PRODUCT ALLSTARS

Here are MICRO's Top 40 Product All-Stars for 1997, as selected by reader response. The products range from carriers to cleanroom window film, CMP tools to transducers. Congratulations to this year's winners!

Substrate Carriers

Engineering Plastics

Westboro, MA

Wafer and substrate carriers can be molded from various PTFE or PTFM formulations and machined with slots and sections to ±0.005 in. Carrier configurations range from compact low-mass styles that minimize contact with wafers to fully supported cassettes for 300-mm wafers. Unaffected by temperatures from —450° to 500°F, the carriers have no pins, screws, or dovetails that can trap contaminants. Their low coefficient of friction diminishes particle shedding.

POU Scrubber

Misonix

Farmingdale, NY

The XGC system uses three abatement stages to thoroughly scrub highly toxic and pyrophoric gases from process effluent gas streams. The three stages are a spray chamber, an Eductor venturi stage, and the Waterweb mesh. The mesh system comprises thousands of microventuri passages for maximum scrubbing efficiency. The system's blowerless construction is designed to safely handle hydrogen carrier gas, and an inlet humidity arrestor prevents backstreaming of gas and humidity to inlet piping. The low-energy system can be used in CVD, PECVD, RIE, and plasma-etch applications.

High-Purity Transducer

Precise Sensors

Monrovia, CA

A high-purity transducer is fully rated for NEMA 4 service. The Model 332 pressure sensor can be mounted on gas pads or in gas bunkers at semiconductor facilities. Available in pressure ranges from 0—30 to 0—5000 psi, the model has a compensated temperature range of 0°—160°F and thermal error of ¾0.0006%°F. Each transducer comes with a four-year warranty.

Stainless-Steel Tubing

Eagle Stainless Tube

Franklin, MA

Mill lengths and sizes of all 300-series stainless-steel and aluminum tubes and pipes are available from stock for quick delivery. Nickel/nickel-based alloy tubing and pipe also can be ordered from stock. The supplier can provide custom-cut metric and fractional sizes. Prototype and mill quantities can be supplied. All pipes and tubes meet ASTM, AMS, and MIL-T specifications.

Cluster Tool Robots

Smart Machines

San Jose, CA

SVR 200/300 robots offer 10 times the reliability and 2 to 3 times greater wafer-exchange speed than conventional timing belt— or gear-driven robots, according to the company. The MESC-compatible robots average 10 million mean cycles between failures compared to the conventional robot's 500,000. The direct-drive design features fewer than 20 moving parts and brushless servo-motors attached to drive shafts, eliminating failure-prone components. Additional features include continuously optimized substrate motion algorithms to keep wafers moving at high speeds, and absolute position revolvers that eliminate the need for manual recalibration of the robot.

Ball Valves

Worcester Controls

Marlborough, MA

Series WK70 tube bore clean valves prevent the buildup of various contaminants in a variety of high-purity processes. Available in dimensions of 1/2 to 2 in., the ball valves offer controlled metallurgy, featuring forged parts of 316L stainless steel and a standard internal surface finish of 25 Ra, or an optional finish of 10 Ra. Seats of TFE, reinforced TFE, and Polyfill provide bubbletight shutoff through the valve under conditions of high-vacuum and high-cycle operation. Valves are designed for manual on/off operation as well as automated operation of cyclic batch processes. High-cycle stem seals supply external sealing for valve automation. Series 39 pneumatic or Series 75 electric actuators are offered for automated switch control. Electronic and pneumatic positioners are also available.

Mass-Flow Controller

Redwood MicroSystems

Menlo Park, CA

Incorporating microelectromechanical system technology, the MEMS-Flow MFC measures only 29 x 25 x 8 mm to provide high-purity control of gas flow rates from 0.1 to 2000 std cm³/min. The controller's ceramic modules, which contain microfabricated valves, sensors, and orifices, can be attached to standard or customized manifolds using Viton, Kel-F, or metal seals. Inlet pressure range is 25—50 psid; maximum outlet pressure is 200 torr. The MFC provides ±1% full-scale accuracy and ±0.1% full-scale repeatability. The instrument's pressure-based technology uses absolute pressure sensors which are less sensitive to drift than thermal mass-flow sensors. Silicon Fluistor microvalves have no moving mechanical parts to generate contaminants, and the MEMS design reduces internal volumes to leave less surface area for moisture absorption to occur. No internal welds, seals, and fittings are needed, because all components and subsystems are mounted on common substrates.

