08, 0.1, or 0.3 µm.

Real-time monitoring system

A monitoring system from Lighthouse Associates provides real-time data collection, analysis, and early warning tools to improve productivity and yields by helping locate and solve both contamination and environmental problems.

Liquid particle counter

MGN International offers the Rion KS-16 0.1-µm liquid particle counter. The laser-based small-sized model can be installed in-line at point-of-use for a variety of liquids, such as DI water, acids, and solvents. It is RS-232 compatible.

Gas-analysis system

SAES Pure Gas developed a system approach to gas purification and analysis. In a climate-controlled, weatherproof enclosure, a nitrogen purifier is grouped with two argon purifiers, an oxygen analyzer, and the central processing unit of the PC interface data acquisition system. A second enclosure has two oxygen purifiers and a moisture analyzer. The result improves flexibility and lowers overall cost for the end-user.

Mass-flow controller

Sierra Instruments offers the Mass-Trak mass-flow controller as a low-cost alternative to volumetric flow measurement devices that are sensitive to temperature and pressure changes. The instrument's integrated proportional control valve provides one-step control of critical gas flows. An on-board display and set point control eliminate the need for seperate power supply and readout electronics. The unit can handle flow rates up to 50 std L/min.

Gas stick

For point-of-use gas control, SubMicron Products supplies gas sticks and gas control assemblies for field installation near process equipment using inert gases. The products are also used for local field control of hazardous and toxic gases when used in gas isolation boxes.

CVD monitoring system

Gas-impurity composition, reac-
tant species at the wafer, and gas reaction by-products can be determined using the Orion CVD process monitoring system. The system from MKS Instruments handles problems of resistivity, particles, uniformity, and adhesion.

Particle-size analyzer

Horiba's Model LA-910 particle-size distribution analyzer offers a low-end limit of 0.02 µm and unattended operation of up to 24 samples with a reservoir system that stores three different kinds of dispersion media. Its Powder Jet dry feeder is capable of dispersing cohesive fine powders down to submicron sizes.

Gas analyzer

An on-line gas analyzer from Contrôle Analytique has three ranges: 0­50 ppb, 0­500 ppb, and 0­5 ppm. Displayed resolution is 10 ppt. The unit is used for N^₂ determination and end-of-life gas purifier monitoring. The microprocessor-based system is maintenance free. A helium version is available.

Automatic particle sampling

The Model 2110 Cascade Impactor from MSP is designed for automatic sampling of airborne particles for size, shape, and chemical composition analysis. Samples are isolated on silicon substrates at 50 nm and 0.1, 0.3, 1.0, 3, and 10 µm for analysis by SEM/TEM systems.

Gas analysis

The Transpector XPR from Leybold Inficon performs on-line PVD process, degas, and etch-clean monitoring for wafer-borne contamination control and photoresist detection. Designed for gas analysis at PVD process pressures without pressure conversion systems, the device can also take base-pressure measurements.

Stereo zoom microscope

The Olympus SZH-10 microscope has a 10:1 zoom ratio and 3.5 to 420* magnification range. The 1* prime objective lens is apochromatically corrected using extra-low dispersion glass that heightens image contrast and eliminates color shift. It can be mounted in com-bination with a 0, 0.5, 0.75, 1.5, or 2* objective on a two-place rotatable nosepiece. Built-in disengageable click steps indicate specific magnifications within the zoom range.

Gauge guards

Gauge guards from Plast-O-Matic Valves protect gauges from corrosion, clogging, instrument failure, and downtime. The guards permit gauges to maintain accurate readings, ensuring reliable system operation. Chemical guards are available in PVC, polypropylene, and PVDF with Teflon or Viton diaphragm. Models are offered for corrosive or ultrapure liquid applications.

Fieldmeter

Simco's Hand-E-Stat electrostatic fieldmeter is a compact, easy-to-use device that measures static-charge buildup. It features a 4-in. digital display and a ranging light system for accurate, repeatable measurements. No range switching or calculations are required up to +19.99 kV at 1 in.

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