INDUSTRY NEWS

WHAT'S GOING ON

October 19: ULSI Technology and Its Plasma Processing Equipment; San Jose. Contact: 212/248-0325.

October 19­22: 15th International Symposium on Laboratory Automation and Robotics; Boston. Contact: 508/497-2224.

October 20­22: CleanRooms West 97; Santa Clara, CA. Contact: 603/ 891-9267.

October 20­22: Korea FPD Technical Conference and Exhibits 97; Seoul. Contact: 415/940-7961.

October 20­24: American Vacuum Society 44th Annual Symposium; San Jose. Contact: 202/248-0200.

October 27­31: SEMI China Trade Mission; Hong Kong. Contact: 415/ 940-6947.

October 28­30: Practical Integrated Circuit Fabrication seminar; Austin, TX. Contact: 512/476-3700.

November 3­5: Chemical Vapor Deposition for Silicon Integrated Circuits; Burlingame, CA. Contact: 510/642-4151.

November 5­6: Flat Panel and Related Display Technologies; Burlingame, CA. Contact: 510/642-4151.

November 5­7: National Environmental Balancing Bureau Annual Meeting; New Orleans. Contact: 301/ 977-3698.

November 5­8: Fifth Foresight Conference on Molecular Nanotechnology; Palo Alto, CA. Contact: 415/ 917-1122.

November 11­12: Materials and Process Integration of Ion Implantation; Burlingame, CA. Contact: 510/642-4151.

November 17­20: International Congress on Applications of Lasers and Electro-Optics; San Diego. Contact: 800/345-2737.

December 3­5: Semicon Japan; Makuhari, Japan. Contact: 415/964-5111.

December 9­10: 14th Annual Flat Information Displays Conference; Monterey, CA. Contact: 415/448-4440.

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