Reticle Inspection System

Applied Materials

Santa Clara, CA

An upgraded version of the company’s Orbot RT-8000, the RT-8000ES offers linewidth error detector algorithms to detect linewidth variations >=0.15 µm on the reticle. The algorithms enable the inspection tool to detect improperly sized features such as lines and contacts. It also improves the operator’s ability to detect edge defects. Software and hardware enhancements give the system the ability to examine defects on most advanced reticles, including those using optical proximity correction and phase-shift technologies. The tool’s image-acquisition technology and detection algorithms minimize the risk of false defect detection. In addition, the system’s DataExpress module reduces pattern data conversion time and maintains high throughput for all mask types.

Spray Cleaner

FSI International

Chaska, MN

Capable of cleaning 300-mm wafers, the Zeta surface-conditioning system can blend up to eight chemicals for process programming flexibility. The system accommodates a range of chemical blend ratios, including dilute ratios for RCA cleans and on-line HF blending. The spray tool, which can be used with front-opening unified pods or open cassettes of 15 to 25 wafers, automatically transfers wafers to spray-compatible process cassettes. This feature can lower chemical and DI water consumption, reducing production costs for pilot and production fabs. Tested at the I300I fab in Austin, TX, the system is designed for manufacturing advanced microprocessor and memory devices with linewidths as small as 0.18 µm.

HEPA Filter

HEPAir

Syracuse, NY

A filter system combines all the features of a fan-powered filter module with a totally self-contained air conditioner. The unit fits into a standard 2 x 4-ft T-bar ceiling and contains all components in one package, including filter, blower, cooling coil, cooling fan, condenser coil, compressor, refrigerant piping, and controls. The module accepts most manufacturers’ fan filter units. It can also be furnished with its own filter, and one unit can service several fan-powered filter modules. Options include prefilters, lights, humidifier, reheating coil, and pressurization control for positive or negative pressure.

Film Metrology System

Rudolph Technologies

Flanders, NJ

The SpectraLASER 300 XL rapidly characterizes 300-mm wafer processes and routinely monitors them using both multiple angle of incidence and multiple wavelength data. To ensure repeatability of 0.15 Å, the system delivers a laser measurement spot of 5 x 10 µm, high optical intensity, and a throughput of 80 wafers/hr. Using individual lasers at 458, 633, 780, and 905 nm, the system provides broad spectral coverage and a deep-UV reflectometer to characterize both thick and thin films in CMP, CVD, diffusion, etch, and lithography applications. The laser light sources operate from 20,000 to 30,000 hours. The system incorporates a minienvironment and a point-and-click GUI.

Chemical Ampules

Bostec

Torrance, CA

All-metal chemical ampules eliminate contamination caused by moisture in dopant chemical systems. The ampules use only all-metal H-seals at the lid, fill ports, and any openings to the vessel. The components create a high-integrity vacuum seal. All ampules feature micropolished surfaces, electropolished wetted surfaces, and mirror or brushed exteriors. They come in sizes of 500 cm³ to 2.2 L with standard or customized valve and port configurations. Each unit is packaged for shipping in rugged plastic containers. Models are available in 316L, 316L-VAR, Monel, Inconel, and Hastelloy.

Defect-Review Tool

FEI

Hillsboro, OR

The DualBeam XL830 FIB/SEM workstation operates at a 3-nm resolution at voltages from 1 to 30 kV for 200-mm wafer analysis. The electron column’s balanced-field, in-lens detection provides topographic detail in three dimensions, down hole visibility, and enhanced grain boundary imaging. The operator can switch between field-free and immersion modes. The former provides large-area, low-magnification images with low levels of distortion and a large depth of field. The latter offers high-resolution imaging of defects and features in the sub-quarter-micron range. At 1 kV backscattered electron images offer enhanced grain boundary imaging of metal lines and polysilicon, as well as strong contrast for contact hole imaging. The FIB column is optimized for rapid and precise milling through the wafer’s surface layers to detect subsurface defects. Proprietary software knows how each column behaves when certain parameters are changed that affect the position of the submicron stage during eucentric tilt or compucentric rotation.

