INDUSTRY NEWS

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February 22­27, SPIE's 23rd Annual International Symposium on Microlithography; Santa Clara, CA. Contact: 360/676-3290.

February 23­25, SEMInvest 98; London. Contact: 415/964-5111.

March 2­3, Environmental Data Validation, short course; New Orleans. Contact: 800/367-2587.

March 2­4, CleanRooms East 98; Baltimore. Contact: 603/891-9267.

March 2­4, Statistical Process Control in Semiconductor Manufacturing, short course; San Leandro, CA. Contact: 510/643-6691.

March 2­5, Semiconductor Pure Water and Chemicals Conference; Santa Clara, CA. Contact: 408/745-0600.

March 25­27, Digital Integrated Circuits, short course; Tempe, AZ. Contact: 602/965-1740.

March 31­April 2, Semicon Europa; Geneva. Contact: 415/964-5111.

April 14­17, 20th Annual International High-Technology Safety, Industrial Hygiene, and Environmental Conference and Exhibition (SSA 98); San Antonio, TX. Contact: 703/790-1745.

April 14­17, Ultrapure Water Expo '98; Philadelphia. Contact: 303/973-6700.

April 18­23, Society of Vacuum Coaters 41st Technical Conference; Boston. Contact: 505/856-7188.

April 22­23, Semicon China; Shanghai. Contact: 415/964-5111.

April 22­24, SCP Global Technologies' Fifth International Symposium; Boise, ID. Contact: 208/377-9700.

April 26­May 1, Institute of Environmental Sciences and Technology 44th Annual Technical Meeting and ICCCS Symposium; Phoenix. Contact: 847/255-1561.

May 4­7, Advancing Filtration Solutions 1998; St. Louis. Contact: 704/442-1940.

May 6­7, Cleanroom Technology Expo; Frankfurt, Germany. Contact: +44 (0) 171 417 7400; fax, +44 (0) 171 417 7500.

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