Automated Wet Station

SubMicron Systems

Allentown, PA

The GAMA-2 automated wet station processes lot sizes of 100 wafers while keeping system footprint and chemical costs to a minimum. By doubling wafer-transport lots, the system increases throughput proportionally. In postash resist strip processes, the unit raises throughput from approximately 200 to 400 wafers/hr. A chemical-free photoresist-strip process, known as DIO3, permits the processing of as many as 500 wafers/hr. The strip process employs a chemical blend of ozone and chilled DI water rather than sulfuric acid. This single-tank process reduces both equipment footprint and chemical costs. The technology can effectively eliminate hazardous chemicals from the semiconductor process while increasing throughput.

Flowmeters

McMillan

Georgetown, TX

S-series flowmeters feature a 31/2-digit LCD with 0—5-V dc output for recording data. Capable of precision measuring even in slow liquid or gas flow rates, the flowmeters come in 14 ranges of from 13—100 to 2000—10,000 ml/min. An ac/dc adapter plug is an option.

Cleanroom Clog

Brenta

Columbus, OH

Designed for extended wear, the Calzuro is a washable, antistatic clog available with or without upper ventilation holes. The clog is conductive in the range of 30 to 34 M‡. A special model can be manufactured with conductivity of 10 to 1000 M‡. The footwear comes in 12 colors, including white, light blue, royal blue, metallic blue, green, orange, pink, black, and yellow.

Face Protector

Space Face Shield

Caldwell, TX

An alternative to standard curved face shields, a wraparound shield covers the forehead, eyes, nose, mouth, chin, and ears for maximum protection against splashes, flying particles, and impact hazards. The one-size-fits-all design combines optically clear fog-free goggles and a face cover in one unit. The shield meets various OSHA and ANSI regulations. Made of a soft vinyl frame with an adjustable headband, the shield is Class 1 compatible and can be worn with eyeglasses and hard hats.

Polypropylene Tubing

NewAge Industries

Willow Grove, PA

An alternative to PTFE tubes, Prolite polypropylene tubing resists chemicals and corrosion and exhibits low moisture absorption, high dielectric strength, and low surface friction. The reusable lightweight tubing has a lower temperature resistance than PTFE and is easier to weld or bond. Fourteen sizes ranging from 1/8 to 13/4 in. ID are available, along with compression, push-connect, and quick-disconnect fittings. Custom sizes, shapes, and colors can be ordered.

300-mm Cassette Elevator

Brooks Automation

Chelmsford, MA

The VCE 5 loads and unloads 300-mm wafers into vacuum process tools. The modular unit can be configured to operate with both cluster and stand- alone tools. Fully integrated interfaces contribute to a fast throughput, small footprint, high reliability, low particle count, and reduced cost of ownership. The elevator enables manufacturers to standardize the tool end of the transport-to-tool interface, obviating a frequent source of delay in bringing tools on-line. Units can be specified with manual or automatically actuated doors, 13- or 25-wafer capacity, and stationary cassette platforms for open-cassette production environments. Versions are also available with a cassette-transfer arm and single-cassette load station for automated exchange; a minienvironment and bottom-opening carrier interface; and a wafer-batch transfer arm, minienvironment, and front-opening cassetteless carrier interface.

Cleanroom Window Film

Madico

Woburn, MA

An amber film for cleanroom windows prevents transmission of up to 99% of harmful blue and UV light under 500 nm. The pressure-sensitive film, available in rolls of various widths, can be professionally installed to fit any size cleanroom window. The film does not significantly reduce brightness levels and does not interfere with necessary interior lighting. The film is recommended for use in photolithography cleanrooms, where unwanted light can affect pattern accuracy. It also protects portable cleanrooms located near a hallway, passage door, or outer building windows.

Pinch Valve

Fluoroware

Chaska, MN

Suitable for use in CMP slurry distribution, the Dymak pinch valve combines high chemical resistance and low particle generation. The all-PFA valve has a straight flow path that inhibits particle entrapment and minimizes turbulence, resulting in high flow capabilities. A replaceable one-piece pinch element eliminates the potential for leaks at the interface between the diaphragm and the valve body. Operating entirely without lubricants, the valve prevents contamination of fluid streams. The valve is available in a manual plastic version and a pneumatic version with stainless-steel springs isolated from the flow path. Interchangeable manual or pneumatic actuators offer simple in-line reconfiguration. Options include leak detectors, position indicators, and multiple end connections.

