Product Extra!

The Impact/Online automated defect classification (ADC) system from KLA-Tencor allows semiconductor manufacturers to develop a defect classification scheme on one system and export it to other fabs running the same processes. The standardized classification scheme permits process engineers working in different fabs around the world to collaborate in solving defect problems. The matching capability is available for the KLA-2132 and 2135 inspection systems, as well as the 2100-series wafer inspection platform. Information: 408/571-3000.

The Right Seal from Greene, Tweed is a comprehensive guide to semiconductor industry seals. Written as a reference volume, the guidebook covers topics such as sealing requirements, O-rings, specialty applications, the physical properties of elastomers, and compound selection. A glossary is included. Information: 408/468-0180.

OnTrak Systems has received five U.S. patents for its linear planarization technology. The patents for the new CMP technique cover the polishing head, polishing platen, polishing assembly, and planarization method. Information: 408/952-5632.

Praxair has expanded its line of on-site supply systems. An optional liquefier can provide backup UHP liquid nitrogen, eliminating the need to deliver additional supplies by truck. Another enhancement enables Praxair to offer on-site production of UHP hydrogen with impurity levels <10 ppb. Information: 203/837-2032.

SemiSuite from Promis Systems and Digital Equipment Corp. is a joint client/server system combining Promis's manufacturing execution system (MES) software and Digital's 64-bit AlphaServers. The modular fab automation tool operates on three levels: plant, area/cell, and equipment control. The plant level defines, monitors, and controls the manufacturing process using Promis's software. The area/cell level integrates systems and applications for functions such as reticle management, microscheduling, and automatic data collection. The equipment control level incorporates products for material transport, SMIF, and cell integration. Information: 508/496-9851; 603/886-1230.

Ultra Clean Technology's chromium-rich oxide passivation welding technology prevents corrosion, metallic impurities, and particle generation in ultrapure halogen gas applications. The CrP welding method stops halogen attack at heat-affected zones and at weld sites and tubing junctures. These areas are vulnerable to moisture-caused corrosion as the halogen gases pass through the system. Information: 415/617-4105.

Nikonnest increases the throughput of Nikon's step-and-repeat (NSR) models 6­10 lithographic systems. The upgrade executes NSR/MCS-II original code and allows various disk I/O routines to operate as much as 200% faster than the previous incarnation. A PC-based GPIB communication driver is an integral part of the system, which replaces the original computer components to offer enhanced storage capacity and Ethernet capability. The time required for preventive maintenance is also reduced. Information: 415/508-3819.

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