Wafer-Temperature Measurement

SensArray

Santa Clara, CA

The portable Thermal Track 2.1 system performs statistical analysis of thermal cycle temperature data using spreadsheets such as Microsoft Excel. The in situ tool accurately measures wafer temperature on photolithography track processes in real time. The instrument’s calibration wafer has an array of up to 17 resistance temperature detectors. Applications include calibrating temperature set points on resist bake and chill plates as well as troubleshooting temperature-related CD problems. Absolute accuracy is ±0.1°C. Point-to-point profile precision is ±0.5°C. Temperature can be downloaded to the company’s Thermal MAP 2 system for off-line analysis.

Air Velocity Analyzer

Cambridge AccuSense

Shirley, MA

The Quattro Flow measures airflow velocity using four sensor ports. This multichannel design eliminates the possibility of measuring with an uncalibrated sensor, because operators are able to check one sensor against another. The instrument operates continuously for up to 8 hours of data collection and analysis and is compatible with AccuTrac software for graphical and statistical evaluation of laminar airflow. Data can be displayed, saved in .XLS format, converted into graphs, and printed without having to export it to another program. The sensor package includes clip-on sensors that can be attached to an optional grid or attached at intervals to a wand for measuring airflow in fume hoods and safety cabinets.

Static-Dissipative Laminates

Nevamar

Odenton, MD

Suitable for cleanroom use, laminates dissipate static electricity by providing a path to ground at a uniform resistance from any point on the surface. Values range from 1 x 10⁶ to 1 x 10⁹ ‡, measured at 100 V. The laminates come in colors such as beige, almond, white, gray, and blue, and their protective surface minimizes shedding. The extremely hard protective layer includes a microthin application of aluminum oxide to resist abrasion and extend the life of the laminate. The surface also resists chemicals, solder, and heat.

Furnaces

Canary Technology Services

Fremont, CA

The Noble furnace series offers advanced processing capabilities for small batch loads, including 300-mm wafers. Single or multiple stacks are available for diffusion and LPCVD applications. The Noble IPS Series 26 incorporates an automated loading bay, gas controls, and process chamber for wafers measuring 50­150 mm. The Series 812 processes small batches of 200- and 300-mm wafers in a furnace with a small footprint. The Noble BT is a benchtop series for R&D projects. The furnaces can be customized for specific research uses.

Gas Monitor

Control Instruments

Fairfield, NJ

The SmartMaxII digital control monitor handles readings from up to four different types of sensors. The monitor includes sensors for combustible gas, oxygen, and toxic gases such as hydrogen sulfide. It comes equipped with a 4­20-mA analog output, an RS-485 serial port, and three programmable relays. The instrument is available in either general purpose or explosion-proof packages.

DC Power Supplies

Diversified Technologies

Bedford, MA

Designed to provide a clean power source for semiconductor fab processes, DPS switching mode power supplies use solid-state switching to provide 1 to 160 kV of adjustable output. The units feature full overvoltage and overcurrent protection up to +30% of preset. They also offer ±2% voltage regulation and ±1% maximum ripple. The largest models measure 30 x 30 x 72 in. and weigh 500 lb. All use tap water for cooling. Three models are available with voltage ranges to 50, 100, and 200 kVA, respectively.

Fab Automation Software

Auto-Soft

Salt Lake City, UT

Manufactured specifically for automating production in cleanrooms, iMaven software accommodates 300-mm wafer processing requirements for intrabay transport control. All components in the software architecture are plug and play. Each component contains a group of one or more production services and incorporates functions such as carrier transport, carrier storage, control systems, process systems, and identification systems.

Nitrogen Blanket Systems

Ultrapure & Industrial Services

Austin, TX

BlankeTrol nitrogen blankets control the inert nitrogen atmosphere in small UPW systems, ensuring low nitrogen consumption. To prevent malfunctions and protect the tank, the system’s passive vacuum breaker and overpressurization module have no mechanical components. A NEMA enclosure permits installation in wet or corrosive atmospheres. Standard capacities range from 5 to 316 gal/min.