Vapor Dryer

Forward Technology

Minneapolis, MN

The AD-series vapor dryer is designed for use with IPA and other solvents that have low flashpoints. The device reaches vapor temperatures 20°— 50°F above the solvent's boiling point to ensure fast and complete drying of parts. Parts leaving the superheated vapor contain no liquid solvent, thereby abating vapor emissions. The dryer also contains a temperature-controlled condensate tray to reduce reflashing of solvent back into vapor. Standard features include a 50-lb capacity and a secondary containment tray.

Water System Cleaner

Advatech

North Miami Beach, FL

Designed to improve flow rates, the Inductor prevents and removes all traces of calcium carbonate and other mineral scales from pipes and water systems without the need for toxic chemicals. The process removes negative surface charges that accumulate on the microsurfaces of suspended particles. The resulting change in the scale-formation process improves the efficiency of process operations and eliminates the undesirable effects of surface charges.

Mass-Flow Controller

MKS Instruments

Andover, MA

The Type 1153 mass-flow controller maintains precise delivery of vapors from complex solids and liquids with vapor pressure as low as 2.5 torr at temperatures ¾200°C. The unit controls vapor flow via a pressure-based technique that involves two Baratron pressure transducers, a choke-style flow nozzle, and a high-temperature solenoid valve. An onboard cpu regulates flow from the choked to the nonchoked flow regions, providing a wide usable control range. Full-scale flows up to 10 std L/min are possible, depending on the process. Both flow and temperature are controlled through 0—5-V analog signals or RS-232 communications. The MFC can be used by semiconductor and FPD manufacturers to deliver liquid and solid precursors with low vapor pressure to a CVD chamber for depositing barrier, high-K, and low-K dielectric films.

Electronic Flowmeter

NT International

Minneapolis, MN

The Model 4400 electronic flowmeter measures both the flow and pressure of UHP chemicals and highly corrosive process materials. The unit measures the differential pressure across an orifice machined into a single Teflon body. Incorporating two nonmetallic pressure sensors, the device has no moving parts and no filled cavities that could leak into the process stream. The flowmeter comes in sizes of 3/8 to 1 in. with flared connections. Flow rates range from 0.5—2.5 L/min up to 8—40 L/min. Two standard outputs of 4—20 mA are provided, one for flow and one for pressure.

Thin-Film Analyzer

Axic

Santa Clara, CA

The Precision 1000-B combines wavelength and energy-dispersive x-ray spectrometry to measure the thickness and composition of thin films on wafers, magnetic media, and flat-panel displays. The instrument's noncontact analysis method makes single-point analyses in 30 seconds to several minutes depending on the complexity of the film. Multilayer stacks can be measured during the same analysis and an automatic stage allows mapping of sam-ples for thickness and composition. A cassette-to-cassette version and a version with a Class 1 SMIF minienvironment are available.

Carrier Lifetime Measurement

Amecon

Berlin, Germany

The Janus system uses the µ-PCD technique of laser-induced, photoconductive decay as a noncontact measurement method for controlling metal contamination. Features include a low injection mode allowing for fast and reliable lifetime mapping, different excitation sources for surface and bulk analysis, an adjustable microwave reflector for optimal signaling, and user-friendly software with automatic parameter setting, statistics, recipe function, and data processing. The system accommodates 300-mm wafers.

Liquid-Level Sensor

SUNX Sensors

West Des Moines, IA

The UA-11 liquid-level sensor requires no drilling of holes, no welding of sensor wells, and no contact with the liquid inside the vessel. The ultrasonic instrument can detect liquid levels inside metal tanks ranging from 300 to 3000 mm diam, with wall thicknesses up to 6 mm. The stainless-steel device operates on 12—24 V dc at a current consumption of 60 mA. Two NPN open collector outputs are standard features.

Cleanroom Footwear

Lehigh Safety Shoe

Endicott, NY

A substitute for the traditional overboot, the CRS-1 fitted shoe is designed to be worn comfortably in Class 1 or Class 10 cleanrooms. Nonbrushed linings, a gusseted tongue, stitched outsole sidewall, and customized heel cushioning are standard features. Sizes range from a woman's 3 to a man's 15. Twenty-eight sizes are available in all.

