Product Technology News

Scanning Probe Microscope

TopoMetrix
Santa Clara, CA

The Accurex II scanning probe microscope's TrueMetrix proprietary design provides closed-loop scan linearization for accurate images in both lateral and vertical axes. TrueMetrix technology uses an inherently linear sensor to measure scanner motion in a real-time feedback loop. This feature ensures accurate measurements and a one-step zooming capability. Nondestructive imaging is performed with low-amplitude cantilever oscillation to protect fragile surfaces from probe damage. The instrument can be configured to accommodate scanning modes such as contact, near-contact, and noncontact AFM; lateral force microscopy; and electrical force microscopy. The Accurex IIL is a laboratory version designed for research and industrial applications.

Ionic Contaminant Analyzer

Dionex
Sunnyvale, CA

The DX-800 combines the capabilities of ion chomatography and high-performance liquid chromatography to determine analytes such as inorganic anions, alkali earth cations, and amines whose measurements are not possible by other on-line methods. The instrument is capable of monitoring low levels of contaminants in sample streams ranging from UHP water to acid and alkaline solutions. Features include multicomponent characterization of a process sample in a single analysis and close to real-time monitoring of multiple process samples. The system is housed in a NEMA 4/4X enclosure. Access to all components is through the front of the instrument in order to minimize maintenance time. PeakNet-PA software offers instrument control, data analysis, and results reporting. Capabilities include scheduling sampling and synchronization of multiple-channel operations.

300-mm Wafer Marker

Lumonics
Oxnard, CA

Manufactured for use with 300-mm wafers, the WaferMark SigmaXC is air-cooled and designed for use in Class 1 minienvironments. The self-contained unit incorporates a front loading station that accommodates two, stackable 13-wafer-capacity sealed cassette pods. Pick-and-place robotics with a dual vacuum wand and optical alignment load the pods into the system's marking chamber. The system uses a diode pumped laser for stable control of pulse energy, pulse length, and peak power. Footprint is 571/2 x 561/2 in.

Machine Vision Software

Cognex
Natick, MA

Coupled with the 8000-series platform, PatMax image analysis software locates and precisely aligns wafers before steps such as metrology, probing, and inspection. The high-throughput program accurately locates wafer and die patterns in spite of variances caused by CMP and other process steps. The program also recognizes missing and extraneous pieces of an image. The program is compatible with 300-mm wafers.

Gas Filters

Parker Hannifin, Finite Filter Div.
Oxford, MI

Made of 316L VAR stainless steel, Ultra-Series gas filters remove 99.9999999% of all particles measuring >=0.003 µm. The filters can be used with inert, corrosive, oxidizing, flammable, and toxic process gases. The ceramic membrane filter media and solid block element construction minimize vapor outgassing in conditions of pulsed flow and mechanical vibration.

CFC-Free Cleaning Solvent

Inland Vacuum Industries
Churchville, NY

A replacement for CFC-113 and other ozone-depleting solvents, Perfluorosolv PFS-1 is a low-molecular- weight perfluoropolyether solvent and diluent fully miscible with fluids used for cleaning in semiconductor manufacturing operations. Applications can include vacuum pump cleaning, degreasing, dewatering, and vapor blanketing. The solvent eliminates accumulation of contaminants and organic cleaner residues. It can also be used in vacuum pump and compressor components during flushing and rebuilding. The solvent requires no special ventilation, and it is inert, nontoxic, odorless, and colorless.

Cleanroom Cleaning System

Perfex
Poland, NY

The TruClean Pro triple-bucket cleaning system is designed to isolate contaminants and deliver unadulterated cleaning and sanitizing agents to cleanroom surfaces. The mop frame maintains surface contact at any angle and permits cleaning of a 16 x 5-in. area in a single pass. The wringer controls the moisture content of mop heads. The handle adjusts from 36 to 72 in. The system is visually coded to reduce the risk of cross-contamination, and it can be sterilized using gamma, EtO, and autoclave methods.

Etch Bath Filter

Pall
Port Washington, NY

The Ulti-Etch filter's crescent shape combines high voids volume with a large filter area for efficient operation in recirculating etch applications. Made of PVDF, the filter has a removal rating of 0.1 µm in recirculation mode. To maintain low levels, the inherently hydrophobic PVDF medium is modified chemically to make it hydrophilic. The filter operates at temperatures <165°F. It is available with Viton-A or Teflon-encapsulated Viton O-rings.