Laser Cutting System

New Wave Research

Sunnyvale, CA

The EzLaze laser cutting system features single-shot pulse repetition rates of 1 or 5 Hz for semiconductor failure analysis, design verification, LCD repair, and micromachining applications. Mounted on the Mitutoyo FS60 or A-Zoom microscopes, the instrument produces uniform, repeatable cuts ranging from 1 x 1 to 50 x 50 µm. A switch allows operators to choose from wavelengths of 1064, 532, and 355 nm, depending on the application. A PCLaze Windows interface permits users to select the laser’s cut size and Laser-Macros enables the user to store and recall commonly used settings.

CMP Thickness Monitor

Nova Measuring Instruments

Cupertino, CA

With double the throughput of the previous model, the NovaScan 420 integrated thickness monitor permits wafer metrology and mapping operations during chemical mechanical planarization. The system gives operators rapid feedback during the CMP process, offering the accuracy and resolution of stand-alone monitors and the real-time capabilities of end-point detection tools. In-water measurement eliminates the need to clean and dry wafers before measuring, and all measurements are performed while the next wafer is in process. The technology also eliminates the need to use cleanroom space for off-line measurements. The system can be incorporated into polishing systems made by OEMs such as Applied Materials, Ebara, IPEC/Planar, Speedfam, and Strasbaugh.

Benchtop Spectrometer

European Spectrometry Systems

Cheshire, England

The GeneSys benchtop mass spectrometer is housed in a compact cabinet that incorporates all required pumps, including the rotary pump. The instrument’s advanced Windows software uses a flexible user interface that allows the operator to edit the default windows to suit individual preferences for rapid data collection. Data acquired from calibration routines are displayed in concentration levels rather than in pressure units to facilitate analysis. Data can be shown as a bar graph, table, or trend against time for up to 64 different components. Operating range is 100­1000 mbar. Applications include trace gas impurity detection and high-vacuum contamination measurement.

Cleanroom Gloves

CT International

San Luis Obispo, CA

The Correct-Touch line of latex, nitrile, and vinyl gloves come in lengths of 10 or 12 in. Ambidextrous and hand-specific styles are available. The line includes Correct-Grip Class 100 nonslip latex gloves and the Nitrilon family of Class 10 and Class 100 latex-free gloves of 100% nitrile. All gloves meet or exceed ASTM D 3578-91 standards.

Arc Welding Systems

Process Welding Systems

Nashville, TN

The automated functions of high-volume production welding systems permit users to conduct pre- and post-weld quality checks. The systems also offer maximum output and consistent weld quality through the use of multiple tooling stations. Operators have the option of loading or unloading parts or using conveyor-fed pick-and-place robots.

Vacuum Pump Components

Precision Plus Vacuum Parts

Whippany, NJ

Remanufactured vacuum pump components include piston slides, eccentrics, rotor assemblies, and shafts for pumps made by Alcatel, Busch, Edwards, Kinney, Leybold, Stokes, and Welch. The components are refurbished to meet or exceed OEM specifications and come with a one-year warranty. Worn areas are rough-machined to prepare a good adhesive surface and a stainless-steel composite is flame-sprayed onto the part’s surface. Parts are polished and returned to the customer ready for installation.

Residue Removers

Ashland-ACT

Dublin, OH

NP-937 and NP-941 chemicals remove postetch residue for sub-half-micron and via-level cleaning. Both sidewall polymer removers are formulated for maximum corrosion protection on semiconductor metal levels.

Product Extra!

Mattson Technology has added low-temperature stripping capabilities to its Aspen strip systems. The inductively coupled plasma (ICP) selectable mode removes implanted resists and etch residues at a throughput of more than 70 wafers/hr. The process can reduce costs and shorten cycle times for device manufacturers, according to the company. ICP technology uses an electrostatic Faraday shield to eliminate capacitively coupled power and to control the distribution of electron energy in the plasma. The new source permits users to select and control the plasma at various process steps. The system can be operated in either high- or low-energy plasma modes, which can be changed at any point in the recipe. This feature enables the use of multistrip recipes inside one chamber. Information: 800/MATTSON.