Ionizing Air Pencil

Ultron Systems

Moorpark, CA

The Model UH 212 ionizing air pencil removes dust and particles from surfaces. The tool also neutralizes static charge on small or sensitive parts and controls reattraction of contaminants to the cleaned part. The pencil and its 61/2-ft electrical cord weigh 81/2 oz. By ejecting a jet of ionized air onto the surface, the pencil releases an electrostatic charge as it is moved across a surface. A disposable filter and compact power supply are additional features.

CMP Filter Assemblies

Pall

Port Washington, NY

The CMP Kleen-Change 100 filter assembly series is designed for the filtration of metal and oxide polishing slurries. The completely encapsulated, disposable polypropylene filters can reduce potential contamination, minimize contact with the process slurry, and eliminate the need to clean the housing. Assemblies can be installed at mixing stations, in distribution loops, and at polishing tools. Units contain polypropylene filter media available in absolute ratings of 5 to 120 µm. Permanently sealed filter elements can eliminate errors caused by incorrect fitting of cartridges and seals. Because of the encapsulated design, changeouts are quick, with a low holdup volume to minimize slurry waste.

Automatic Agitation System

Victor Associates

Ivyland, PA

The Model 966 automatic agitation system accommodates up to 6-in. wafers and provides wet chemical process uniformity. The system is controlled by a remote control box. Made of polypropylene and PVC, the compact unit measures 8 x 51/8 x 125/8 in. and can be installed above the work surface.

CMP Cluster Tool

Peter Wolters of America

Plainville, MA

The PM200 cluster tool offers users a customized way to meet planarizing requirements from R&D to full production. The system is designed to process 200-mm and smaller wafers at a rate of up to 50 per hour. The tool comprises two cleaners, two polishers, and an integrated handling system that occupies 6 m² of floor space. Each unit is available separately and can operate independently so that planarizing can begin in an R&D setting using only a polishing unit. Remaining units can be added to achieve full production later. Cluster software provides fully integrated control of each tool through a master control station, as well as the ability to control the complete cluster through a host computer. Options include in situ end point detection and a bar code reader.

Clear PVC Piping

Harvel Plastics

Easton, PA

Suitable for cleanroom and dual-containment use, Clear Schedule 40 rigid PVC pipe comes in sizes of 1/4 to 8 in. with clear fittings of 1/4 to 4 in. The lightweight pipe resists corrosion and installs easily using solvent-weld joining techniques. Fittings include male and female adapters, 90° and 45° elbows, T-shapes, couplings, reducer bushings, and end caps.

Lithography Filter

Extraction Systems

Franklin, MA

Designed for deep-UV lithography applications, Vaporsorb Profile 1250 and 2500 amine filtration equipment is suspended within the supply-air ductwork for the stepper, scanner, or track. This placement eliminates the filter unit's footprint on the fab floor. To lower the risk of contamination, both models feature the supplier's Interstack sampling system. The 1250 model delivers ¾1250 cu ft/min of amine-free air at 2 in. water gauge (500 Pa) static pressure; the 2500 generates an airflow of ¾2500 cu ft/min at 2 in. water gauge (500 Pa).

Heat Exchangers

Exergy

Hanson, MA

Tube-in-tube heat exchangers fea-ture 316L-stainless-steel construction, seamless tubes, and all-welded bodies. To enhance heat transfer, the exchangers feature an oval geometry that minimizes tube-to-tube contact. Special connectors are available for ultraclean applications. The exchangers' threaded mounting bosses are included on all end fittings.

Fluoropolymer Tubing

Norton Performance Plastics

Wayne, NJ

Chemfluor 367 scientific-grade fluoropolymer tubing is engineered for high purity, surface smoothness, and clarity. The tubing maintains fluid integrity and resists harsh chemicals. Small grain size gives it a very smooth inner surface. Operating temperature range is —328° to 450°F. The tubing is available in standard and nonstandard dimensions and can be supplied in 50-ft coils or packaged to suit specific needs.

Plasma-Etch System

Beta Squared

Allen, TX

The Beta 150 plasma-etch system offers a variety of processing capabilities. The main chamber of the single-wafer, cassette-to-cassette system can be configured for plasma or RIE etch processing and accommodates wafers from 100 to 200 mm. The chamber contains a minimum of parts, all made of materials chosen to reduce particle contamination. Entrance and exit loadlocks offer additional process capability. The system has a color touch screen interface and is equipped for real-time end-point-trace display and analysis. An end-point-monitoring system compares each end point trace to a reference trace stored in memory for each process. An optional downstream Microwave Asher Module can be installed on the exit loadlock chamber for rapid photoresist removal.