300-mm Isolation Tools

Asyst Technologies
Fremont, CA

SMIF-300 isolation systems are designed for integration into process tools or for use by IC manufacturers as stocking solutions and intrabay automation in 300-mm fabs. The series comprises the SMIF-300FL load port, the SMIF-300WMS wafer management system, and the SMIF-300RL local tool buffer. The load port meets SEMI and I300I guidelines and is compatible with 13- and 25-wafer pods while maintaining a Class 1 or better environment. The tool buffer allows 300-mm wafer pods to be stored at the process tool, thus decreasing load times and fab storage area requirements. Scaleable architecture minimizes the footprint for each process tool. The wafer management system maintains a Class 1 or better environment during handling functions such as wafer lot splitting, sorting, merging, and batch transfers.

Megasonic Cleaner

ProSys
Campbell, CA

At the start of each process cycle, the MegaSonics cleaner's automatic tuning feature self-tunes each crystal in the bath to its natural frequency. The constant tuning reduces heat generation and minimizes process degradation, preventing failures caused by high reflected power. A temperature sensor on the crystal provides real-time feedback for temperature monitoring and characterization. Special circuitry switches the crystals on and off sequentially to provide pulsed megasonic energy at ¾60 cycles per second. This programmable switching feature enables the use of standard or customized recipes. The assembly comprises a tank, system electronics, and the control panel. The tank is small to minimize chemical consumption, but it can accommodate 300-mm wafers. The crystal array can be repaired, and the entire cleaner incorporates replaceable subsystems, including the transducer and electronics components.

Sampling Valve

Asahi/America
Malden, MA

A 1/4-in. PVDF ball valve samples DI water or chemicals. Features include a detachable hose barb adapter, a threaded plug attached to the valve body, and a stem-fit lock handle.

Etch Filter

Meissner Filtration Products
Camarillo, CA

The STyLUX polyethersulfone membrane filter controls contamination in etch baths. The hydrophilic filter eliminates the need for prewetting, and it ensures low levels of metal extractables. The flow rate permits upgraded filtration to 0.1 or 0.04 µm from 0.2 µm or 0.1 µm.

DI-Water Heater

Lufran
Streetsboro, OH

The QMax DI-water heater features reduced thermal mass for rapid response. The heater replaces quartz bulb units, and its thermal and electrical system tuning operates at 99.7% efficiency. Wetted materials are ultrapure semiconductor-grade 214 quartz glass, Kyner, and Chemraz. Individual columns can be replaced in the field. The heater is 44 in. high, 20 in. deep, and 36 in. wide.

Mobile Cleanroom Cabinet

Kennedy Manufacturing
Van Wert, OH

Suitable for Class 10 environments, a cabinet made of 304 stainless steel features ball-bearing drawer slides and self-cleaning bridged retainers in the slides that keep dust from accumulating. Each drawer has a 125-lb capacity. The cabinet's nonmarking polyurethane casters measure 5 x 11/2 in. Dust and grease seals in the casters prevent contamination. A push-button combination lock is standard. The lock's plate has a brushed finish with closed-cell neoprene gaskets, and the cabinet has a #4 brushed finish.

Wafer Handler

Ludl Electronic Products
Hawthorne, NY

The SC 96 single-cassette wafer handler needs only 32 in. or less of bench space, including the microscope. The tabletop handler features an ergonomically designed tilting cassette load port and robotic transfer. Flexible wafer alignment options and modular configuration are additional features. The handler operates with either manual or motorized stages, and the system complies with SEMI S2-93.

TOC Analyzer

Anatel
Boulder, CO

The A-2000 wide-range TOC analyzer is designed for on-line monitoring of semiconductor feedwater and reclaim/ reuse applications. The instrument measures TOC from 4 ppb to 1000 ppm and can be connected to the company's A-1000 self-configuring networks for complete monitoring of TOC and conductivity in ultrapure-water systems. The automated system uses standard, packaged reagents. Communication capabilities include four 4­20-mA outputs, bidirectional RS-232 remote control, and four separate alarm relays. Automatic validation, preprogrammed calibration, and a diskette drive for data storage are standard features.

Centrifugal Sump Pumps

Vanton Pump and Equipment
Hillside, NJ

The SGK series of vertical centrifugal sump pumps handle ultrapure, corrosive, and hazardous fluids in applications where dry running may be required for extended periods. The thermoplastic pumps operate at flow rates to 1000 gal/min and temperatures to 275°F, depending on the type of thermoplastic. All wetted components in the pumps are available in homogenous thermoplastics such as PVC, CPVC, PP, and PVDF. The pumps come with closed or semiopen balanced thermoplastic keyed impellers, which are molded with an imbedded stainless-steel insert.