Extrema Plus TEOS and CVD dopant sources from Schumacher are produced to specifications ensuring high individual metal purity, inclusive metal analysis, and high overall metal purity. The UHP chemicals are produced to ensure consistent process results for manufacturing submicron devices. Information: 619/931-9555.

Precision Plus is offering repair kits for dry vacuum pumps made by Leybold and Ebara. The kits can be used for Leybold’s Dryvac B and P series and Ebara’s A70W and A10S series pumps. The tools are available for rapid delivery from stock kept in the United States. Prices are competitive with kits offered by the OEMs, Precision Plus says. Information: 800/526-2707.

Sela, an Israel-based manufacturer of microcleaving systems for failure analysis, has received SEMI certification for its MC 200 microcleaving system. The tool meets SEMI standards for documenting the hazards in the manufacturing process, verifying the manufacturer’s test methodology, and stipulating ergonomic parameters for tool design. Information: 408/988-5151.

AIO has received three U.S. patents for its Sonic Fog IPA substrate-drying technology. The process uses ambient-temperature liquid IPA and ultrasonics to dry wafers, disk drives, and FPD substrates. The method eliminates the need for fire-suppression systems and IPA recovery. The system can be supplied as a stand-alone replacement or as OEM modules for wet-chemical applications. Information: 510/249-1310.

An Internet-based inventory process allows BOC Gases and Thermadyne to better manage more than 5000 items stocked at BOC branches in the United States. The management system enables BOC to transfer relevant inventory information from its branches that allows Thermadyne to optimize both the timing and size of replenishment orders. In addition, the process allows Thermadyne to send orders through the Internet to its plants and transfer the information to BOC for integrating with BOC’s sales order and inventory system. BOC says the system reduces transaction costs and eliminates excess inventory. Information: 908/771-1512.

Matheson Electronic Products Group and Advanced Technology Materials are offering silicon tetrafluoride as a Safe Delivery Source (SDS) product for ion implantation. The addition of SiF^₄ to the SDS product line completes an ion implantation family of gases that encompasses arsine, phosphine, and boron trifluoride. The vendors claim SDS technology enables chipmakers to lower gas exhaust rates during ion implantation and thus reduce ventilation costs. SDS products come in cylinder sizes of 0.4, 2.2, and 6.6 L. Information: 408/971-6500.

Pick of the Literature

The following companies are offering free literature:

• Edlon, EasyLiner nozzle repair sleeve data sheet. Information: 610/268-3101; fax, 610/268-8898.

• Fibrex, IntegraHeader chlorine-carrying FRP duct brochure. Information: 360/755-9025; fax, 360/755-9034.

• International Seal, O-ring seals catalog. Information: 714/834-0602; fax, 714/834-0590.

• Meissner Filtration Products, filter products catalog. Information: 805/388-9911; fax, 805/388-5948.

• Metro, cleanroom products brochure. Information: 800/433-2232.

• MKS Instruments, HPS Div., SensaVac Series 947 Pirani gauge controller brochure. Information: 800/345-1967; fax, 303/442-6880.

• Palmetto TMR, mechanical contracting brochure. Information: 864/585-9501; fax, 864/585-0319.

• Sierra Monitor, Sentry gas monitoring system brochure. Information: 408/262-6611.

• Solvay Interox, hydrogen peroxide products brochure. Information: 800/INTEROX; fax 713/524-9032.

• Specialized Products, Fall ’97 catalog of tools, tool kits, cases, and test equipment. Information: 800/866-5353; fax, 817/329-6195.

• Stokes Vacuum, rotary vane vacuum pumps brochure. Information: 888/4-STOKES; fax, 215/831-5420.

• Technical Air Products, LogiClean softwall cleanroom system brochure. Information: 800/595-0200; fax, 616/458-9534.

• U.S. Filter/Memtek, advanced membrane filtration system brochure. Information: 412/772-0044; fax, 412/772-1360.

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