Gas Detectors

Molecular Analytics

Sparks, MD

The IonPro-IMS line of analyzers detect airborne contaminants using four-channel sampling from several locations within the tool. The analyzers detect ammonia, n-methyl pyrolidone, amines, and acid gases. Housed in a NEMA 4X stainless-steel enclosure, each system incorporates ion mobility spectrometry to provide sensitivities in the range of parts per million to low parts per billion. No chemical reagents, tapes, or solutions are needed to operate the systems, which require only semiannual maintenance.

OCR Wafer Lot System

OAI

Milpitas, CA

A compact stand-alone OCR system detects and reads silicon wafer numbers in either alphanumeric or bar code form. The SEE/Wafer system measures 41/5 x 21/10 x 1 in. and features a CMOS camera, cpu, image memory, and I/O subsystem. It detects, reads, and identifies the wafer number, checks its validity, and transmits the recognized data to a computer or display. The system can be incorporated in process tools and used for automatic wafer recognition. The unit operates on 9 V dc, and its programmable internal software makes it suitable for many applications. The 8-bit parallel TTL-level I/O port is programmable for external trigger, recognition error signal, and peripheral equipment control.

Photoresist Stripper

Legacy Systems

Fremont, CA

Unlike sulfuric acid mixture stripping, the Coldstrip process uses oxygen and water to remove photoresist from substrates ranging in size from 100 to 900 mm. The system requires less cleanroom space than conventional wet-strip tools. Eliminating both rinse tanks and the possibility of sulfate defects, the chilled-ozone process is designed as an economical alternative to 45-L recirculated sulfuric acid systems. The system essentially comprises a tank filled with water, making it inherently safe. The key process parameters are water temperature, ozone dispersion, and ozone concentration.

Handheld UV Lamp

Honle UV America

Marlboro, MA

The Uvahand 250BL handheld UV lamp detects particles and microcontamination in cleanrooms. The 3-lb unit is especially useful for mobile applications, and it operates in all lighting conditions. It is equipped with a 250-W metal halide lamp and a black filter transparent to the UVA region of 325 to 400 nm. The power supply is either 110 V/60 Hz or 230 V/50 Hz.

Flatness Inspection System

Wyko

Tucson, AZ

Designed for disk-drive manufacturers, the IR6 flatness inspection system accurately measures two-sided flatness and parallelism on disks and blank substrates in one pass. The system's 10.6-µm laser accommodates very rough surfaces, and its dual-beam technology enables surface parallelism measurement and two-sided flatness measurements without repositioning. The system processes up to 24 disks/min and accommodates substrates measuring ¾130 mm. Customized analysis software runs on Windows NT 4.0 and a Pentium Pro PC to generate two-dimensional cross sections, contour plots, and 3-D images. Three models of the system are available.

High-Performance Polymer

Victrex USA

West Chester, PA

Used for 200- and 300-mm wafer carriers, PEEK polymer provides dimensional stability under load, chemical and wear resistance, and a low rate of shedding. Carriers made from the high-performance plastic are designed to improve device yield, minimize equipment downtime, and lengthen carrier lifetimes.

Air Handler

General Air

Chatsworth, CA

A stainless-steel air handler controls temperature and humidity in environments down to Class 1 when used with a HEPA or ULPA filter. The handler is available with either multichannel or single-channel control systems. Each channel comes with two independent controllers and two independent sensors. In multichannel systems each flow channel is completely independent of the other. The relative humidity range is 35—50% at ±1% RH. Temperature control range is 18°—25°C at ±0.1°C.

Gas-System Fittings

Omnisafe

Campbell, CA

Fittings for hazardous and UHP gas systems do not transfer torque to connected components when tightened, thus eliminating particle generation from galled glands and gaskets. The fittings also prevent damage to the glands of gas-system components during final high-pressure testing, obviating the need for polishing after testing. Compatible with existing VCR-type units, the fittings can be installed using standard wrenches. Units can be perfectly aligned without rotational displacement of attached lines and components during installation. The design eliminates the incidence of cross torque when one fitting comes loose as a result of tightening another. The design also prevents fluctuation of the calibration point on a pressure transducer during installation caused by stress deformation of sensing mechanisms.