HEPA Filters

Airguard Industries
Louisville, KY

The MicroPleat line of HEPA and ULPA filters includes efficiencies of 99.99% and 99.999% on 0.3-µm particles and 99.9995% on 0.12-µm particles. Cell-side configurations are available for all types of housings, including gasket seal, gel seal, reverse gel seal, knife edge, and disposable ducted ceiling modules. All filters are made of anodized extruded aluminum.

Ultraviolet Radiometer

Spectronics
Westbury, NY

The Spectroline DM-254H short-wave UV radiometer has a proprietary solarization-resistant interference filter that eliminates sensitivity to infrared and other unwanted radiation, producing only ultraviolet (230­280-nm) readings. The 1-lb radiometer includes built-in autozeroing and linearity from 0 to 199.9 mW/cm². The meter is calibrated to NIST standards by pyroelectric methods to ensure an overall accuracy of better than ±5%.

Global Positioning Robots

Genmark
Sunnyvale, CA

Servocontrolled global positioning enables the GPR series of transport robots to correct for misaligned cassettes and process modules. The robots also compensate for deflections during transport. The systems offer six degrees of freedom, thus eliminating alignment variance between material and workstation. The robots can be used in place of track systems for in-line equipment because of the yaw-axis design. Optional roll and pitch axes permit inverted and vertical transfer of wafers and flat panels.

Liquid-Delivery System

Stainless Design
Mount Marion, NY

The Auto Switchover liquid-delivery system consists of a dual wall-exhausted cabinet with 316L stainless-steel plumbing and integrated electrical and controls system. Two models are available. A 55-gal version is designed to fit standard industry chemical containers provided by the user. This version can be upgraded to accommodate the supplier's intermediate delivery system, which uses two stationary 65-gal vessels and an automatic refill circuit. The second version is designed for remote bulk supply. The system complies with OSHA and NEC regulations, as well as SEMI Standards S2-93 and S8-95 for operations, maintenance, and ergonomics. To ensure ultrapure operation, all wetted surfaces are made of 316L 10 Ra electropolished stainless steel and springless diaphragm valves with low internal volumes and replaceable seats. All welding and assembly are done in a Class 100 or better cleanroom.

300-mm Load Ports

Jenoptik Infab
Austin, TX

Fixload 13/25 front-opening load ports handily convert from 13 to 25 wafer capacity to suit front-opening unified pods. A special kit allows users to convert the load ports in the fab. The systems are made for manufacturing ICs with linewidths <0.25 µm. Ergonomic loading height is 900 mm.

Liquid Filter Housing

Filter Specialists
Michigan City, IN

Made of lightweight polypropylene, the X-100 convertible filter housing operates under pressures ¾90 psi and in temperatures ¾110°F. The internal surfaces of the chemically resistant housing are designed for easy cleaning. A special lid-gasket enables users to seal the lid without using additional tools. The housing can be fitted with an X01 filter bag or the X20 Polyseal cartridge. The bag measures 2 sq ft and comes in a variety or micron ratings. The cartridge measures 51/2 in. diam and is 231/4 in. long. The cartridge requires no springs, holddown plates, or center posts.

Ionization Bar

Simco
Hatfield, PA

The CleanTrac Ultra-Clean ionization bar uses clean dry air or dry nitrogen to minimize accumulation of contaminants in the emitters. Designed for Class 1 use, the bar can be installed in minienvironments and laminar-flow benches. Six lengths from 1 to 6 ft are available. A detachable 7-ft power cable, an airflow gauge, air filter, air tubing, and mounting hardware are standard features. When operated with the IBC-20 controller, the bar includes an ion sensor to provide balance stability.

Exhaust Pressure Controllers

Aera
Austin, TX

The R100, R150, and R200 exhaust pressure modules ensure repeatable results by maintaining constant pressure in the process chamber. The unibody structure of each model features a small, high-torque stepping motor and a minimal number of components. The valve clearance setting accommodates high-temperature gases. Applications include oxidation diffusion, CVD systems, annealers, and spin coaters. The systems control a slightly negative pressure in the outlet line between the process chamber and an exhaust duct. Each module responds to a range of inputs and gain settings.

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