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Promis, Moto sign $7.5M pact

Promis Systems has signed a three-year deal to license the vendor’s manufacturing software and automation products to Motorola. The contract with Motorola’s semiconductor products sector totals a minimum of $7.5 million through 1999 and is the largest single order in the history of the Toronto-based supplier. Promis will supply the chipmaker with PROMIS, Promis Encore!, and automation tools.

Tegal takes etch orders

A U.S. chipmaker and a Japanese DRAM manufacturer ordered etch systems from Tegal for delivery by the end of last year, the vendor announced. The orders totaled $5 million. The American customer purchased its second 6500-series etch tool for installation in its pilot line. The Japanese chipmaker will use the 6500-series system for process development linked to FRAM and high-capacity DRAM manufacturing.

Eaton implants White Oak

Eaton’s semiconductor business unit was picked by White Oak Semiconductor as the chipmaker’s primary supplier of ion implantation and related process gear. The order comprises Eaton’s entire product line. The equipment list includes Eaton’s GSD/200E² high-current systems, Reliance 850 RTP tools, and photostabilizers. Aftersales support is part of the package, Eaton said. Shipments began last October for installation in White Oak’s $1.5-billion Virginia fab. The joint venture between Motorola and Siemens is scheduled to begin production of 64-Mb DRAMs on 8-in. wafers by the middle of 1998, according to Eaton. The vendor’s thermal processing systems unit also announced that Implant Center bought several Reliance 850 RTP systems and two GSD high-current implanters for its contract implant processing services. The tools will be used to anneal wafers at the company’s San Jose facility.

Moto gives Olin control

Olin Microelectronic Materials will oversee operations of the entire chemical distribution system at Motorola’s AISL fab in Tempe, AZ, under the terms of a recently signed contract. Olin will be responsible for inventory management, analytical sampling, JIT delivery, and chemical purity to the point of use. The vendor will also dispose of all chemical waste from the site.

CFM makes Korean sale

Anam of South Korea purchased two Full-Flow 8050 dual-vessel systems valued at $4.9 million from CFM Technologies of West Chester, PA. Anam will use the tools for postash cleaning. Delivery of the first tool is expected by the end of January. The second system is scheduled for shipment in the second quarter of the fiscal year.

SMIF goes to Wales

Europe’s largest pure wafer foundry signed a multimillion-dollar multiple-phase contract for SMIF systems with Asyst Technologies. Newport Wafer-Fab Ltd. (NWL) will install the wafer isolation and paperless tracking systems in Fab 3, a new 8-in. wafer plant in Newport, Wales. Initial delivery was scheduled for last December.

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